Abstract: According to aspects of the present disclosure, a change detection method for ROBOT process automation (RPA) performed by a computer device includes obtaining object information of a target object from first working environment information at a first time, and determining a comparison object detected in second working environment information at a second time as an object corresponding to the target object based on the obtained object information of the target information. Thus, even if an error occurs due to a change in a working environment, an RPA apparatus can operate normally by correcting the error by itself without the need for a user to recreate a new bot or modify the existing bot. Also, even if the position or shape of an object referred to by RPA in a screen is changed, the RPA apparatus can accurately find an object to manipulate based on surrounding information and perform RPA normally.

Abstract: A target object detection method performed by a computing device includes detecting a first target object on a user screen and obtaining a bot executable file to perform a defined operation for the first target object, labelling object type classification criteria for the first target object by encoding detection criteria information of the first target object included in the bot executable file, extracting a characteristic of process execution information of the first target object included in the bot executable file, and generating an object classification model that outputs data on an object type corresponding to process execution information by performing machine learning using the object type classification criteria and the characteristic.

Abstract: Provided is a multiple-input multiple-output (MIMO) antenna having a lightweight stacked structure. According to one aspect of the present invention, there is provided a MIMO antenna assembly having a lightweight stacked structure, in which a calibration network, which was provided between antenna elements and filters in the related art, is provided on one printed circuit board (PCB), together with a power amplifier and a digital circuit, and filters are closely coupled to the bottom of the PCB on which the feeding network is provided. The present invention employs a strategy in which an antenna assembly is reduced to a compact size while managing phase deviation caused due to filters at an acceptable level.

Abstract: An extreme ultraviolet generation apparatus is provided. The extreme ultraviolet generation apparatus includes a chamber, a droplet generator configured to provide a droplet into the chamber, a shroud which extends along a movement path of the droplet inside the chamber and surrounds the movement path of the droplet, a charging unit configured to charge the droplet, a monitoring unit configured to measure a position of the charged droplet, an alignment unit including at least one electromagnet, the alignment unit configured to correct the position of the charged droplet within the shroud using the at least one electromagnet, and an acceleration unit configured to accelerate the charged droplet after the position of the charged droplet has been corrected.

Abstract: A cavity-type radio frequency filter is disclosed. the radio frequency filter having a cavity structure including an enclosure, a resonant element, a cover, a frequency tuning screw, and a resilient fixing member. The enclosure has a hollow inside and an open surface on one side to have a cavity. The resonant element is positioned in the hollow of the enclosure. The cover has a screw hole having a preset diameter at a position corresponding to the resonant element, and is configured to seal the open surface of the enclosure. The frequency tuning screw is configured to be screwed into the screw hole of the cover, and it has an upper end formed at least partially with a latching abutment that protrudes outwardly.

Abstract: Provided is a multiple-input multiple-output (MIMO) antenna having a lightweight stacked structure. According to one aspect of the present invention, there is provided a MIMO antenna assembly having a lightweight stacked structure, in which a calibration network, which was provided between antenna elements and filters in the related art, is provided on one printed circuit board (PCB), together with a power amplifier and a digital circuit, and filters are closely coupled to the bottom of the PCB on which the feeding network is provided. The present invention employs a strategy in which an antenna assembly is reduced to a compact size while managing phase deviation caused due to filters at an acceptable level.

Abstract: Provided is a hyperspectral imaging (HSI)-based inspection apparatus capable of quickly and stably performing two-dimensional (2D) HSI for an inspection object, and accordingly, capable of quickly and accurately inspecting the inspection object. The HSI-based inspection apparatus includes: a stage on which an inspection object is arranged; an optical system configured to allow light to be incident on the inspection object and emit the light reflected from the inspection object; a scan mirror configured to reflect the emitted light from the optical system while rotating; and a hyperspectral camera configured to obtain an image having a wavelength direction and a line direction as two axes for light reflected from the scan mirror, wherein, by using the rotation of the scan mirror, the hyperspectral camera is configured to perform the 2D HSI for the inspection object.

Abstract: An extreme ultraviolet (EUV) light concentrating apparatus including a main body having a concave inner portion and configured to rotate, a tin generator configured to generate tin drops and spray the tin drops, a tin catcher configured to process the sprayed tin drops, a protective cover configured to block the tin drops from falling into the main body, and a rotation guide configured to rotate the main body may be provided.

Abstract: According to aspects of the present disclosure, a change detection method for ROBOT process automation (RPA) performed by a computer device includes obtaining object information of a target object from first working environment information at a first time, and determining a comparison object detected in second working environment information at a second time as an object corresponding to the target object based on the obtained object information of the target information. Thus, even if an error occurs due to a change in a working environment, an RPA apparatus can operate normally by correcting the error by itself without the need for a user to recreate a new bot or modify the existing bot. Also, even if the position or shape of an object referred to by RPA in a screen is changed, the RPA apparatus can accurately find an object to manipulate based on surrounding information and perform RPA normally.

