Abstract: A surface treatment apparatus includes a housing unit that houses at least one workpiece, a placement device in which the workpiece is placed such that the workpiece is substantially orthogonal to a normal direction of an outer peripheral surface of a rotating shaft extending in a horizontal direction, and faces outward, a first rotating device that rotates the placement device) around the rotating shaft in a state where the placement device is housed in the housing unit, a surface treatment device that extends inside the housing unit and in parallel with the rotating shaft and performs surface treatment by supplying gas to a surface of the workpiece, and an exhaust device that is provided inside the housing unit at a position different from a position where the surface treatment device is provided, and adjusts pressure and exhausts gas inside the housing unit.

Abstract: A surface treatment apparatus (10) performs film formation on a surface of a workpiece (W) in a chamber (20), and includes: an HCD electrode (210) (electrode) that supplies reaction gas to the workpiece (W) or a sputtering electrode (220) (electrode) that releases target particles to the workpiece (W), the HCD electrode (210) or the sputtering electrode (220) being placed facing the workpiece (W); a gas supply pipe (90) that is installed along an outer periphery of the electrode and has, along a longitudinal direction of the pipe, a plurality of gas ejection ports (91) through which film-forming gas, or an inert gas or a reactive gas for performing sputtering is supplied to an electrode surface of the electrode; and an exhaust device (51) (gas discharge unit) that discharges residual gas after film formation is ended, and the plurality of gas ejection ports (91) are arranged such that gas supplied from the gas supply pipe (90) is uniformly distributed on the electrode surface of the electrode.

Abstract: A surface treatment apparatus includes a placement part on which a workpiece is placed, a first housing part, a second housing part, and a conveyance part. The first housing part houses the workpiece placed on the placement part. The second housing part houses the workpiece placed on the placement part. The second housing part includes a surface treatment part performing at least one type of surface treatment. The conveyance part conveys the workpiece placed on the placement part in a longitudinal direction of the first housing part or the second housing part. The surface treatment apparatus performs surface treatment on the workpiece in a state where the second housing part is a single body or in a state where the first housing part and the second housing part are plurally coupled in a conveyance direction of the conveyance part.

Abstract: A surface treatment apparatus includes a mounting device, a housing unit, a surface treatment device, a conveyance device, and a first adjustment device. A workpiece is mounted on the mounting device. The housing unit houses the workpiece mounted on the mounting device. The surface treatment device performs at least one kind of surface treatment on the workpiece housed in the housing unit. The conveyance device conveys the workpiece mounted on the mounting device along the surface treatment device. The first adjustment device adjusts an orientation of the workpiece according to a conveyance position by the conveyance device and a position of the surface treatment device.

Abstract: In a surface treatment apparatus, a conveyance device houses a placement device having a treated member placed thereon, into a housing unit. A rotation device rotates the treated member to face a direction facing a surface treatment device in a predetermined rotation pattern, in a state in which the placement device is housed in the housing unit.

Abstract: A flow rate adjustment valve includes: a flow path portion which has one end at which an opening is formed, and in which a fluid flows; a lifting valve which is configured to close the opening by covering an entire region of the opening, open the opening by being separated from the opening in an opening direction of the opening, and change a distance from the opening in the opening direction to change a flow area with respect to the opening; and a servo actuator as a driver which moves the lifting valve in the opening direction based on a predetermined detection value.

Abstract: A surface treatment device includes a housing unit, a surface treatment element, and a stirring element. The housing unit houses a workpiece. The surface treatment element performs surface treatment on the workpiece housed in the housing unit. The stirring element stirs the workpiece when the surface treatment element performs the surface treatment on the workpiece.