Patents by Inventor Takao Noguchi

Takao Noguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8056414
    Abstract: An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: November 15, 2011
    Assignee: TDK Corporation
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Patent number: 7975545
    Abstract: Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: July 12, 2011
    Assignee: TDK Corporation
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Patent number: 7975546
    Abstract: An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the surface place of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: July 12, 2011
    Assignee: TDK Corporation
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Patent number: 7934422
    Abstract: Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: May 3, 2011
    Assignee: TDK Corporation
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Publication number: 20100244632
    Abstract: A piezoelectric element having a crystal structure that enables a piezoelectric film to be formed in an unstressed state is provided. The piezoelectric film contains an a-axis oriented crystal and a c-axis oriented crystal, where a difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ?. The present inventors have newly found that a stress accumulated in the piezoelectric film can be reduced while maintaining favorable piezoelectric properties when a condition that the difference in lattice constant between the a-axis oriented crystal and the c-axis oriented crystal is not more than 0.06 ? is satisfied. When the condition is satisfied, the c-axis oriented crystal and the a-axis oriented crystal are properly balanced and as a result crystal particles of the piezoelectric film are closest-packed on its base in an ideal state, which contributes to a reduced stress.
    Type: Application
    Filed: March 26, 2010
    Publication date: September 30, 2010
    Applicant: TDK CORPORATION
    Inventors: Kazuya Maekawa, Takao Noguchi, Kenichi Tochi, Ken Unno
  • Patent number: 7714486
    Abstract: The present invention provides an angular velocity sensor in which higher sensitivity for sensors is available even with a smaller base portion. The angular velocity sensor includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.
    Type: Grant
    Filed: March 26, 2008
    Date of Patent: May 11, 2010
    Assignee: TDK Corporation
    Inventors: Kenichi Tochi, Tatsuo Namikawa, Ken Unno, Takao Noguchi
  • Patent number: 7636994
    Abstract: The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device) 74 according to the present invention, an outer edge R1 of a piezoelectric film 52A formed on an electrode film 46A of a laminate 60 is located inside an outer edge R2 of the electrode film 46A. For this reason, in removal of a monocrystalline Si substrate 14 from a multilayer board 61, where an etching solution permeates between polyimide 72 and laminate 60, the etching solution circumvents the electrode film 46A before it reaches the piezoelectric film 52A. Namely, a route A of the etching solution to the piezoelectric film 52A is significantly extended by the electrode film 46A. In the method of making the electronic device 74, therefore, the etching solution is less likely to reach the piezoelectric film 52A.
    Type: Grant
    Filed: February 24, 2006
    Date of Patent: December 29, 2009
    Assignee: TDK Corporation
    Inventors: Kenichi Tochi, Masahiro Miyazaki, Takao Noguchi, Hiroshi Yamazaki, Ken Unno, Hirofumi Sasaki
  • Publication number: 20090271962
    Abstract: The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device) 74 according to the present invention, an outer edge R1 of a piezoelectric film 52A formed on an electrode film 46A of a laminate 60 is located inside an outer edge R2 of the electrode film 46A. For this reason, in removal of a monocrystalline Si substrate 14 from a multilayer board 61, where an etching solution permeates between polyimide 72 and laminate 60, the etching solution circumvents the electrode film 46A before it reaches the piezoelectric film 52A. Namely, a route A of the etching solution to the piezoelectric film 52A is significantly extended by the electrode film 46A. In the method of making the electronic device 74, therefore, the etching solution is less likely to reach the piezoelectric film 52A.
    Type: Application
    Filed: July 7, 2009
    Publication date: November 5, 2009
    Applicant: TDK CORPORATION
    Inventors: Kenichi Tochi, Masahiro Miyazaki, Takao Noguchi, Hiroshi Yamazaki, Ken Unno, Hirofumi Sasaki
  • Publication number: 20090260436
    Abstract: An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element 2 according to the present embodiment has a fixing portion 21 in the form of a frame, an element portion 20 disposed in the frame of the fixing portion 21 and having vibrating arms 21 to 24 in a drive system and a detection system, and a connecting portion 25 formed as a fixed-fixed beam having its both ends connected to the fixing portion 21 and having its intermediate portion connected to the element portion 20.
    Type: Application
    Filed: March 12, 2009
    Publication date: October 22, 2009
    Applicant: TDK CORPORATION
    Inventors: Kenichi TOCHI, Takao NOGUCHI, Ken UNNO, Kazuya MAEKAWA
  • Publication number: 20090165556
    Abstract: An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.
    Type: Application
    Filed: December 24, 2008
    Publication date: July 2, 2009
    Applicant: TDK CORPORATION
    Inventors: Ken Unno, Takao Noguchi, Kenichi Tochi, Kazuya Maekawa
  • Publication number: 20090165554
    Abstract: Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm.