Abstract: An apparatus for monitoring an interior of a process chamber including a process chamber including a chamber body and a view port defined in the chamber body, a cover section including a pinhole in one end, the cover section disposed to correspond to an end portion of the view port, the cover section having a first length in a direction toward a center point of the process chamber, and a sensing unit inserted into the view port to monitor the interior of the process chamber through the pinhole, a region in the process chamber to be sensed by the sensing unit determined based on the first length may be provided.

Abstract: The present invention relates to a cavity filter and a connecting structure included therein. The cavity filter includes: an RF signal connecting portion spaced apart, by a predetermined distance, from an outer member having an electrode pad provided on a surface thereof; and a terminal portion configured to electrically connect the electrode pad of the outer member and the RF signal connecting portion so as to absorb assembly tolerance existing at the predetermined distance and to prevent disconnection of the electric flow between the electrode pad and the RF signal connecting portion, wherein the terminal portion includes: a first side terminal contacted with the electrode pad; and a second side terminal having a housing space in which a part of the first side terminal is housed, and connected to the RF signal connecting portion, wherein the first side terminal is provided as an elastic deformable body whose part is radially widened or narrowed against an assembly force provided by an assembler.

Abstract: The present invention relates to a cavity filter.

Abstract: The present disclosure relates to a cavity filter and a connecting structure included therein. The cavity filter includes: an RF signal connecting portion spaced apart, by a predetermined distance, from an outer member having an electrode pad provided on a surface thereof; and a terminal portion configured to electrically connect the electrode pad of the outer member and the RF signal connecting portion so as to absorb assembly tolerance existing at the predetermined distance and to prevent disconnection of the electric flow between the electrode pad and the RF signal connecting portion, wherein the terminal portion includes: first side terminal contacted with the electrode pad; and the second side terminal connected to the RF signal connecting portion. Therefore, the cavity filter can efficiently absorb assembly tolerance which occurs through assembly design, and prevents disconnection of an electric flow, thereby preventing degradation in performance of an antenna device.

Abstract: The present invention relates to a cavity filter and a connecting structure included therein.

Abstract: The present invention relates to a cavity filter including: an RF signal connecting portion spaced apart, by a predetermined distance, from an outer member having an electrode pad provided on a surface thereof; and a terminal portion configured to electrically connect the electrode pad of the outer member and the RF signal connecting portion so as to absorb assembly tolerance existing at the predetermined distance and to prevent disconnection of the electric flow between the electrode pad and the RF signal connecting portion, wherein a part of the terminal portion, positioned between the electrode pad and the RF signal connecting portion, is elastically deformed to absorb assembly tolerance existing in a terminal insertion port. Therefore, the cavity filter can efficiently absorb assembly tolerance which occurs through assembly design, and prevent disconnection of an electric flow, thereby preventing degradation in performance of an antenna device.

Abstract: An extreme ultraviolet generation apparatus is provided. The extreme ultraviolet generation apparatus includes a chamber, a droplet generator configured to provide a droplet into the chamber, a shroud which extends along a movement path of the droplet inside the chamber and surrounds the movement path of the droplet, a charging unit configured to charge the droplet, a monitoring unit configured to measure a position of the charged droplet, an alignment unit including at least one electromagnet, the alignment unit configured to correct the position of the charged droplet within the shroud using the at least one electromagnet, and an acceleration unit configured to accelerate the charged droplet after the position of the charged droplet has been corrected.

Abstract: The present invention provides a cavity filter having a slim and compact structure in which a push-pin type RF connector, which is formed such that a terminal is exposed to both sides or one side in a height direction, is embedded so as to reduce a size of an antenna system, quickly perform verification for an individual cavity filter while having high reproducibility, and enable the antenna system to be readily mounted.

Abstract: Provided are high-strength steel having superior brittle crack arrestability and a production method therefor. The high-strength steel comprises 0.05-0.1 wt % of C, 1.5-2.2 wt % of Mn, 0.3-1.2 wt % of Ni, 0.005-0.1 wt % of Nb, 0.005-0.1 wt % of Ti, 0.1-0.5 wt % of Cu, 0.1-0.3 wt % of Si, at most 100 ppm of P, and at most 40 ppm of S with the remainder being Fe and other inevitable impurities, has microstructures including one structure selected from the group consisting of a single-phase structure of ferrite, a single phase structure of bainite, a complex-phase structure of ferrite and bainite, a complex-phase structure of ferrite and pearlite, and a complex-phase structure of ferrite, bainite, and pearlite, and has a thickness of at least 50 mm. The high-strength steel has high yield strength and superior brittle crack arrestability.

Abstract: The present invention relates to a cavity filter and, particularly, to a cavity filter comprising: a resonance element including a coupling block; a first case including the resonance element therein; a second case arranged so as to cover one surface of the first case; a terminal unit penetrating the first case such that one end thereof is protrudingly provided so as to be connected to an electrode pad of an external member provided on the outside of the first case and the other end thereof is electrically connected to the coupling block of the resonance element provided to be close to the second case, wherein the terminal unit is electrically insulated from the first case; and an assembly unit provided on either one side or both sides in the lengthwise direction of the case, and having a terminal insertion hole in which the terminal unit is insertedly provided, wherein the assembly unit is formed to protrude to the outside from a lower surface of the first case.