Patents by Inventor Takahiro Senda

Takahiro Senda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220122814
    Abstract: A plasma processing apparatus includes a processing chamber; a placing table disposed in the processing chamber to place a substrate thereon; an upper electrode facing the placing table; a member configured to adjust a temperature of the upper electrode; a first sensor provided within the member configured to adjust the temperature of the upper electrode, and configured to measure the temperature of the upper electrode; and a first sheet member, disposed between the upper electrode and the first sensor, having a relative dielectric constant of 2.4 or higher at a frequency of 1 MHz.
    Type: Application
    Filed: October 15, 2021
    Publication date: April 21, 2022
    Inventors: Takahiro Senda, Yuzo Uemura, Yusei Kuwabara, Tomoya Ujiie
  • Publication number: 20210313201
    Abstract: An upper member is disposed at an upper portion within a processing chamber. A ceiling member forms a ceiling of the processing chamber, and is provided with a through hole at a facing surface thereof which faces the upper member. A supporting member supports the upper member with a first end thereof located inside the processing chamber by being inserted through the through hole and slid within the through hole. An accommodation member accommodates therein a second end of the supporting member located outside the processing chamber, and is partitioned into a first space at a first end side and a second space at a second end side in a moving direction with respect to the second end. A pressure controller generates a pressure difference between the first space and the second space. The pressure difference allows the supporting member to be moved.
    Type: Application
    Filed: April 6, 2021
    Publication date: October 7, 2021
    Inventors: Yusei Kuwabara, Takahiro Senda
  • Publication number: 20210249236
    Abstract: A stage including a mounting section and an adhesive layer is provided. The mounting section is disposed in a plasma space, and a substrate is placed on the mounting section. The adhesive layer bonds the mounting section to a base. A through-hole penetrating the mounting section, the base, and the adhesive layer is formed in the stage. The through-hole is configured to supply a heat transfer gas. The stage includes a sleeve member provided in the through-hole. On a portion of a surface of the sleeve member, multiple fine holes connecting the through-hole with the plasma space are formed, and the portion is positioned at a higher level than the adhesive layer.
    Type: Application
    Filed: February 3, 2021
    Publication date: August 12, 2021
    Inventor: Takahiro SENDA
  • Patent number: 10896811
    Abstract: In one exemplary embodiment, a second waveguide is connected to an upper wall of a first waveguide and communicates with the first waveguide, a dielectric window is in contact with a lower wall of the first waveguide, a first inner conductor penetrates an upper wall, is electrically connected with the upper wall, and extends along the direction of a tube axis from an inside of the first waveguide to an inside of a third waveguide, the third waveguide is connected to the lower wall on the dielectric window side and communicates with the first waveguide, a first opening end of the third waveguide is connected to the dielectric window, and a drive device is connected to the first inner conductor, and is configured to drive the first inner conductor in the direction of the tube axis.
    Type: Grant
    Filed: August 27, 2019
    Date of Patent: January 19, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Ayako Ito, Koji Koyama, Yuki Kawada, Takahiro Senda, Naoki Matsumoto
  • Patent number: 10832892
    Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.
    Type: Grant
    Filed: January 4, 2018
    Date of Patent: November 10, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kazuki Takahashi, Yuki Kawada, Naoki Matsumoto, Takahiro Senda, Koji Koyama, Shohei Fukano, Jun Yoshikawa, Hiroyuki Kondo, Takashi Minakawa
  • Publication number: 20200075292
    Abstract: In one exemplary embodiment, a second waveguide is connected to an upper wall of a first waveguide and communicates with the first waveguide, a dielectric window is in contact with a lower wall of the first waveguide, a first inner conductor penetrates an upper wall, is electrically connected with the upper wall, and extends along the direction of a tube axis from an inside of the first waveguide to an inside of a third waveguide, the third waveguide is connected to the lower wall on the dielectric window side and communicates with the first waveguide, a first opening end of the third waveguide is connected to the dielectric window, and a drive device is connected to the first inner conductor, and is configured to drive the first inner conductor in the direction of the tube axis.
    Type: Application
    Filed: August 27, 2019
    Publication date: March 5, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Ayako ITO, Koji KOYAMA, Yuki KAWADA, Takahiro SENDA, Naoki MATSUMOTO
  • Publication number: 20200058468
    Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.
