Patents by Inventor Susan K. Fung

Susan K. Fung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microlithographic method for producing thick, vertically-walled photoresist patterns
    Patent number: 5330881
    Abstract: A microlithographic resist patterning process which allows generation of very thick, vertically-walled resist patterns which allow for subsequent deposition or etching operations can produce high recording density magnetic thin film heads and other devices requiring high aspect ratios.
    Type: Grant
    Filed: December 21, 1992
    Date of Patent: July 19, 1994
    Assignee: Digital Equipment Corp.
    Inventors: Alan L. Sidman, Susan K. Fung