Patents by Inventor Suren Madunts

Suren Madunts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shaped repeller for an indirectly heated cathode ion source
    Patent number: 11251010
    Abstract: A system for extending the life of a repeller in an IHC ion source is disclosed. The system includes an IHC ion source wherein the back surface of the repeller has been shaped to reduce the possibility of electrical shorts. The separation distance between the back surface of the repeller and the chamber wall behind the repeller is increased along its outer edge, as compared to the separation distance near the center of the repeller. This separation distance reduces the possibility that deposited material will flake and short the repeller to the chamber wall. Further, in certain embodiments, the separation distance between the back surface of the repeller and the chamber wall near the center of the repeller is unchanged, so as to minimize the flow of gas that exits from the chamber. The back surface of the repeller may be tapered, stepped or arced to achieve these criteria.
    Type: Grant
    Filed: July 27, 2021
    Date of Patent: February 15, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Alexander S. Perel, Jay S. Johnson, Suren Madunts, Adam M. McLaughlin, Graham Wright