Abstract: A system and method for determining the position of an automatically guided vehicle within a workspace is disclosed which operates by detecting sounds generated by beacons placed within the workspace. The time for the beacon sounds to reach the vehicle is measured and a distance to each beacon is determined. From these measured distances and the known positions of the beacons, the vehicle can determine its relative position.

Abstract: In the resist baking apparatus disclosed herein, heating of the wafer is effected by direct contact with a thin disc-like heating plate whose heat capacity is not greatly disparate from that of the wafer. The heating plate is initially brought to a temperature higher than that which is to be applied to the resist but the corresponding cooling of the plate as the wafer is initially heated prevents damaging temperatures from reaching the resist. The heater plate is perforate and air pressure is utilized to support a wafer over the heater plate before heating is to begin and also to later lift the wafer and thereby sharply define the end of heating. During baking, a vacuum is applied through these same perforations to clamp the wafer tightly against the heating plate for tight thermal coupling.

Abstract: In the heat treating apparatus disclosed herein, a semiconductor wafer, held in a vacuum chuck, is traversed under an infrared source in which radiant energy from a linear, high intensity lamp is focused by an elongate elliptical reflector to generate a linear target zone through which the surface of the wafer is effectively scanned by the relative motion.

Abstract: A prosthetic knee apparatus includes a pair of spaced side brackets depending from the upper leg prosthesis, and a housing disposed between the brackets. Extending through the housing to the brackets are anterior and posterior pivot shafts, the posterior pivot being provided with some play to permit a slight degree of pivot about the anterior shaft. A pair of leg brackets are also joined to the posterior pivot shaft with no play, and the housing is provided with a locking pin arrangement to releasably lock the leg brackets to the housing. The housing is provided with a pair of opposed braking pads which impinge on the leg brackets, the braking pads being actuated by a wedge which is driven into engagement by weight applied to the upper leg portion posteriorly of the anterior pivot shaft.