Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes an insulation layer. A bottom electrode via is disposed in the insulation layer. The bottom electrode via includes a conductive portion and a capping layer over the conductive portion. A barrier layer surrounds the bottom electrode via. A magnetic tunneling junction (MTJ) is disposed over the bottom electrode via.

Abstract: A method includes forming Magnetic Tunnel Junction (MTJ) stack layers, which includes depositing a bottom electrode layer; depositing a bottom magnetic electrode layer over the bottom electrode layer; depositing a tunnel barrier layer over the bottom magnetic electrode layer; depositing a top magnetic electrode layer over the tunnel barrier layer; and depositing a top electrode layer over the top magnetic electrode layer. The method further includes patterning the MTJ stack layers to form a MTJ; and performing a passivation process on a sidewall of the MTJ to form a protection layer. The passivation process includes reacting sidewall surface portions of the MTJ with a process gas comprising elements selected from the group consisting of oxygen, nitrogen, carbon, and combinations thereof.

Abstract: Provided herein are methods for treating or ameliorating malignant diseases, such as cancers. Also provided herein are methods of increasing the immunity of an immune cell toward malignant cells.

Abstract: An isolation region gap fill method comprises depositing a first dielectric material over a semiconductor device through a flowable deposition process or other gap fill deposition processes, wherein the semiconductor device includes a first FinFET comprising a plurality of first fins and a second FinFET comprising a plurality of second fins. The method further comprises removing the first dielectric material between the first FinFET and the second FinFET to form an inter-device gap, depositing a second dielectric material into the inter-device gap and applying an annealing process to the semiconductor device.

Abstract: An isolation region gap fill method comprises depositing a first dielectric material over a semiconductor device through a flowable deposition process or other gap fill deposition processes, wherein the semiconductor device includes a first FinFET comprising a plurality of first fins and a second FinFET comprising a plurality of second fins. The method further comprises removing the first dielectric material between the first FinFET and the second FinFET to form an inter-device gap, depositing a second dielectric material into the inter-device gap and applying an annealing process to the semiconductor device.