Patents by Inventor Takashi Suganuma

Takashi Suganuma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7683355
    Abstract: An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light source apparatus includes an EUV light generation chamber provided with a window, a driver laser which generates a laser beam, a concave lens which enlarges the laser beam, a convex lens which collimates the enlarged laser beam, a parabolic concave mirror which is arranged in the EUV light generation chamber and reflects the collimated laser beam to collect the laser beam to a target material, a parabolic concave mirror adjusting mechanism which adjusts position and angle of the parabolic concave mirror, an EUV light collector mirror which collects EUV light, and a purge gas supply unit which supplies a purge gas for protecting the window and the parabolic concave mirror.
    Type: Grant
    Filed: September 24, 2007
    Date of Patent: March 23, 2010
    Assignee: Komatsu Ltd.
    Inventors: Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Takayuki Yabu, Akira Sumitani
  • Patent number: 7680158
    Abstract: A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
    Type: Grant
    Filed: October 4, 2005
    Date of Patent: March 16, 2010
    Assignees: Komatsu Ltd., Gigaphoton Inc.
    Inventors: Akira Endo, Tatsuya Ariga, Takashi Suganuma, Taisuke Miura
  • Patent number: 7649188
    Abstract: A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
    Type: Grant
    Filed: April 9, 2007
    Date of Patent: January 19, 2010
    Assignees: Komatsu Ltd., Gigaphoton Inc.
    Inventors: Akira Endo, Tatsuya Ariga, Takashi Suganuma, Taisuke Miura
  • Publication number: 20090314967
    Abstract: An extreme ultraviolet light source apparatus using a spectrum purity filter capable of obtaining EUV light with high spectrum purity. The apparatus includes a chamber; a target supply unit for supplying a target material; a driver laser using a laser gas containing a carbon dioxide gas as a laser medium, for applying a laser beam to the target material to generate plasma; a collector mirror for collecting and outputting the extreme ultraviolet light radiated from the plasma; and a spectrum purity filter provided in an optical path of the extreme ultraviolet light, for transmitting the extreme ultraviolet light and reflecting the laser beam, the spectrum purity filter including a mesh having electrical conductivity and formed with an arrangement of apertures having a pitch not larger than a half of a shortest wavelength of the laser beam applied by the driver laser.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 24, 2009
    Inventors: Masato MORIYA, Osamu Wakabayshi, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani
  • Publication number: 20090316746
    Abstract: A slab type laser apparatus has a slab type gas laser medium part formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium which is excited by high-frequency electric power. The apparatus includes an oscillator part including a pair of resonator mirrors oppositely disposed with a part of the gas laser medium part in between, and for amplifying a laser beam to have predetermined light intensity to emit the laser beam, and the amplifier part including a plurality of return mirrors oppositely disposed with a part of the gas laser medium part in between. The incident laser beam goes and returns plural times between the return mirrors, and the laser beam is amplified to have predetermined power.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 24, 2009
    Inventors: Krzysztof NOWAK, Takashi Suganuma, Osamu Wakabayashi, Akira Endo
  • Publication number: 20090272919
    Abstract: An extreme ultraviolet light source apparatus in which only particles having a high transmittance for EUV light adhere to an EUV collector mirror even if fast ions emitted from plasma collide with a structural member in a vacuum chamber, and thereby, the reflectance thereof is not easily degraded. The apparatus includes: a vacuum chamber; a target supply unit for supplying a target to a predetermined position in the vacuum chamber; a driver laser for applying a laser beam to the target to generate the plasma; a collector mirror for collecting and outputting extreme ultraviolet light emitted from the plasma; a collector mirror holder for supporting the collector mirror; and a shielding member formed of a material having a high transmittance for the extreme ultraviolet light, for shielding the structural member such as the collector mirror holder from the ions generated from the plasma.
    Type: Application
    Filed: April 28, 2009
    Publication date: November 5, 2009
    Inventors: Tamotsu Abe, Hiroshi Someya, Takashi Suganuma, Takayuki Yabu
  • Patent number: 7502146
    Abstract: An image reading apparatus has a placing member where an original is placed, a reading unit for reading an image of the original in a way that moves relatively to the placing member, and a press member for pressing the reading unit against the placing member. The reading unit includes a conductive abutting portion coming into a contact with the placing member, and a grounding member for grounding the conductive abutting portion.
    Type: Grant
    Filed: January 27, 2003
    Date of Patent: March 10, 2009
    Assignee: Canon Kabushiki Kaisha
    Inventors: Ryo Hanashi, Takashi Suganuma
  • Publication number: 20080210889
    Abstract: An EUV light source apparatus capable of preventing deterioration and/or breakage of a filter for filtering EUV light. The EUV light source apparatus includes an EUV generation chamber in which EUV light is generated; a target material supply unit for supplying a target material into the EUV light generation chamber; a laser source for applying a laser beam to the target material supplied into the EUV light generation chamber to generate plasma; collection optics for collecting EUV light radiated from the plasma; a filter for filtering the EUV light collected by the collection optics; and a filter protecting member provided between the plasma and the filter, for protecting the filter by blocking flying matter flying from the plasma toward the filter.
