Abstract: {Problem} In combining the master valve and the groups of slave valves, the configuration of the combination is made not for performing simply a uniform control, but is made to be such a form as capable of corresponding to the size and the inside configuration of the processing apparatus, or customer's requirements, which thereby allows a prompt adaptation to variety of demands. {Solution to Problem} In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

Abstract: {Problem} In combining the master valve and the groups of slave valves, the configuration of the combination is made not for performing simply a uniform control, but is made to be such a form as capable of corresponding to the size and the inside configuration of the processing apparatus, or customer's requirements, which thereby allows a prompt adaptation to variety of demands. {Solution to Problem} In combining the master controller and the slave controller, the operation mode is set, and it is made possible to transmit the generated valve opening degree common signal and the generated valve opening degree individual signal from the master controller, corresponding to the operation mode, to the slave controllers that are connected in the sequential daisy-chain style, thereby the slave valves are opening-degree-controlled by any of such generated valve opening degree signals.

Abstract: {Technical Problem} To provide a gate valve that can control the amount of squeeze of sealing material according to each of situations, that is, under the in-manufacturing or during vacuum-maintaining state; thereby, the invented gate valve is capable of suppressing deterioration of its sealing material and lengthening the service life of the sealing material used therein. {Solution to Problem} The gate valve 100 of the embodiment has the control device 11, which is comprised of the equipment control unit 12 that transmits an instruction either an in-manufacturing CLOSE instruction or a FULL CLOSE instruction and the storage means 13 that stores position date that corresponds to each of such instructions. The control device 11 receives either of such instructions and generates the position signal referring to the corresponding position data.

Abstract: {Summary} {Technical Problem} To provide a gate valve that can control the amount of squeeze of sealing material according to each of situations, that is, under the in-manufacturing or during vacuum-maintaining state; thereby, the invented gate valve is capable of suppressing deterioration of its sealing material and lengthening the service life of the sealing material used therein. {Solution to Problem} The gate valve 100 of the embodiment has the control device 11, which is comprised of the equipment control unit 12 that transmits an instruction either an in-manufacturing CLOSE instruction or a FULL CLOSE instruction and the storage means 13 that stores position date that corresponds to each of such instructions. The control device 11 receives either of such instructions and generates the position signal referring to the corresponding position data.