Patents by Inventor Tanuj TRIVEDI
Tanuj TRIVEDI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240088253Abstract: Gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, and methods of fabricating gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires above a substrate. A dielectric cap is over the first vertical arrangement of nanowires. A second vertical arrangement of nanowires is above the substrate. Individual ones of the second vertical arrangement of nanowires are laterally staggered with individual ones of the first vertical arrangement of nanowires and the dielectric cap.Type: ApplicationFiled: November 15, 2023Publication date: March 14, 2024Inventors: Tanuj TRIVEDI, Rahul RAMASWAMY, Jeong Dong KIM, Babak FALLAHAZAD, Hsu-Yu CHANG, Ting CHANG, Nidhi NIDHI, Walid M. HAFEZ
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Patent number: 11862703Abstract: Gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, and methods of fabricating gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires above a substrate. A dielectric cap is over the first vertical arrangement of nanowires. A second vertical arrangement of nanowires is above the substrate. Individual ones of the second vertical arrangement of nanowires are laterally staggered with individual ones of the first vertical arrangement of nanowires and the dielectric cap.Type: GrantFiled: July 21, 2022Date of Patent: January 2, 2024Assignee: Intel CorporationInventors: Tanuj Trivedi, Rahul Ramaswamy, Jeong Dong Kim, Babak Fallahazad, Hsu-Yu Chang, Ting Chang, Nidhi Nidhi, Walid M. Hafez
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Publication number: 20230420501Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment, a semiconductor device comprises a substrate, and a first transistor of a first conductivity type over the substrate. In an embodiment, the first transistor comprises a first semiconductor channel, and a first gate electrode around the first semiconductor channel. In an embodiment, the semiconductor device further comprises a second transistor of a second conductivity type above the first transistor. The second transistor comprises a second semiconductor channel, and a second gate electrode around the second semiconductor channel. In an embodiment, the second gate electrode and the first gate electrode comprise different materials.Type: ApplicationFiled: September 11, 2023Publication date: December 28, 2023Inventors: Rahul RAMASWAMY, Walid M. HAFEZ, Tanuj TRIVEDI, Jeong Dong KIM, Ting CHANG, Babak FALLAHAZAD, Hsu-Yu CHANG, Nidhi NIDHI
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Patent number: 11791380Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment, a semiconductor device comprises a substrate, and a first transistor of a first conductivity type over the substrate. In an embodiment, the first transistor comprises a first semiconductor channel, and a first gate electrode around the first semiconductor channel. In an embodiment, the semiconductor device further comprises a second transistor of a second conductivity type above the first transistor. The second transistor comprises a second semiconductor channel, and a second gate electrode around the second semiconductor channel. In an embodiment, the second gate electrode and the first gate electrode comprise different materials.Type: GrantFiled: December 13, 2019Date of Patent: October 17, 2023Assignee: Intel CorporationInventors: Rahul Ramaswamy, Walid M. Hafez, Tanuj Trivedi, Jeong Dong Kim, Ting Chang, Babak Fallahazad, Hsu-Yu Chang, Nidhi Nidhi
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Patent number: 11581404Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar uppermost nanowires. The integrated circuit structure also includes a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar uppermost nanoribbons.Type: GrantFiled: May 5, 2021Date of Patent: February 14, 2023Assignee: Intel CorporationInventors: Tanuj Trivedi, Jeong Dong Kim, Walid M. Hafez, Hsu-Yu Chang, Rahul Ramaswamy, Ting Chang, Babak Fallahazad
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Publication number: 20220359697Abstract: Gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, and methods of fabricating gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires above a substrate. A dielectric cap is over the first vertical arrangement of nanowires. A second vertical arrangement of nanowires is above the substrate. Individual ones of the second vertical arrangement of nanowires are laterally staggered with individual ones of the first vertical arrangement of nanowires and the dielectric cap.Type: ApplicationFiled: July 21, 2022Publication date: November 10, 2022Inventors: Tanuj TRIVEDI, Rahul RAMASWAMY, Jeong Dong KIM, Babak FALLAHAZAD, Hsu-Yu CHANG, Ting CHANG, Nidhi NIDHI, Walid M. HAFEZ
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Patent number: 11437483Abstract: Gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, and methods of fabricating gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires above a substrate. A dielectric cap is over the first vertical arrangement of nanowires. A second vertical arrangement of nanowires is above the substrate. Individual ones of the second vertical arrangement of nanowires are laterally staggered with individual ones of the first vertical arrangement of nanowires and the dielectric cap.Type: GrantFiled: March 5, 2020Date of Patent: September 6, 2022Assignee: Intel CorporationInventors: Tanuj Trivedi, Rahul Ramaswamy, Jeong Dong Kim, Babak Fallahazad, Hsu-Yu Chang, Ting Chang, Nidhi Nidhi, Walid M. Hafez
