Patents by Inventor Takehiko Ueno
Takehiko Ueno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230321895Abstract: An imprint apparatus including a mold deformation mechanism configured to deform a mold by applying a pressure to the mold, a substrate deformation mechanism configured to deform the substrate by applying a pressure to the substrate, a measurement unit configured to measure a deformation amount of the mold and a deformation amount of the substrate during separating the mold from the cured imprint material on the substrate, and a control unit configured to control, during the separating, a pressure to be applied to the mold by the mold deformation mechanism and a pressure to be applied to the substrate by the substrate deformation mechanism based on the deformation amounts measured by the measurement unit such that a difference between the deformation amount of the mold and the deformation amount of the substrate falls within an allowable range.Type: ApplicationFiled: April 3, 2023Publication date: October 12, 2023Inventor: Takehiko UENO
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Publication number: 20230091051Abstract: An imprint apparatus that transfers a pattern of a mold to an imprint material on a substrate, includes: a mold having a pattern region in which the pattern is formed; a substrate holding unit having a substrate mounting surface on which the substrate is mounted; a driving unit configured to drive the mold and press the mold against the substrate coated with an imprint material at three or more positions; and a control unit configured to control a pressing force of the driving unit based on a distance in an XY plane parallel to the substrate mounting surface between the driving unit and a top portion of a convex shape of at least one of the mold and the substrate deformed by the deformation mechanism.Type: ApplicationFiled: September 19, 2022Publication date: March 23, 2023Inventor: Takehiko Ueno
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Patent number: 10747106Abstract: The present invention provides an imprint apparatus that performs imprint processing of forming a pattern of an imprint material on a substrate using a mold, the apparatus including an image sensing unit configured to sense at least one of the mold and the substrate and obtain an image, and a determination unit configured to determine normality/abnormality of the imprint processing, wherein the imprint processing includes a first step of supplying the imprint material onto the substrate, and a second step of bringing the mold and the imprint material on the substrate into contact with each other, and the determination unit changes a reference of determination of the normality/abnormality of the imprint processing for each step of the imprint processing and determines the normality/abnormality of the imprint processing based on the image sensed by the image sensing unit.Type: GrantFiled: December 8, 2015Date of Patent: August 18, 2020Assignee: CANON KABUSHIKI KAISHAInventors: Sentaro Aihara, Takehiko Ueno
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Patent number: 10386717Abstract: An imprint method includes: placing a light-curable composition on a workpiece substrate (placement); bringing the light-curable composition and a mold into contact with each other an atmosphere of a condensable gas (contact); aligning the mold and the workpiece substrate (alignment); irradiating the light-curable composition with light to obtain a light-cured composition (irradiation); and separating the light-cured composition and the mold from each other after the irradiation (release). The film thickness of the light-curable composition during the alignment is 20% or more greater than that of the light-cured composition after the release.Type: GrantFiled: June 18, 2014Date of Patent: August 20, 2019Assignee: Canon Kabushiki KaishaInventors: Toshiki Ito, Takashi Yoshida, Hitoshi Sato, Youji Kawasaki, Akiko Iimura, Keiji Yamashita, Takehiko Ueno
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Publication number: 20160158978Abstract: The present invention provides an imprint apparatus that performs imprint processing of forming a pattern of an imprint material on a substrate using a mold, the apparatus including an image sensing unit configured to sense at least one of the mold and the substrate and obtain an image, and a determination unit configured to determine normality/abnormality of the imprint processing, wherein the imprint processing includes a first step of supplying the imprint material onto the substrate, and a second step of bringing the mold and the imprint material on the substrate into contact with each other, and the determination unit changes a reference of determination of the normality/abnormality of the imprint processing for each step of the imprint processing and determines the normality/abnormality of the imprint processing based on the image sensed by the image sensing unit.Type: ApplicationFiled: December 8, 2015Publication date: June 9, 2016Inventors: Sentaro Aihara, Takehiko Ueno
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Publication number: 20160147143Abstract: An imprint method includes: placing a light-curable composition on a workpiece substrate (placement); bringing the light-curable composition and a mold into contact with each other an atmosphere of a condensable gas (contact); aligning the mold and the workpiece substrate (alignment); irradiating the light-curable composition with light to obtain a light-cured composition (irradiation); and separating the light-cured composition and the mold from each other after the irradiation (release). The film thickness of the light-curable composition during the alignment is 20% or more greater than that of the light-cured composition after the release.Type: ApplicationFiled: June 18, 2014Publication date: May 26, 2016Inventors: Toshiki Ito, Takashi Yoshida, Hitoshi Sato, Youji Kawasaki, Akiko Iimura, Keiji Yamashita, Takehiko Ueno
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Patent number: 6784936Abstract: An image-pickup display apparatus including a camera unit with: an image-pickup optical system; an image-pickup device having a light intercepting surface at a position of image formation by the image-pickup optical system, a signal processing circuit for generating a picture signal based on an image-pickup signal output by the image-pickup device, and a controller for correcting exposure by controlling the image-pickup device and the signal processing circuit.Type: GrantFiled: August 2, 1999Date of Patent: August 31, 2004Assignee: Sony CorporationInventors: Shinya Fukushima, Takehiko Ueno
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Patent number: 4898116Abstract: A powder coating booth a function of supplying air though its ceiling. Sidewalls of the booth is formed from an insulating material or a semiconductor. A belt conveyor is disposed at the bottom of the booth. An electric field is formed so that it extends from a paint gun to the conveyor belt. The majority of oversprayed powder paint produced during painting becomes attached to the upper surface of a portion of the conveyor belt, is carried, together with this belt portion, to the outside of the booth, and is recovered from the conveyor by a blowing-type of static eliminator, thereby minimizing the mount of oversprayed powder paint mixed in an exhaust of the booth drawn through the sidewall.Type: GrantFiled: September 7, 1988Date of Patent: February 6, 1990Assignee: Onoda Cement Company, Ltd.Inventors: Katsutoshi Kozoe, Nobuo Furuya, Shinichi Kimura, Yasunari Okamoto, Mitsuyoshi Kumada, Tatsuo Sugimoto, Takehiko Ueno, Kenjiro Shimizu, Tsutomu Itoh
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Patent number: 4689550Abstract: This invention relates to a method for adjusting an electronic circuit used for a television receiver and the like when it is adjusted upon being manufactured, in which connection wires (17) and (18), which can be melt-cut by flowing a current thereto from the outside, are previously connected in series or in parallel to adjusting elements (12) and (13) inserted into a predetermined current path within an electronic circuit (10); the operation state of the electronic circuit (10) is detected by a detector circuit (5); on the basis of the detected result, it is judged whether the connection wires (17) and (18) are melt-cut or not; and under the necessary state, the connection wires (17) and (18) are melt-cut by flowing the current thereto from the outside, whereby a semi-fixed resistor is omitted, the reliability thereof after adjustment can be improved and the adjustment itself can be simplified, thus reducing the adjusting time.Type: GrantFiled: December 30, 1985Date of Patent: August 25, 1987Assignee: Sony CorporationInventors: Tsunenobu Ujihara, Takamichi Mitsuhashi, Takehiko Ueno