Abstract: An electrostatic chuck heater includes a resistance heating element. A region of the resistance heating element from one end to another end of the resistance heating element is divided into a plurality of sections. Recessed grooves are provided in the respective sections along a longitudinal direction of the resistance heating element in a surface. In a connection portion between the recessed grooves that are provided in the adjacent sections, a projection portion that extends along the connection portion is provided.

Abstract: A method of manufacturing a ceramic heater, the method includes the steps of: (a) forming, on a surface of a first ceramic fired layer or an unfired layer, a resistance heating element or its precursor in a predetermined pattern; (b) forming a recessed groove along a longitudinal direction by radiating laser light to the resistance heating element or its precursor; (c) obtaining a layered body by disposing a second ceramic unfired layer on the surface of the first ceramic fired layer or the unfired layer; and (d) obtaining the ceramic heater in which the resistance heating element is embedded in a ceramic substrate by performing hot press firing on the layered body, wherein, in the step (b), the recessed groove is formed such that a side wall surface of the recessed groove is inclined relative to the surface of the first ceramic fired layer or the unfired layer.

Abstract: An atomic beam generator includes a cathode constituted as a housing having an emission surface provided with an irradiation port through which an atomic beam is emissive; an anode disposed inside the cathode to generate plasma between the cathode and the anode; and a magnetic field generating unit including a first magnetic field generating unit that generates a first magnetic field and a second magnetic field generating unit that generates a second magnetic field, and guiding positive ions produced in the cathode to the emission surface by generating, in the cathode, the first magnetic field and the second magnetic field both parallel to the emission surface such that a magnetic field direction is leftward in the first magnetic field and is rightward in the second magnetic field when viewed from an emission surface side on condition of the first magnetic field being positioned above the second magnetic field.

Abstract: An atomic beam generator includes a cathode constituted as a housing having an emission surface provided with an irradiation port through which an atomic beam is emissive; an anode disposed inside the cathode to generate plasma between the cathode and the anode; and a magnetic field generating unit including a first magnetic field generating unit that generates a first magnetic field and a second magnetic field generating unit that generates a second magnetic field, and guiding positive ions produced in the cathode to the emission surface by generating, in the cathode, the first magnetic field and the second magnetic field both parallel to the emission surface such that a magnetic field direction is leftward in the first magnetic field and is rightward in the second magnetic field when viewed from an emission surface side on condition of the first magnetic field being positioned above the second magnetic field.

Abstract: An atomic beam source includes a tubular cathode that includes an emission portion that includes an emission port through which an atomic beam can be emitted, a rod-shaped first anode disposed inside the cathode, and a rod-shaped second anode disposed inside the cathode and spaced from the first anode. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.

Abstract: An atomic beam source 10 includes a tubular cathode 20 that includes an emission portion 30 that includes an emission port 32 through which an atomic beam can be emitted, a rod-shaped first anode 40 disposed inside the cathode 20, and a rod-shaped second anode 50 disposed inside the cathode 20 and spaced from the first anode 40. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.

Abstract: A method of producing a honeycomb filter using a production apparatus that includes: a workpiece securing section for securing a base of a honeycomb filter; a powder transfer section for transferring a powder together with a pressurized gas (e.g., air); an introduction section for introducing the powder that has transferred from the powder transfer section into the base secured by the workpiece securing section when the apparatus is used; a suction section for sucking the gas that has passed through the base secured by the workpiece securing section using suction means; a cleaning section for removing a surplus powder adhering to an end face of the base after the introduction of the powder; a judgment section for judging an amount of the powder adhering to the base; and a workpiece transfer section for transferring the base among the workpiece securing section, the cleaning section, and the judgment section.

Abstract: A method of producing a honeycomb filter using a production apparatus that includes: a workpiece securing section for securing a base of a honeycomb filter; a powder transfer section for transferring a powder together with a pressurized gas (e.g., air); an introduction section for introducing the powder that has transferred from the powder transfer section into the base secured by the workpiece securing section when the apparatus is used; a suction section for sucking the gas that has passed through the base secured by the workpiece securing section using suction means; a cleaning section for removing a surplus powder adhering to an end face of the base after the introduction of the powder; a judgment section for judging an amount of the powder adhering to the base; and a workpiece transfer section for transferring the base among the workpiece securing section, the cleaning section, and the judgment section.

Abstract: A honeycomb filter production apparatus used for producing a honeycomb filter, the apparatus includes: a workpiece securing section for securing a base (workpiece) of a honeycomb filter; a powder transfer section for transferring a powder together with an air current by utilizing pressurized gas; an introduction section that is provided between the powder transfer section and the workpiece securing section, the powder transferred from the powder transfer section together with the air current being mixed with another gas in the introduction section, and introduced into the base (workpiece) secured by the workpiece securing section; and a suction section for sucking the gas that has passed through the base (workpiece) secured by the workpiece securing section by reducing pressure on the other side of the workpiece securing section as compared with the one side of the workpiece securing section using suction means.