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Publication number: 20220093588Abstract: Adjacent gate-all-around integrated circuit structures having non-merged epitaxial source or drain regions, and methods of fabricating adjacent gate-all-around integrated circuit structures having non-merged epitaxial source or drain regions, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate. One or more gate stacks is over the first and second vertical arrangements of nanowires. First epitaxial source or drain structures are at ends of the first vertical arrangement of nanowires. Second epitaxial source or drain structures are at ends of the second vertical arrangement of nanowires. An intervening dielectric structure is between adjacent ones of the first epitaxial source or drain structures and between adjacent ones of the second epitaxial source or drain structures.Type: ApplicationFiled: September 18, 2020Publication date: March 24, 2022Inventors: Sairam SUBRAMANIAN, Walid M. HAFEZ, Hsu-Yu CHANG, Chia-Hong JAN, Tanuj TRIVEDI
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Publication number: 20210399002Abstract: Embodiments disclosed herein include a semiconductor device and methods of forming such a device. In an embodiment, the semiconductor device comprises a substrate and a transistor on the substrate. In an embodiment, the transistor comprises a first gate electrode, where the first gate electrode is part of a first array of gate electrodes with a first pitch. In an embodiment, the first gate electrode has a first average grain size. In an embodiment, the semiconductor device further comprises a component cell on the substrate. In an embodiment, the component cell comprises a second gate electrode, where the second gate electrode is part of a second array of gate electrodes with a second pitch that is larger than the first pitch. In an embodiment, the second gate electrode has a second average grain size that is larger than the first average grain size.Type: ApplicationFiled: June 23, 2020Publication date: December 23, 2021Inventors: Tanuj TRIVEDI, Walid M. HAFEZ, Rohan BAMBERY, Daniel B. O'Brien, Christopher Alan NOLPH, Rahul RAMASWAMY, Ting CHANG
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Publication number: 20210280683Abstract: Gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, and methods of fabricating gate-all-around integrated circuit structures having dual nanowire/nanoribbon channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires above a substrate. A dielectric cap is over the first vertical arrangement of nanowires. A second vertical arrangement of nanowires is above the substrate. Individual ones of the second vertical arrangement of nanowires are laterally staggered with individual ones of the first vertical arrangement of nanowires and the dielectric cap.Type: ApplicationFiled: March 5, 2020Publication date: September 9, 2021Inventors: Tanuj TRIVEDI, Rahul RAMASWAMY, Jeong Dong KIM, Babak FALLAHAZAD, Hsu-Yu CHANG, Ting CHANG, Nidhi NIDHI, Walid M. HAFEZ
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Publication number: 20210257452Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar uppermost nanowires. The integrated circuit structure also includes a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar uppermost nanoribbons.Type: ApplicationFiled: February 19, 2020Publication date: August 19, 2021Inventors: Tanuj TRIVEDI, Jeong Dong KIM, Walid M. HAFEZ, Hsu-Yu CHANG, Rahul RAMASWAMY, Ting CHANG, Babak FALLAHAZAD
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Publication number: 20210257453Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar uppermost nanowires. The integrated circuit structure also includes a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar uppermost nanoribbons.Type: ApplicationFiled: May 5, 2021Publication date: August 19, 2021Inventors: Tanuj TRIVEDI, Jeong Dong KIM, Walid M. HAFEZ, Hsu-Yu CHANG, Rahul RAMASWAMY, Ting CHANG, Babak FALLAHAZAD
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Patent number: 11094782Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures, are described. For example, an integrated circuit structure includes a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar uppermost nanowires. The integrated circuit structure also includes a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar uppermost nanoribbons.Type: GrantFiled: February 19, 2020Date of Patent: August 17, 2021Assignee: Intel CorporationInventors: Tanuj Trivedi, Jeong Dong Kim, Walid M. Hafez, Hsu-Yu Chang, Rahul Ramaswamy, Ting Chang, Babak Fallahazad
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Publication number: 20210193844Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment, a semiconductor device comprises a source, a drain, and a semiconductor channel between the source and the drain. In an embodiment, the semiconductor channel has a non-uniform strain through a thickness of the semiconductor channel. In an embodiment, the semiconductor device further comprises a gate stack around the semiconductor channel.Type: ApplicationFiled: December 23, 2019Publication date: June 24, 2021Inventors: Rahul RAMASWAMY, Hsu-Yu CHANG, Babak FALLAHAZAD, Hsiao-Yuan WANG, Ting CHANG, Tanuj TRIVEDI, Jeong Dong KIM, Nidhi NIDHI, Walid M. HAFEZ
