Patents by Inventor Susan Chen

Susan Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5468340
    Abstract: A method for rapid anisotropic dry etching of oxide compounds in high aspect ratio openings which etching method is highly selective to metal salicides and which method employs plasma gases of CHF.sub.3, N.sub.2 and a high flow rate of He at a high pressure and products made by the process.
    Type: Grant
    Filed: November 30, 1993
    Date of Patent: November 21, 1995
    Inventors: Subhash Gupta, Susan Chen, Angela Hui
  • Patent number: D382221
    Type: Grant
    Filed: June 5, 1996
    Date of Patent: August 12, 1997
    Assignee: Portman Electronic International Corp.
    Inventor: Susan Chen