Abstract: A drive transmission mechanism for transmitting torque between two or more rotary shafts in synchronization with one another without need for lubrication thereby eliminating occurrence of oil contamination, and an oil-free fluid machine equipped with the mechanism, are provided. A magnetic drive disk and a synchronization gear are attached to a rotary shaft connected to a drive motor, a magnetic drive disk and a synchronization gear is attached to a rotary shaft, torque transmission from the rotary shaft to the rotary shaft is carried out in two ways, via the magnetic drive disks and via the synchronization gears and at least one of the synchronization gears is made of plastic material. With the construction, torque transmit load between the rotary shafts via the synchronization gears is decreased, and a plastic gear or gears can be adopted for synchronization gears without reducing life of the gears without need for lubrication oil.

Abstract: A drive transmission mechanism for transmitting torque between two or more rotary shafts in synchronization with one another without need for lubrication thereby eliminating occurrence of oil contamination, and an oil-free fluid machine equipped with the mechanism, are provided. A magnetic drive disk 16 and a synchronization gear 18 are attached to a rotary shaft 14 connected to a drive motor 11, a magnetic drive disk 17 and a synchronization gear 19 is attached to a rotary shaft 15, torque transmission from the rotary shaft 14 to the rotary shaft 15 is carried out in two ways, via the magnetic drive disks 16, 17 and via the synchronization gears 18, 19, and at least one of the synchronization gears is made of plastic material. With the construction, torque transmit load between the rotary shafts via the synchronization gears is decreased, and a plastic gear or gears can be adopted for synchronization gears without reducing life of the gears without need for lubrication oil.

Abstract: The present invention aims to propose a fluid machine in which a magnetic coupling includes an outer rotor 32 to the cylinder-bottom part of which a drive shaft of the drive component is connected, outer rotor side magnets 33 placed on an inner periphery of the outer rotor, an inner rotor 23 fitted to a drive shaft of the fluid machine, inside the outer rotor, inner rotor side magnets 21 placed on an outer periphery of the inner rotor, whereby attraction workings and repulsion workings between the outer rotor side magnets and the inner rotor side magnets transmit torques of the drive component to the fluid machine, and a sealing assembly 20 a partition part of which is placed between the inner rotor 23 and the outer rotor 32 and surrounds a drive shaft of the fluid machine so as to secure gas-tightness, the shaft including the inner rotor 23 and the inner rotor side magnets 21; further an air ventilation device for ventilating a space inside the outer rotor by means of inducing and/or discharging ambient air

Abstract: The present invention discloses an evacuation apparatus for evacuating a tank, a chamber, and the like; wherein a mechanical vacuum booster pump is provided at an up-stream side of an exterior side vacuum pump; wherein the mechanical booster pump has a discharge openings for low compression and a discharge opening for discharging a high compression gas; wherein, in case when the exterior side vacuum pump starts discharging a gas, the gas is sent to the exterior side vacuum pump through all of the discharge openings for low compression and the discharge opening for discharging a high compression gas and, in case when the discharged gas pressure reaches afterward an ultimate pressure (a medium vacuum) attainable by the exterior side vacuum pump, the gas is sent to the exterior side vacuum pump only through the discharge opening for discharging a high compression gas.

Abstract: An operation control devices and operation methods thereof so as to eliminates the difficulties in such a case of introduction of vacuum sensors and/or inverter control is disclosed. The disclosure relates to a control of plural sets of vacuum pumps. In order to comply with the subjects to overcome the difficulties, the disclosure proposes to utilize current detection approach instead of direct pressure detection approach, while showing how to estimate a vacuum degree achieved under the operation of the pumps as well as presenting a method on the control of the number of pumps. It is also described how organically a current detecting device, a vacuum degree estimating device, a working pump control device and related methods to satisfy the subjects are linked. The usefulness of the disclosure is also revealed.

Abstract: A scroll fluid machine comprises a driving shaft having an eccentric axial portion at one end; a fixed scroll having a fixed wrap; and an orbiting scroll having an orbiting wrap and rotatably mounted to the eccentric axial portion of the driving shaft. A gas introduced through an inlet on the outer circumference of the fixed scroll is compressed by a compression chamber between the fixed and orbiting wraps towards the center and discharged through an outlet close to the center. Between the eccentric axial portion and the innermost winding portion of the fixed wrap, an adiabatic expansion chamber is formed thereby cooling the compressed gas right before discharging.

Abstract: A scroll fluid machine comprises a driving shaft having an eccentric axial portion at one end; a fixed scroll having a fixed wrap; and an orbiting scroll having an orbiting wrap and rotatably mounted to the eccentric axial portion of the driving shaft. A gas introduced through an inlet on the outer circumference of the fixed scroll is compressed by a compression chamber between the fixed and orbiting wraps towards the center and discharged through an outlet close to the center. Between the eccentric axial portion and the innermost winding portion of the fixed wrap, an adiabatic expansion chamber is formed thereby cooling the compressed gas right before discharging.