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Publication number: 20210184001Abstract: Embodiments disclosed herein include nanowire and nanoribbon devices with non-uniform dielectric thicknesses. In an embodiment, the semiconductor device comprises a substrate and a plurality of first semiconductor layers in a vertical stack over the substrate. The first semiconductor layers may have a first spacing. In an embodiment, a first dielectric surrounds each of the first semiconductor layers, and the first dielectric has a first thickness. The semiconductor device may further comprise a plurality of second semiconductor layers in a vertical stack over the substrate, where the second semiconductor layers have a second spacing that is greater than the first spacing. In an embodiment a second dielectric surrounds each of the second semiconductor layers, and the second dielectric has a second thickness that is greater than the first thickness.Type: ApplicationFiled: December 13, 2019Publication date: June 17, 2021Inventors: Tanuj TRIVEDI, Rahul RAMASWAMY, Jeong Dong KIM, Ting CHANG, Walid M. HAFEZ, Babak FALLAHAZAD, Hsu-Yu CHANG, Nidhi NIDHI
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Publication number: 20210184032Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment a semiconductor device comprises a substrate, a source region over the substrate, a drain region over the substrate, and a semiconductor body extending from the source region to the drain region. In an embodiment, the semiconductor body has a first region with a first conductivity type and a second region with a second conductivity type. In an embodiment, the semiconductor device further comprises a gate structure over the first region of the semiconductor body, where the gate structure is closer to the source region than the drain region.Type: ApplicationFiled: December 13, 2019Publication date: June 17, 2021Inventors: Nidhi NIDHI, Rahul RAMASWAMY, Walid M. HAFEZ, Hsu-Yu CHANG, Ting CHANG, Babak FALLAHAZAD, Tanuj TRIVEDI, Jeong Dong KIM
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Publication number: 20210184045Abstract: Embodiments disclosed herein include nanoribbon and nanowire semiconductor devices. In an embodiment, the semiconductor device comprises a nanowire disposed above a substrate. In an embodiment, the nanowire has a first dopant concentration, and the nanowire comprises a pair of tip regions on opposite ends of the nanowire. In an embodiment, the tip regions comprise a second dopant concentration that is greater than the first dopant concentration. In an embodiment, the semiconductor device further comprises a gate structure over the nanowire. In an embodiment, the gate structure is wrapped around the nanowire, and the gate structure defines a channel region of the device. In an embodiment, a pair of source/drain regions are on opposite sides of the gate structure, and both source/drain regions contact the nanowire.Type: ApplicationFiled: December 13, 2019Publication date: June 17, 2021Inventors: Rahul RAMASWAMY, Walid M. HAFEZ, Nidhi NIDHI, Ting CHANG, Hsu-Yu CHANG, Tanuj TRIVEDI, Jeong Dong KIM, Babak FALLAHAZAD
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Publication number: 20210183850Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment, a semiconductor device comprises a semiconductor substrate and a source. The source has a first conductivity type and a first insulator separates the source from the semiconductor substrate. The semiconductor device further comprises a drain. The drain has a second conductivity type that is opposite from the first conductivity type, and a second insulator separates the drain from the semiconductor substrate. In an embodiment, the semiconductor further comprises a semiconductor body between the source and the drain, where the semiconductor body is spaced away from the semiconductor substrate.Type: ApplicationFiled: December 13, 2019Publication date: June 17, 2021Inventors: Nidhi NIDHI, Rahul RAMASWAMY, Walid M. HAFEZ, Hsu-Yu CHANG, Ting CHANG, Babak FALLAHAZAD, Tanuj TRIVEDI, Jeong Dong KIM, Ayan KAR, Benjamin ORR
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Publication number: 20210184051Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment, a semiconductor device comprises a substrate, a first transistor over the substrate, where the first transistor comprises a vertical stack of first semiconductor channels, and a first gate dielectric surrounding each of the first semiconductor channels. The first gate dielectric has a first thickness. In an embodiment, the semiconductor device further comprises a second transistor over the substrate, where the second transistor comprises a second semiconductor channel. The second semiconductor channel comprises pair of sidewalls and a top surface. In an embodiment, a second gate dielectric is over the pair of sidewalls and the top surface of the fin, where the second gate dielectric has a second thickness that is greater than the first thickness.Type: ApplicationFiled: December 13, 2019Publication date: June 17, 2021Inventors: Tanuj TRIVEDI, Rahul RAMASWAMY, Jeong Dong KIM, Ting CHANG, Walid M. HAFEZ, Babak FALLAHAZAD, Hsu-Yu CHANG, Nidhi NIDHI
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Publication number: 20210184000Abstract: Embodiments disclosed herein include semiconductor devices and methods of forming such devices. In an embodiment, a semiconductor device comprises a substrate, and a first transistor of a first conductivity type over the substrate. In an embodiment, the first transistor comprises a first semiconductor channel, and a first gate electrode around the first semiconductor channel. In an embodiment, the semiconductor device further comprises a second transistor of a second conductivity type above the first transistor. The second transistor comprises a second semiconductor channel, and a second gate electrode around the second semiconductor channel. In an embodiment, the second gate electrode and the first gate electrode comprise different materials.Type: ApplicationFiled: December 13, 2019Publication date: June 17, 2021Inventors: Rahul RAMASWAMY, Walid M. HAFEZ, Tanuj TRIVEDI, Jeong Dong KIM, Ting CHANG, Babak FALLAHAZAD, Hsu-Yu CHANG, Nidhi NIDHI