Patents by Inventor Takuma YAMANAKA

Takuma YAMANAKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210367396
    Abstract: A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.
    Type: Application
    Filed: August 10, 2021
    Publication date: November 25, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Hirotaka MIYAMOTO, Takuma YAMANAKA, Miwa IGARASHI
  • Publication number: 20210294223
    Abstract: A wavelength control method of a laser apparatus includes sequentially obtaining target wavelength data of a pulse laser beam, sequentially saving the target wavelength data, sequentially measuring a wavelength of the pulse laser beam to obtain a measured wavelength, calculating a wavelength deviation using the measured wavelength and the target wavelength data at a time before a time when the measured wavelength is obtained, and feedback-controlling the wavelength of the pulse laser beam using the wavelength deviation.
    Type: Application
    Filed: June 8, 2021
    Publication date: September 23, 2021
    Applicant: Gigaphoton Inc.
    Inventors: Takuma YAMANAKA, Hirotaka MIYAMOTO