Abstract: A flow control device is capable of performing accurate flow control over a wide pressure range. The flow control device includes: a housing; a diaphragm splitting the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and being activated by the differential pressure generated between the gas chamber side and the fluid chamber side; and a valve body which operates in integration with the diaphragm to regulate the flow of the fluid introduced to the fluid chamber side. The diaphragm includes: a base part provided in a substantially central part of the diaphragm; and a thin film part provided on the outer rim of the base part. An opposing surface which is provided on the fluid chamber side to oppose the diaphragm includes a retaining form which retains the shape of the thin film part deformed by the differential pressure.

Abstract: A flow control device is capable of performing accurate flow control over a wide range of temperatures by using a housing made of resin with superior chemical resistance. The flow control device includes: a housing made of resin; a diaphragm which is supported in the housing so as to split the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and is activated by the differential pressure between the gas chamber side and the fluid chamber side; and a valve body which operates in integration with the diaphragm to regulate the flow of the fluid introduced into the fluid chamber side. The gas chamber side includes a holding member which holds the diaphragm between itself and an opposing surface of the fluid chamber side opposite to the diaphragm, the holding member being screwed to the inner peripheral wall of the gas chamber side through a screw part.

Abstract: A liquid storage container has a double structure provided with an outer container forming an outer shell and a liner arranged in the outer container, the liner accommodating a liquid, wherein the liquid is pushed out from the liner by gas pressure introduced into the outer container so as to flow out to an exterior of the container from a siphon of a plug attached to a stopper portion of the outer container, a substantially concentric drop tube is arranged on an outer periphery of the siphon so as to form a space portion serving as a liquid flow passage, a through hole is formed on a tube wall of the drop tube, and an outlet opening for making the inflow liquid coming from the through hole flow out from the liquid flow passage.