    Type: Application
    Filed: February 28, 2008
    Publication date: September 4, 2008
    Inventors: Takashi Suganuma, Tamotsu Abe, Hiroshi Someya, Akira Sumitani
  • Publication number: 20080104828
    Abstract: A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
    Type: Application
    Filed: November 5, 2007
    Publication date: May 8, 2008
    Inventors: Hiroshi Someya, Tamotsu Abe, Takashi Suganuma, Hideo Hoshino, Akira Sumitani
  • Publication number: 20080073598
    Abstract: An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light source apparatus includes an EUV light generation chamber provided with a window, a driver laser which generates a laser beam, a concave lens which enlarges the laser beam, a convex lens which collimates the enlarged laser beam, a parabolic concave mirror which is arranged in the EUV light generation chamber and reflects the collimated laser beam to collect the laser beam to a target material, a parabolic concave mirror adjusting mechanism which adjusts position and angle of the parabolic concave mirror, an EUV light collector mirror which collects EUV light, and a purge gas supply unit which supplies a purge gas for protecting the window and the parabolic concave mirror.
    Type: Application
    Filed: September 24, 2007
    Publication date: March 27, 2008
    Inventors: Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Takayuki Yabu, Akira Sumitani
  • Publication number: 20070187628
    Abstract: A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
    Type: Application
    Filed: April 9, 2007
    Publication date: August 16, 2007
    Inventors: Akira Endo, Tatsuya Ariga, Takashi Suganuma, Taisuke Miura
  • Publication number: 20060078017
    Abstract: A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
    Type: Application
    Filed: October 4, 2005
    Publication date: April 13, 2006
    Inventors: Akira Endo, Tatsuya Ariga, Takashi Suganuma, Taisuke Miura
  • Publication number: 20030142370
    Abstract: An image reading apparatus has a placing member where an original is placed, a reading unit for reading an image of the original in a way that moves relatively to the placing member, and a press member for pressing the reading unit against the placing member. The reading unit includes a conductive abutting portion coming into a contact with the placing member, and a grounding member for grounding the conductive abutting portion.
    Type: Application
    Filed: January 27, 2003
    Publication date: July 31, 2003
    Applicant: Canon Kabushiki Kaisha
    Inventors: Ryo Hanashi, Takashi Suganuma
  • Patent number: 4789239
    Abstract: Radioactive materials can be safely analyzed by an emission spectroscopic analyzer comprising an exciting device for exciting a radioactive material to be analyzed to emit light. The exciting device is enclosed in a radiation shielding wall. A detecting device detects the emitted light. The detecting device is located outside the radiation shielding wall. A light-transmitting device is provided between the exciting device and the detecting device such that the emitted light impinging on a first end of the light-transmitting device will be received at the detecting device as light having been transmitted through the light-transmitting device and emitted from a second end of the light-transmitting device. The light-transmitting device penetrates a hole made in the radiation shielding wall which has a sealing structure to prevent radiation leakage. The light-transmitting device penetrates the hole with a curvature.
    Type: Grant
    Filed: August 29, 1986
    Date of Patent: December 6, 1988
    Assignees: Mitsubishi Cable Industries, Ltd., Doryokuro Kakunenryo Kaihatsu Jigyodan
    Inventors: Koichi Onishi, Yoshifusa Ouchi, Takashi Suganuma, Atsushi Utsumi, Takao Kuroiwa
  • Patent number: 4623250
    Abstract: Improvements on a DC plasma jet generator for emission spectrochemical analysis wherein two anode blocks and one cathode block are positioned in an inverted Y shape, and each of the anode blocks has a cylinder, a piston, an an anode received by a recess in the end of the piston. Each anode can be secured in the recess at the end of the piston in the corresponding anode block by magnetic force. Each of the anode and cathode blocks is pivotable so that the associated electrode attached to each block can be fixed upright with the free end thereof directed upward. This means that the electrodes can be replaced easily as well as speedily by remote control using manipulators.
    Type: Grant
    Filed: September 7, 1983
    Date of Patent: November 18, 1986
    Assignee: Doryokuro Kakunenryo Kaihatsu Jigyodan
    Inventors: Koichi Onishi, Takashi Suganuma
  • Patent number: 4543510
    Abstract: A cathode ray tube apparatus including an envelope having a panel portion with a phosphor screen formed on the inner surface thereof, a neck portion provided with an electron gun therein and a funnel portion therebetween; and a transparent panel facing the external surface of the panel portion with a peripherally located spacer therebetween, wherein a liquid coolant is sealed in the space formed between the panel portion and the transparent panel by light absorbing material, and the spacer is treated to reduce reflection.
    Type: Grant
    Filed: March 7, 1983
    Date of Patent: September 24, 1985
    Assignee: Sony Corporation
    Inventors: Tomosuke Chiba, Hiroshi Kato, Takashi Suganuma