Abstract: A honeycomb filter production apparatus includes: a workpiece securing section for securing a base of a honeycomb filter; a powder transfer section for transferring a powder together with an air current by utilizing pressurized gas; an introduction section for introducing the powder that has transferred from the powder transfer section into the base secured by the workpiece securing section when the apparatus is used; a suction section for sucking the gas that has passed through the base secured by the workpiece securing section using suction means; a cleaning section for removing a surplus powder adhering to an end face of the base after the introduction of the powder; a judgment section for judging an amount of the powder adhering to the base; and a workpiece transfer section for transferring the base among the workpiece securing section, the cleaning section, and the judgment section.

Abstract: There is disclosed an inspection device of a plugged honeycomb structure in which a plugged honeycomb structure is an inspection target, and the inspection device comprises a light source which illuminates one end face of the plugged honeycomb structure as the inspection target; a camera-side lens which condenses light emitted from the light source to the one end face, transmitted through plugged portions of the plugged honeycomb structure and radiated from the other end face; a camera which receives the light condensed by the camera-side lens; and an image processor which processes an image of the light received by the camera to display the contrast of the light transmitted through the plugged portions of the plugged honeycomb structure.

Abstract: An inspection method of a honeycomb structure comprising the steps of illuminating one end face of a honeycomb structure as an inspection target by a light source; condensing, by a condensing lens as a lens having an angle of view, light which is emitted from the light source to the one end face, passed through cells of the honeycomb structure and radiated from the other end face; receiving the light condensed on the condensing lens by a camera; subjecting the light received by the camera to image processing by an image processor, thereby specifying the radiated position of the light on the other end face; and calculating the tilt of the cells of the honeycomb structure from the radiated position of the light on the other end face, and the direction of the tilt.

Abstract: According to an apparatus for inspecting defects of a honeycomb structure that is provided with a current plate and an air current formation means (air source and a header tube), fine defects or defects taking place in the vicinity of an outer periphery of the honeycomb structure can be detected with high sensitivity.

Abstract: A honeycomb filter production apparatus includes: a workpiece securing section for securing a base of a honeycomb filter; a powder transfer section for transferring a powder together with an air current by utilizing pressurized gas; an introduction section for introducing the powder that has transferred from the powder transfer section into the base secured by the workpiece securing section when the apparatus is used; a suction section for sucking the gas that has passed through the base secured by the workpiece securing section using suction means; a cleaning section for removing a surplus powder adhering to an end face of the base after the introduction of the powder; a judgment section for judging an amount of the powder adhering to the base; and a workpiece transfer section for transferring the base among the workpiece securing section, the cleaning section, and the judgment section.

Abstract: A honeycomb filter production apparatus used for producing a honeycomb filter, the apparatus includes: a workpiece securing section for securing a base (workpiece) of a honeycomb filter; a powder transfer section for transferring a powder together with an air current by utilizing pressurized gas; an introduction section that is provided between the powder transfer section and the workpiece securing section, the powder transferred from the powder transfer section together with the air current being mixed with another gas in the introduction section, and introduced into the base (workpiece) secured by the workpiece securing section; and a suction section for sucking the gas that has passed through the base (workpiece) secured by the workpiece securing section by reducing pressure on the other side of the workpiece securing section as compared with the one side of the workpiece securing section using suction means.

Abstract: There is disclosed an inspection device of a plugged honeycomb structure in which a plugged honeycomb structure is an inspection target, and the inspection device comprises a light source which illuminates one end face of the plugged honeycomb structure as the inspection target; a camera-side lens which condenses light emitted from the light source to the one end face, transmitted through plugged portions of the plugged honeycomb structure and radiated from the other end face; a camera which receives the light condensed by the camera-side lens; and an image processor which processes an image of the light received by the camera to display the contrast of the light transmitted through the plugged portions of the plugged honeycomb structure.

Abstract: An inspection method of a honeycomb structure comprises the steps of illuminating one end face 15 of a honeycomb structure 11 as an inspection target by a light source 1; condensing, by a condensing lens 2 as a lens having an angle of view, light which is emitted from the light source 1 to the one end face 15, passed through cells of the honeycomb structure 11 and radiated from the other end face 16; receiving the light condensed on the condensing lens 2 by a camera 3; subjecting the light received by the camera 3 to image processing by an image processor 4, thereby specifying the radiated position of the light on the other end face 16; and calculating the tilt of the cells 14 of the honeycomb structure 11 from the radiated position of the light on the other end face 16, and the direction of the tilt.

Abstract: An electron-emitting device includes an emitter section composed of a dielectric material, a lower electrode disposed on the lower side of the emitter section, and an upper electrode disposed on the upper side of the emitter section so as to be opposed to the lower electrode with the emitter section therebetween, electrons being emitted from the emitter section through the upper electrode by the application of a drive voltage between the lower electrode and the upper electrode, wherein the upper electrode is provided with a plurality of through-holes which expose the emitter section and which have an average diameter of 10 nm or more and less than 100 nm, and a peripheral portion of each through-hole facing the emitter section is separated at a predetermined distance from the emitter section.

Abstract: According to an apparatus for inspecting defects of a honeycomb structure that is provided with a current plate and an air current formation means (air source and a header tube), fine defects or defects taking place in the vicinity of an outer periphery of the honeycomb structure can be detected with high sensitivity.

Abstract: An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.