    Type: Application
    Filed: January 4, 2018
    Publication date: February 20, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Kazuki TAKAHASHI, Yuki KAWADA, Naoki MATSUMOTO, Takahiro SENDA, Koji KOYAMA, Shohei FUKANO, Jun YOSHIKAWA, Hiroyuki KONDO, Takashi MINAKAWA
  • Patent number: 10553402
    Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic waves in the first waveguide, two inner conductors disposed at different distances from the tube axis and connected to the dielectric window include coaxial conversion parts which cause propagation of the electromagnetic waves dispersed by the dispersion part to direct to the dielectric window side, a body length of the inner conductor most distant from the tube axis, out of body lengths of the two inner conductors, is longer, and a front surface of the dielectric window does not have irregularities.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: February 4, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yuki Kawada, Naoki Matsumoto, Koji Koyama, Ayako Ito, Takahiro Senda
  • Publication number: 20190333736
    Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic waves in the first waveguide, two inner conductors disposed at different distances from the tube axis and connected to the dielectric window include coaxial conversion parts which cause propagation of the electromagnetic waves dispersed by the dispersion part to direct to the dielectric window side, a body length of the inner conductor most distant from the tube axis, out of body lengths of the two inner conductors, is longer, and a front surface of the dielectric window does not have irregularities.
    Type: Application
    Filed: April 25, 2019
    Publication date: October 31, 2019
    Applicant: Tokyo Electron Limited
    Inventors: Yuki KAWADA, Naoki MATSUMOTO, Koji KOYAMA, Ayako ITO, Takahiro SENDA
  • Patent number: 10446628
    Abstract: An organic light-emitting display apparatus includes a pixel electrode with at least one opening; an intermediate layer disposed on the pixel electrode that includes an organic emission layer; an opposite electrode disposed on the intermediate layer; and a driving circuit that includes an upper conductive layer that overlaps the at least one opening of the pixel electrode in a plan view, and that is electrically connected to the pixel electrode.
    Type: Grant
    Filed: January 6, 2017
    Date of Patent: October 15, 2019
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jungmi Choi, Takahiro Senda
  • Publication number: 20190279845
    Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic wave in the first waveguide, a coaxial conversion part causes propagation of the electromagnetic waves dispersed by the dispersion part to direct to a side of the dielectric window, and a front surface of the dielectric window does not have irregularities.
    Type: Application
    Filed: March 11, 2019
    Publication date: September 12, 2019
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Naoki MATSUMOTO, Yuki KAWADA, Ayako ITO, Koji KOYAMA, Takahiro SENDA, Takashi SUZUKI, Yoshikazu AZUMAYA
  • Patent number: 10262585
    Abstract: An organic light-emitting display apparatus includes an organic light-emitting diode, a driving transistor arranged to receive a first driving voltage and to supply a driving current to the organic light-emitting diode, a data line arranged to transfer a sustain voltage and a data voltage, a sensing transistor which is connected to the data line, and which is arranged to transfer the sustain voltage to an anode of the organic light-emitting diode in response to a sensing control signal, a switching transistor which is connected to the data line, and which is arranged to transfer the data voltage to the driving transistor in response to a scan signal, and a data compensation unit arranged to compensate image data according to characteristic information of the organic light-emitting diode, the characteristic information transmitted to the data compensation unit through the sensing transistor and the data line.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: April 16, 2019
    Assignee: Samsung Display Co., Ltd.
    Inventors: Takahiro Senda, Kyunghoon Chung
  • Publication number: 20190021497
    Abstract: Providing an overturn preventing device which can maintain a mounted state against earthquake or the like with multidirectional shaking and thereby can prevent an article from overturn. The overturn preventing device includes a damper and a pair of bases. The damper is mounted between a top surface of a piece of furniture installed on a floor and a ceiling. Both ends of the damper are respectively coupled to the bases so as to be rotatable about respective rotation axes. Furthermore, both ends of the damper are respectively coupled to the bases so as to be swingable in a direction intersecting a rotation direction. The first base abuts against the top surface of the furniture and the second base abuts against the ceiling.
    Type: Application
    Filed: August 16, 2016
    Publication date: January 24, 2019
    Applicants: KYB CORPORATION, KYB-YS CO., LTD.
    Inventors: Shinichi SEKINE, Masakazu NAKAZATO, Atsushi TOYOUCHI, Masaya UNE, Miki IMASATO, Yukiko ISHIHARA, Takahiro SENDA
  • Patent number: 10109692
    Abstract: An organic light-emitting display device includes a pixel including a first region to display an image, a second region to transmit external light, and a third region between the first region and the second region. The pixel includes a pixel electrode in the first region, a pixel-defining layer in at least the first region, an auxiliary electrode in at least the third region, and an intermediate layer on the pixel electrode. The pixel-defining layer includes a first opening exposing a portion of the pixel electrode and a second opening corresponding to at least the second region and third region. The pixel electrode is exposed via the first opening, and the intermediate layer includes an organic emission layer. An opposite electrode is on the intermediate layer and contacts the auxiliary electrode in the third region.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: October 23, 2018
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Takahiro Senda, Jungmi Choi
  • Publication number: 20170287994
    Abstract: An organic light-emitting display device includes a pixel including a first region to display an image, a second region to transmit external light, and a third region between the first region and the second region. The pixel includes a pixel electrode in the first region, a pixel-defining layer in at least the first region, an auxiliary electrode in at least the third region, and an intermediate layer on the pixel electrode. The pixel-defining layer includes a first opening exposing a portion of the pixel electrode and a second opening corresponding to at least the second region and third region. The pixel electrode is exposed via the first opening, and the intermediate layer includes an organic emission layer. An opposite electrode is on the intermediate layer and contacts the auxiliary electrode in the third region.
