Abstract: A light deflector is provided including a mirror unit including a reflection plane, the mirror unit configured to rotate around a predetermined rotational axis, a pair of supporting beams configured to support the mirror unit in a rotatable manner, and drivers configured to drive the mirror unit to rotate, through the supporting beams. Each of the drivers has one end coupled to the supporting beams and another end coupled to a supporting unit formed to surround the mirror unit, and the supporting unit at least partially includes a thick portion and a thin portion different from each other in thickness.

Abstract: A light deflector is provided including a mirror unit including a reflection plane, the mirror unit configured to rotate around a predetermined rotational axis, a pair of supporting beams configured to support the mirror unit in a rotatable manner, and drivers configured to drive the mirror unit to rotate, through the supporting beams. Each of the drivers has one end coupled to the supporting beams and another end coupled to a supporting unit formed to surround the mirror unit, and the supporting unit at least partially includes a thick portion and a thin portion different from each other in thickness.

Abstract: A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

Abstract: An optical deflecting device including a mirror member having a light reflective area. The optical deflecting device includes a plurality of electrodes that are formed on a substrate, a fulcrum member that functions as an electrode and a regulation member. The range of movement to a respect direction of the substrate is regulated by the regulation member, which includes a conductive material at least in the surface thereof.

Abstract: An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power or resolution.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A light deflector includes a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member and the stopper, the plate-shaped member having a light reflection area, no fixed end, and a conductive layer; and a plurality of electrodes provided on the substrate, the electrodes facing the conductive layer of the plate-shaped member.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: An optical deflecting device includes a plate-like member having a light reflective area and a conductor layer. The plate-like member rotates with substantially the middle portion thereof made a fulcrum to change an inclination direction thereof and thereby a reflection direction of a light flux incident to the light reflective area is changed. A first electrode group and a second electrode group are arranged so as to oppose the conductor layer of the plate-like member, respectively, and to sandwich a position corresponding to a position of the fulcrum of the plate-like member. Each electrode group includes a control electrode controlling starting of the plate-like member and a drive electrode driving the plate-like member.

Abstract: A light deflecting apparatus deflecting input light in directions for at least one deflection-axis includes a plate-like-shaped member configured to reflect input light, a substrate above which the plate-like-shaped member is placed with no fixed portion relative to the substrate, a supporting member serving as a fulcrum for the plate-like-shaped member to tilt, a plurality of space regulating members configured to regulate a space in which the plate-like-shaped member placed on the supporting member above the substrate is freely movable, and a plurality of electrodes arranged around the supporting member on the substrate and facing a bottom surface of the plate-like-shaped member.

Abstract: A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

Abstract: An optical deflecting device including a mirror member having a light reflective area. The optical deflecting device includes a plurality of electrodes that are formed on a substrate, a fulcrum member that functions as an electrode and a regulation member. The range of movement to a respect direction of the substrate is regulated by the regulation member, which includes a conductive material at least in the surface thereof.

Abstract: A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.

Abstract: A method for driving a light deflector the method includes turning over a direction of an electric field acting on the plate shape member, in an optional period. In the method, the light deflector deflects a beam incident on a light reflection area by displacing a plate shape member having the light reflection area with an electrostatic force. The light deflector includes a substrate, a plurality of control members, a fulcrum member, the plate shape member, and a plurality of electrodes.

Abstract: A light deflecting apparatus deflecting input light in directions for at least one deflection-axis includes a plate-like-shaped member configured to reflect input light, a substrate above which the plate-like-shaped member is placed with no fixed portion relative to the substrate, a supporting member serving as a fulcrum for the plate-like-shaped member to tilt, a plurality of space regulating members configured to regulate a space in which the plate-like-shaped member placed on the supporting member above the substrate is freely movable, and a plurality of electrodes arranged around the supporting member on the substrate and facing a bottom surface of the plate-like-shaped member.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.