Abstract: A vibration measurement device 10 includes an excitation unit (signal generator 11 and vibrator 12) for exciting an elastic wave to an inspection target S, an illumination unit (wavelength stabilized laser beam source 13 and illumination light lens 14) for performing stroboscopic illumination to a measurement region of a surface of the inspection target S using a wavelength stabilized laser beam source 13, a displacement measurement unit (speckle-sharing interferometer 15) for collectively measuring a displacement of each point of the measurement region in the back-and-forth direction by speckle interferometry or speckle-sharing interferometer. By using the wavelength stabilized laser beam source 13, an interference image can be obtained even when the inspection target S has large surface irregularities.

Abstract: In a defect detection device (10), an input receiver (161) receives an input, by a user, of information concerning the kind and size of a defect expected to be present in or on a test object. An exciter (11, 12) induces an elastic wave in the test object, with the frequency of the elastic wave being variable. A measurer (15) optically measures a vibration state of the surface of the test object caused by the elastic wave. A wavelength determiner (164) determines the wavelength of the elastic wave induced in the test object, based on the vibration state obtained by the measurer. A frequency selector (165) selects an appropriate frequency from a plurality of frequencies, based on the kind and size of the expected defect as well as the wavelength acquired for each of the plurality of frequencies by the wavelength determiner by varying the frequency of the elastic wave.

Abstract: A defect inspection apparatus (100) according to the present invention includes an exciter (1), an irradiator (laser illuminator 2) configured to irradiate an inspection target (8) with laser light, and a measurer (3) configured to change a phase of the laser light reflected by the inspection target (8) to cause the laser light having an unchanged phase to interfere with the laser light having a changed phase, and to measure the interference light. The measurer (3) is configured to acquire an interference image (71) representing a vibration state of the inspection target (8) as viewed in a direction extending along a first light path (21), and an interference image (72) representing a vibration state of the inspection target (8) as viewed in a direction extending along a second light path (22) in which the reflected laser light travels from the inspection target (8) in a direction different from the first light path (21).

Abstract: The method for examining a clinched portion of a tubular body includes the steps of: giving an elastic vibration to a clinched body 90 formed by clinching a tubular body 91 with a clinch-target member 92; and acquiring, for each of a plurality of view areas 95 which differ from each other in the position in the circumferential direction of the tubular body 91, a vibration distribution optically and simultaneously measured within the view area 95 including a clinched portion 93 of the tubular body 91 and the clinch-target member 92, to determine whether or not the state of clinching is satisfactory over the entire clinched portion 93.

Abstract: A displacement measurement device 10 is provided with: a laser light source 11 for emitting laser light to a measurement area R of a measurement target object S; a focusing optical system (the beam splitter 151, the first reflecting mirror 1521, the condenser lens 155) having a front focal point in the measurement area R and a rear focal point on a predetermined imaging surface (the detection surface 1561); a non-focusing optical system (the beam splitter 151, the diffuser 153, the second reflecting mirror 1522, and the condenser lens 155) in which light from a measurement area R of a correspondence point in the measurement area corresponding to each point of the imaging surface with respect to the focusing optical system is incident on the point of the imaging surface; and a photodetector (image sensor 156) configured to detect light intensity on the imaging surface for each point.

Abstract: A defect inspection apparatus (100) includes an imager (image sensor 35) configured to image an inspection target 7, and a display (6) configured to display an image based on an image captured by the imager. The defect inspection apparatus (100) also includes a controller (4) configured or programmed to receive a setting of a marking (64) in a predetermined region of interest (S) on the image (still image 61) displayed on the display (6). The controller (4) is configured or programmed to inspect the inspection target (7) for a defect based on the image captured by the imager, and superimpose an image of the marking (64) on a position corresponding to the predetermined region of interest (S) in an image of an inspection result (overlay image 65) displayed on the display (6).

Abstract: A defect inspection apparatus (100) is provided with and an excitation unit (1) for exciting elastic waves, an irradiation unit (2) for emitting laser light, a measurement unit (3) for measuring interference light, and a control unit (4). The control unit is configured to acquire an image (61) representing a vibration state of an inspection target object (7) in a measurement area based on a measurement result of the measurement unit (3), detect a discontinuous portion in a vibration state in the measurement area from the image representing the vibration state as a defect (73), and identify a type of the defect based on at least one of a shape (62) of the detected defect and the vibration state of a defective portion.

Abstract: This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (3), an imaging unit (35), and a control unit (4) for generating a moving image (61) related to the propagation of an elastic wave of an inspection target (7). The control unit is configured to perform control to display an identified measurement inappropriate region (81) in such a manner as to be distinguishable from a measurement appropriate region (82) in which the vibration state has been correctly acquired in the moving image (61).

Abstract: This interference image imaging apparatus includes a first optical member (21) and a second optical member (22), and has a first portion (8) for transmitting a first bundle of rays (7) to change a direction of outgoing light with respect to incident light, and a second portion (10) for changing a phase of second bundle of rays (9) with respect to the first bundle of rays (7).