    Type: Application
    Filed: March 28, 2017
    Publication date: October 5, 2017
    Inventors: Takahiro SENDA, Jungmi CHOI
  • Publication number: 20170194402
    Abstract: An organic light-emitting display apparatus includes a pixel electrode with at least one opening; an intermediate layer disposed on the pixel electrode that includes an organic emission layer; an opposite electrode disposed on the intermediate layer; and a driving circuit that includes an upper conductive layer that overlaps the at least one opening of the pixel electrode in a plan view, and that is electrically connected to the pixel electrode.
    Type: Application
    Filed: January 6, 2017
    Publication date: July 6, 2017
    Inventors: JUNGMI CHOI, TAKAHIRO SENDA
  • Publication number: 20160267844
    Abstract: An organic light-emitting display apparatus includes an organic light-emitting diode, a driving transistor arranged to receive a first driving voltage and to supply a driving current to the organic light-emitting diode, a data line arranged to transfer a sustain voltage and a data voltage, a sensing transistor which is connected to the data line, and which is arranged to transfer the sustain voltage to an anode of the organic light-emitting diode in response to a sensing control signal, a switching transistor which is connected to the data line, and which is arranged to transfer the data voltage to the driving transistor in response to a scan signal, and a data compensation unit arranged to compensate image data according to characteristic information of the organic light-emitting diode, the characteristic information transmitted to the data compensation unit through the sensing transistor and the data line.
    Type: Application
    Filed: November 9, 2015
    Publication date: September 15, 2016
    Inventors: Takahiro Senda, Kyunghoon Chung
  • Patent number: 9412565
    Abstract: A temperature measuring method for measuring a temperature of a member corresponding to a measuring object arranged within a chamber of a plasma processing apparatus is provided. The temperature measuring method involves obtaining a function (f) for correcting a correction target temperature (Tmeas) according to a measurement window temperature (Tw), the function (f) being computed based on the correction target temperature (Tmeas) corresponding to a temperature of the measuring object measured via a measurement window arranged at the chamber, a reference temperature (Tobj) corresponding to a temperature of the measuring object measured without using the measurement window, and the measurement window temperature (Tw) corresponding to a temperature of the measurement window.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: August 9, 2016
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusuke Yoshida, Ryou Son, Takahiro Senda, Masayuki Kohno, Naoki Matsumoto
  • Patent number: 9324542
    Abstract: In a plasma processing apparatus of an exemplary embodiment, energy of microwaves is introduced from an antenna into the processing container through a dielectric window. The plasma processing apparatus includes a central introducing unit and a peripheral introducing unit. A central introduction port of the central introducing unit injects a gas just below the dielectric window. A plurality of peripheral introduction ports of the peripheral introducing unit injects a gas towards a periphery of the placement region. The central introducing unit is connected to with a plurality of first gas sources including a reactive gas source and a rare gas source through a plurality of first flow rate control units. The peripheral introducing unit is connected to with a plurality of second gas sources including a reactive gas source and a rare gas source through a plurality of second flow rate control units.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: April 26, 2016
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Naoki Matsumoto, Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Michitaka Aita, Jun Yoshikawa, Takahiro Senda, Yoshiyasu Sato, Kazuyuki Kato, Kenji Sudou, Hitoshi Mizusugi
  • Patent number: 9305477
    Abstract: An organic light emitting display device of the present embodiments includes: a plurality of pixels positioned at intersections of scan lines, data lines, and emission control lines; a pixel unit, including the plurality of pixels, and divided into two or more blocks; a scan driver sequentially supplying scan signals to the scan lines; a data driver supplying data signals to the data lines in synchronization with the scan signals; and two or more emission drivers connected with emission control lines in the blocks, in which each emission driver supplies emission control signals to emission control lines connected thereto, and at least one or more emission control signals are supplied in each block simultaneously.
    Type: Grant
    Filed: September 22, 2011
    Date of Patent: April 5, 2016
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Takahiro Senda, Keum-Nam Kim