    Type: Application
    Filed: March 26, 2008
    Publication date: July 2, 2009
    Applicant: TDK CORPORATION
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Publication number: 20090039739
    Abstract: The present invention provides an angular velocity sensor in which higher sensitivity for sensors is available even with a smaller base portion. The angular velocity sensor includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.
    Type: Application
    Filed: March 26, 2008
    Publication date: February 12, 2009
    Applicant: TDK CORPORATION
    Inventors: Kenichi Tochi, Tatsuo Namikawa, Ken Unno, Takao Noguchi
  • Patent number: 7436051
    Abstract: A component for fabricating the electronic device comprises a substrate and a conductive film provided on the substrate, in which the adhesion of the conductive film to the substrate is not greater than 0.1 N/cm. The adhesion of the conductive film to the substrate is weak enough to enable the conductive film to be readily peeled from the substrate. This makes it possible to form a component on a substrate other than the substrate used during film formation, thereby greatly increasing the degree of product configuration freedom. If the adhesion of a lower conductive film on the substrate side is made to be not greater than 0.04 N/cm, it becomes very easy to peel the conductive film from the substrate.
    Type: Grant
    Filed: January 3, 2005
    Date of Patent: October 14, 2008
    Assignee: TDK Corporation
    Inventors: Takao Noguchi, Hisatoshi Saito
  • Publication number: 20080236281
    Abstract: An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion.
    Type: Application
    Filed: March 26, 2008
    Publication date: October 2, 2008
    Applicant: TDK CORPORATION
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Publication number: 20080148848
    Abstract: An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the surface place of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 26, 2008
    Applicant: TDK CORPORATION
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Publication number: 20080134781
    Abstract: Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 12, 2008
    Applicant: TDK CORPORATION
    Inventors: Takao Noguchi, Kenichi Tochi, Ken Unno, Tatsuo Namikawa
  • Patent number: 7247975
    Abstract: Provided is a thin-film piezoelectric element which reduces the influence of an oxide film left on the electrode film on the degradation of element characteristics, and a method of making the thin-film piezoelectric element. The thin-film piezoelectric element has ZrO2 as the main component of the outermost layer of the oxide film which covers the laminate. Young's modulus of the ZrO2 is 190 GPa, giving a significantly low value compared with Young's modulus of MgO, 245 GPa. Consequently, the influence of the oxide film on the reduction in the displacement magnitude of the piezoelectric film is smaller than the influence of the MgO thin film left in the conventional thin-film piezoelectric element. As a result, the thin-film piezoelectric element decreases the influence of the oxide film on the degradation of element characteristics compared with the conventional thin-film piezoelectric element.
    Type: Grant
    Filed: March 14, 2005
    Date of Patent: July 24, 2007
    Assignee: TDK Corporation
    Inventors: Kenichi Tochi, Takao Noguchi, Hiroshi Yamazaki, Ken Unno, Masahiro Miyazaki, Shigeru Shoji
  • Patent number: 7239067
    Abstract: A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.
    Type: Grant
    Filed: March 30, 2004
    Date of Patent: July 3, 2007
    Assignee: TDK Corporation
    Inventors: Eiju Komuro, Hisatoshi Saitou, Takao Noguchi, Masaaki Imura
  • Patent number: 7220995
    Abstract: A substrate for an electronic device comprises a base, an adhesion film stacked on the base, and a conductor film stacked on the adhesion film. The adhesion film is a non-epitaxial film including a crystal having a wurtzite crystal structure. The electronic device comprises the substrate and a functional film having a specific function and disposed on the substrate.
    Type: Grant
    Filed: April 6, 2004
    Date of Patent: May 22, 2007
    Assignee: TDK Corporation
    Inventors: Takao Noguchi, Hisatoshi Saitou, Hidenori Abe
  • Patent number: 7173361
    Abstract: A film bulk acoustic wave resonator of the invention includes a substrate; a resonant structure provided on the substrate constituted by a lower electrode, a piezoelectric film and an upper electrode; and an acoustic multilayer of a plurality of reflective films provided between the substrate and the resonant structure. At least one of the reflective films of the acoustic multilayer has a specified crystal plane orientation, and an X-ray rocking curve full width at half maximum that is preferably not greater than 10 degrees, and more preferably is not greater than 3 degrees. This makes it possible to obtain better resonance characteristics than in the case of the prior art, by increasing the efficiency with which bulk waves propagating towards the substrate are reflected.
    Type: Grant
    Filed: January 3, 2005
    Date of Patent: February 6, 2007
    Assignee: TDK Corporation
    Inventors: Hisatoshi Saito, Takao Noguchi, Kenji Inoue