Abstract: A pipe joint which does not generate fine particles even though being repeatedly mounted and demounted is provided. A pipe joint includes first and second joint members having fluid channels communicating with each other, an annular gasket to be interposed between abutting end surfaces of the both joint members, and a nut configured to couple the joint members. The nut is provided with an inner surface treated layer. The inner surface treated layer includes a Co (cobalt)-P (phosphorous) alloy metal coating provided on an inner surface of the nut and a fluorine coating provided on the surface of the alloy metal coating.

Abstract: An air cleaning apparatus includes an air passage chamber having a suction port, from which air is sucked, and a discharge port from which the air sucked from the suction port is discharged, an air blower, provided in the air passage chamber, for sucking the air from the suction port into the air passage chamber and discharging the sucked air from the discharge port, and a particle removing mechanism for removing particles contained in the air sucked from the suction port, the entire body of the particle removing mechanism being formed of a material which generates little impurity gas detrimental to processing in a processing space.

Abstract: A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace for treating the wafer, provided in the upper portion of the housing. The carriers are at the same time supported by a first carrier stage provided in the upper portion of the housing and supported by a second carrier stage provided in the lower portion of the housing. The carrier or carriers are selectively moved between the I/O port and the first stage, between the I/O port and the second stage, and between the first stage and the second stage. A clean air is applied to the wafers in the carriers supported by the I/O port, the first stage and the second stage.

Abstract: A clean air apparatus comprises a body in which clean air is supplied, an I/O port having an opening for carrying a carrier housing objects to be treated in/out of the body, a door which opens/closes the opening, and dust preventing device for preventing dusts from entering the body from the outside through the opening, when the door is opened.

Abstract: The manufacture is carried out by impregnating bundles of filaments of fibrous-reinforcing material in a bath made up of an emulsion of a thermoplastic resin and a blowing agent. The emulsion-impregnated reinforcing filament bundles are then squeezed and dried to form resin coatings, and then collected to provide a single bunch of the fiber-reinforced thermoplastic resin material. This bunch is subsequently heated and allowed to expand in a tunnel and also cooled in a tunnel to produce a fiber-reinforced thermoplastic resin of a cellular structure. During the impregnation with the emulsion in a bath, the bundles are slackened and repeatedly beaten in the condition of free tension to cause the filament bundles to be substantially frayed to facilitate the impregnation. An apparatus utilizable in the practice of the above method is also disclosed.