Abstract: In a defect detection device (10), an exciter (11) gives a test object (S) a vibration with a variable frequency. A vibration state measurer (15, 163) performs a measurement of the vibration state of the surface of the test object by an optical means while the vibration is given to the test object, and determines, for each position on the surface, a numerical value representing the vibration state based on a result of the measurement. A judgment-index-value determiner (164) determines a judgment index value by Fourier transform based on the numerical value representing the vibration state at each position, where the judgment index value is a numerical value representing a strength of the vibration for each wavenumber. A wavenumber-wavelength determiner (165) determines, based on the judgment index value determined for each wavenumber, a wavenumber or wavelength of an elastic wave induced in the test object by the vibration.

Abstract: A testing method for a joined body, in which a second pipe member having an outer diameter smaller than that of a first pipe member having at least one through hole is inserted into the first pipe member and the second pipe member is expanded to form a joining portion, the testing method includes: applying an elastic wave vibration to the joined body of the first pipe member and the second pipe member, for plural visual field regions at different positions in a circumferential direction of the joined body, acquiring a vibration distribution of the second pipe member measured through the through hole and a vibration distribution of the first pipe member in a visual field region including the joining portion of the first pipe member and the second pipe member, which are measured optically and in a batch, and determining quality of joining in the entire joining portion based on the acquired vibration distributions.

Abstract: In a defect detection device (10), an input receiver (161) receives an input, by a user, of information concerning the kind and size of a defect expected to be present in or on a test object. An exciter (11, 12) induces an elastic wave in the test object, with the frequency of the elastic wave being variable. A measurer (15) optically measures a vibration state of the surface of the test object caused by the elastic wave. A wavelength determiner (164) determines the wavelength of the elastic wave induced in the test object, based on the vibration state obtained by the measurer. A frequency selector (165) selects an appropriate frequency from a plurality of frequencies, based on the kind and size of the expected defect as well as the wavelength acquired for each of the plurality of frequencies by the wavelength determiner by varying the frequency of the elastic wave.

Abstract: An inspection system includes an image processing unit that suppresses noise of a complex number image on which pixels are represented by a complex number indicating a periodic change in a vibration state of an inspection target. The image processing unit acquires a degree of similarity between a pixel included in a target image region defined in the complex number image and a pixel included in a plurality of reference image regions defined in the complex number image separately from the target image region by comparing complex numbers representing pixels, and executes noise suppression processing of the target image region by using a weight based on the acquired degree of similarity.

Abstract: A defect inspection apparatus (100) is configured to approximate a difference value or an absolute value (Ia) of the difference value between a pixel value in at least three captured images (A) captured by an imager in at least three different phases of an elastic wave and a pixel value in a reference image (Aave) separate from the captured images (A) so as to acquire an approximate value for defect inspection corresponding to an amount of change in the pixel value in the captured images (A).

Abstract: A defect inspection device (100) includes an excitation unit that excites an elastic wave, an irradiation unit (2) that applies laser lights, a measurement unit (3) that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.

Abstract: The method for examining a clinched portion of a tubular body includes the steps of: giving an elastic vibration to a clinched body 90 formed by clinching a tubular body 91 with a clinch-target member 92; and acquiring, for each of a plurality of view areas 95 which differ from each other in the position in the circumferential direction of the tubular body 91, a vibration distribution optically and simultaneously measured within the view area 95 including a clinched portion 93 of the tubular body 91 and the clinch-target member 92, to determine whether or not the state of clinching is satisfactory over the entire clinched portion 93.

Abstract: [PROBLEM] To provide a defect detection device capable of detecting not only a defect within a visible range but also a defect outside the visible range among the objects to be inspected.

Abstract: This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (3), an imaging unit (35), and a control unit (4) for generating a moving image (61) related to the propagation of an elastic wave of an inspection target (7). The control unit is configured to perform control to display an identified measurement inappropriate region (81) in such a manner as to be distinguishable from a measurement appropriate region (82) in which the vibration state has been correctly acquired in the moving image (61).

Abstract: This interference image imaging apparatus includes a first optical member (21) and a second optical member (22), and has a first portion (8) for transmitting a first bundle of rays (7) to change a direction of outgoing light with respect to incident light, and a second portion (10) for changing a phase of second bundle of rays (9) with respect to the first bundle of rays (7).

Abstract: This defect inspection apparatus (100) is provided with: an excitation unit (1), a laser illumination unit (2), an interference unit (3) for causing laser light to interfere; an imaging unit (35) for imaging the interfered reflected light; and a control unit (4). The control unit (4) is configured to measure a spatial distribution of periodically varying physical properties caused by propagation of vibration of an inspection target, based on the interfered reflected light imaged by an imaging unit and extract a vibration discontinuous portion based on the spatial distribution of the physical quantities. The control unit is configured to perform control of displaying the extracted vibration discontinuous portion so as to be emphasized and superimposed on a still image of the inspection target captured by the imaging unit.