Patents by Inventor Takashi Tanahashi

Takashi Tanahashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8337601
    Abstract: An air filter sheet comprising particles of a functional agent with an average particle diameter of 0.1 to 30 ?m and fibrils of a polytetrafluoroethylene resin with a number average molecular weight of 3,000,000 to 50,000,000, the ratio by weight of the functional agent to the fibrils of the polytetrafluoroethylene resin being from 1 to 99. According to the present invention, an air filter sheet comprising fibrils of polytetrafluoroethylene resin with a functional agent carried thereon, possessing excellent formability, and being free from a lubricant, a process for manufacturing the air filter sheet, and an air filter free from contamination of outgas with a lubricant are provided.
    Type: Grant
    Filed: January 26, 2006
    Date of Patent: December 25, 2012
    Assignee: Nichias Corporation
    Inventors: Toshiro Nakano, Satoshi Minobe, Takashi Tanahashi
  • Publication number: 20100059435
    Abstract: A chemical filter obtained by fabricating a chemical filter material, the chemical filter material being a woven or nonwoven fabric formed from a hydroxyl group-containing organic fiber, the hydroxyl group-containing organic fiber containing cation exchange groups introduced by radiation graft polymerization, the chemical filter material having an ion-exchange capacity of 400 meq/m2 or more with respect to the cation exchange groups, and the chemical filter material having a tensile strength of 5 to 20 N/15 mm.
    Type: Application
    Filed: August 12, 2009
    Publication date: March 11, 2010
    Applicant: NICHIAS CORPORATION
    Inventors: Akihiro Imai, Takashi Tanahashi, Toshiro Nakano, Tainen Shimotsu, Shiro Ishiwata, Takashi Shimonosono
  • Publication number: 20090241497
    Abstract: A chemical filter is obtained by pleating a nonwoven fabric, the nonwoven fabric being a spunlace nonwoven fabric prepared by causing fibers to be entangled by a spunlace method, and ion-exchange groups being introduced into the fibers by radiation graft polymerization.
    Type: Application
    Filed: January 14, 2009
    Publication date: October 1, 2009
    Applicant: NICHIAS Corporation
    Inventors: Akihiro Imai, Takashi Tanahashi, Toshiro Nakano, Tainen Shimotsu
  • Patent number: 7377963
    Abstract: An adsorption filter includes at least one thin plate honeycomb filtering medium carrying a gas-adsorbing medium thereon and a filter case housing the honeycomb filtering medium therein. The thin plate honeycomb filtering medium is disposed in the filter case in such a manner as to make a series of V configurations with respect to a ventilation direction.
    Type: Grant
    Filed: January 28, 2005
    Date of Patent: May 27, 2008
    Assignee: Nichias Corporation
    Inventors: Takashi Tanahashi, Akihiro Imai, Toshiro Nakano, Takashi Taniguchi
  • Patent number: 7364608
    Abstract: The chemical filter supporting an ion-exchange resin comprising a fiber supporting body containing ion-exchange fiber and ion-exchange resin powder which is supported on the fiber supporting body is provided. The chemical filter possesses a large ion-exchange capacity per unit volume and exhibits high initial performance of eliminating ionized gaseous pollutants and excellent durability of the elimination performance.
    Type: Grant
    Filed: January 11, 2005
    Date of Patent: April 29, 2008
    Assignee: Nichias Corporation
    Inventors: Takashi Tanahashi, Toshiro Nakano, Akihiro Imai
  • Patent number: 7217313
    Abstract: A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent.
    Type: Grant
    Filed: May 26, 2003
    Date of Patent: May 15, 2007
    Assignees: Tokyo Electron Limited, Nichias Corporation
    Inventors: Hiroshi Motono, Takashi Tanahashi, Masaji Kurosawa, Katsuhiro Yamashita
  • Patent number: 7207123
    Abstract: Two rotors 18a, 18b each housing a honeycomb structure 25 carrying an absorbent is driven for rotation by a common motor 19. Partitioning members 17 define an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning members 17 and the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer space 10 of the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage 20, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage 21, and is heated by a heater, and passes through the recovery zones of both the rotors.
