Abstract: A dry etching process for use in the manufacture of silicon integrated circuit devices uses a mixture of about eight parts neon to one part CHF.sub.3 (Freon 23) to form the etching plasma. The process etches doped oxides of silicon, such as BPSG and BPTEOS, in preference to undoped oxides of silicon, silicon nitride, silicides and silicon.

Abstract: A dry etching process for use in the manufacture of silicon integrated circuit devices uses a mixture of about eight parts neon to one part CHF.sub.3 (Freon 23) to form the etching plasma. The process etches doped oxides of silicon, such as BPSG and BPTEOS, in preference to undoped oxides of silicon, silicon nitride, silicides and silicon.

Abstract: A recliner for a vehicle seat assembly is disclosed in which the locking pawl of the recliner is formed with teeth configured to resist damage when the seat back is rotated to a forward dump position. The pawl teeth at the end of the pawl closest to the slide face of the recliner latch gear are of a shorter length than the remainder of the pawl teeth to enable the teeth to resist bending deformation caused by impact with the latch gear end face. The pawl teeth are of a progressively longer length from the end of the pawl inward, over a limited number of teeth.

Abstract: An improved recliner for a seat assembly is shown of the type having a pawl engagable with a sector gear having a cam engagable with the pawl to hold the pawl in a locked position. The recliner provides a curved camming surface on the pawl having a substantially constant locking angle relative to the pawl to ensure that the friction force available between the cam and pawl is sufficient to prevent back driving of the recliner by forces applied to the seat back. In addition, the cam contacting surface is profiled to ensure a quick release of the recliner and the cam, once released from the pawl camming surface, contacts a release surface of the pawl to positively rotate the pawl from engagement with the sector gear. The cam is rotated by an operating lever coupled to the cam by a lost rotational motion coupling enabling the operating lever to have a fixed rest position relative to the seat cushion regardless of the rest locked position of the cam.