    Type: Grant
    Filed: September 19, 2003
    Date of Patent: April 24, 2007
    Assignees: Tokyo Electron Limited, Nichias Corporation
    Inventors: Takashi Tanahashi, Takanobu Asano, Ken Nakao, Katsuhiro Yamashita
  • Publication number: 20060185336
    Abstract: An air filter sheet comprising particles of a functional agent with an average particle diameter of 0.1 to 30 ?m and fibrils of a polytetrafluoroethylene resin with a number average molecular weight of 3,000,000 to 50,000,000, the ratio by weight of the functional agent to the fibrils of the polytetrafluoroethylene resin being from 1 to 99. According to the present invention, an air filter sheet comprising fibrils of polytetrafluoroethylene resin with a functional agent carried thereon, possessing excellent formability, and being free from a lubricant, a process for manufacturing the air filter sheet, and an air filter free from contamination of outgas with a lubricant are provided.
    Type: Application
    Filed: January 26, 2006
    Publication date: August 24, 2006
    Applicant: NICHIAS Corporation
    Inventors: Toshiro Nakano, Satoshi Minobe, Takashi Tanahashi
  • Publication number: 20050246918
    Abstract: Two rotors 18a, 18b each housing a honeycomb structure 25 carrying an absorbent is driven for rotation by a common motor 19. Partitioning members 17 define an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning members 17 and the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer space 10 of the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage 20, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage 21, and is heated by a heater, and passes through the recovery zones of both the rotors.
    Type: Application
    Filed: September 19, 2003
    Publication date: November 10, 2005
    Inventors: Takashi Tanahashi, Takanobu Asano, Ken Nakao, Katsuhiro Yamashita
  • Publication number: 20050217488
    Abstract: The present invention provides an adsorption filter, comprising: at least one thin plate honeycomb filtering medium carrying a gas-adsorbing medium thereon; and a filter case housing the honeycomb filtering medium therein, wherein the thin plate honeycomb filtering medium is disposed in the filter case in such a manner as to make a series of V configurations with respect to a ventilation direction. Also disclosed is a method for manufacturing the adsorption filter.
    Type: Application
    Filed: January 28, 2005
    Publication date: October 6, 2005
    Applicant: NICHIAS CORPORATION
    Inventors: Takashi Tanahashi, Akihiro Imai, Toshiro Nakano, Takashi Taniguchi
  • Publication number: 20050211625
    Abstract: The chemical filter supporting an ion-exchange resin comprising a fiber supporting body containing ion-exchange fiber and ion-exchange resin powder which is supported on the fiber supporting body is provided. The chemical filter possesses a large ion-exchange capacity per unit volume and exhibits high initial performance of eliminating ionized gaseous pollutants and excellent durability of the elimination performance.
    Type: Application
    Filed: January 11, 2005
    Publication date: September 29, 2005
    Applicant: NICHIAS Corporation
    Inventors: Takashi Tanahashi, Toshiro Nakano, Akihiro Imai
  • Publication number: 20050212174
    Abstract: A method for manufacturing a chemical filter with a corrugated honeycomb structure is disclosed. The method comprises coating or impregnating a fibrous paper containing ion-exchange fiber with a slurry mixture of an ion-exchange resin powder and an adhesive to obtain a paper supporting ion-exchange resin powder and applying the paper supporting ion-exchange resin powder to a corrugating process.
    Type: Application
    Filed: January 11, 2005
    Publication date: September 29, 2005
    Applicant: NICHIAS Corporation
    Inventors: Takashi Tanahashi, Toshiro Nakano, Akihiro Imai
  • Publication number: 20050172805
    Abstract: A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent.
    Type: Application
    Filed: May 26, 2003
    Publication date: August 11, 2005
    Inventors: Hiroshi Motono, Takashi Tanahashi, Masaji Kurosawa, Katsuhiro Yamashita
  • Patent number: 6852601
    Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.
    Type: Grant
    Filed: March 27, 2002
    Date of Patent: February 8, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Seiichi Yoshida, Takashi Tanahashi, Akira Onodera, Motoki Akimoto
  • Publication number: 20030000458
    Abstract: Quartz member such as a quartz tube for semiconductor manufacturing equipment capable of heat treating a substrate to be treated without causing contamination, a manufacturing method of such quartz member, thermal treatment equipment furnished with such quartz member, and an analysis method of metal in quartz member are provided. A quartz specimen is immersed in hydrofluoric acid to expose a layer to be analyzed located at a prescribed depth. On an exposed surface, a decomposition liquid such as hydrofluoric acid or nitric acid is dripped to decompose only an extremely thin layer to be analyzed, followed by recovering of the decomposition liquid. The decomposition liquid is quantitatively analyzed by use of atomic absorption spectroscopy (AAS) or the like to measure an amount of metal contained in the decomposition liquid. From a difference of thicknesses before and after the decomposition and an area of dripped decomposition liquid, a volume of a decomposed layer to be analyzed is obtained.
    Type: Application
    Filed: July 24, 2002
    Publication date: January 2, 2003
    Inventors: Yoshinori Marumo, Kaname Suzuki, Teruyuki Hayashi, Takashi Tanahashi
  • Publication number: 20020110769
    Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.
    Type: Application
    Filed: March 27, 2002
    Publication date: August 15, 2002
    Inventors: Seiichi Yoshida, Takashi Tanahashi, Akira Onodera, Motoki Akimoto
  • Patent number: 6409503
    Abstract: When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at a predetermined low negative pressure. An exhaust for evacuating the loading area is connected to the loading area, and a controller controls the exhaust so that the loading area is maintained at the predetermined low negative pressure. A specific gas and particles contained in a gas discharged from the loading area are removed by filters.
    Type: Grant
    Filed: July 20, 2000
    Date of Patent: June 25, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Seiichi Yoshida, Takashi Tanahashi, Akira Onodera, Motoki Akimoto
  • Patent number: 5551984
    Abstract: A circulation duct with a blow fan and a shutter is provided to form gas flows in a transfer chamber below a heat treatment furnace, and a dust removing filter unit is provided in a blowout port of the circulation gas passage. Three, for example, gas supply pipes with a number of blowout holes are provided on the front side of the filter unit at set heights, and a clean air source is connected to the proximal end of the air supply pipes through an opening/closing valve. Clean gas is fed into the transfer chamber from the clean air source from the start of an unloading of the wafers to the time of the dismounting of the wafers from a wafer boat with the circulation of gas flows in the circulation gas passage stopped. A filter material of the dust removing filter is PTFE, which can reduce the amount of impurities scattered from the dust removing filter that attach on the wafers.
    Type: Grant
    Filed: December 5, 1994
    Date of Patent: September 3, 1996
    Assignees: Tokyo Electron Kabushiki Kaisha, Tokyo Electron Tohoku Kabushiki Kaisha
    Inventor: Takashi Tanahashi
  • Patent number: 5514196
    Abstract: An air cleaning apparatus includes an air passage chamber having a suction port, from which air is sucked, and a discharge port from which the air sucked from the suction port is discharged, an air blower, provided in the air passage chamber, for sucking the air from the suction port into the air passage chamber and discharging the sucked air from the discharge port, and a particle removing mechanism for removing particles contained in the air sucked from the suction port, the entire body of the particle removing mechanism being formed of a material which generates little impurity gas detrimental to processing in a processing space.
    Type: Grant
    Filed: April 13, 1994
    Date of Patent: May 7, 1996
    Assignees: Tokyo Electron Limited, Tokyo Electron Tohoku Limited
    Inventors: Takashi Tanahashi, Syuji Moriya, Tsuyoshi Wakabayashi, Takenobu Matsuo
  • Patent number: 5459943
    Abstract: An air cleaning apparatus according to the present invention includes an apparatus body having a suction port through which air in a processing space is sucked and a discharge port through which the air sucked through the suction port is discharged into the processing space. A blower is provided in the apparatus body for sucking the air from the processing space into the apparatus body through the suction port and discharging the sucked air into the processing space through the discharge port. In addition an impurity gas removing device in the apparatus body is provided for removing impurity gases contained in the air sucked through the suction port and harmful to processing in the processing space, and a particle removing device is provided on the exhaust side of the impurity gas removing device for removing particles in the sucked air cleared of the impurity gases by impurity gas removing device.
    Type: Grant
    Filed: February 4, 1994
    Date of Patent: October 24, 1995
    Assignees: Tokyo Electron Limited, Tokyo Electron Tohoku Limited
    Inventor: Takashi Tanahashi