Abstract: An object of the present invention is to provide a positive electrode mixture capable of conducting stable charging and discharging with a less amount of gasses generated which has an operating voltage or an initial crystal phase transition voltage of not less than 4.5 V on the basis of lithium. The present invention relates to a positive electrode mixture comprising carbon black having a bulk density of not more than 0.1 g/cm3, a crystallite size of 10 to 40 ?, an iodine adsorption of 1 to 150 mg/g, a volatile content of not more than 0.1% and a metal impurity content of not more than 20 ppm, and a positive electrode active substance having an operating voltage or an initial crystal phase transition voltage of not less than 4.5 V on the basis of lithium.

Abstract: According to one embodiment, a reticle chuck cleaner for cleaning a reticle chuck of an EUV exposure apparatus includes a substrate having a shape to be carried to the reticle chuck of the EUV exposure apparatus, and an adhesive formed on one of the main surfaces of the substrate.

Abstract: There is provided a reticle chuck cleaner A for cleaning a reticle chuck of an apparatus, as a reticle chuck cleaner that allows easy cleaning of a reticle chuck in a vacuum chamber of an apparatus without exposing the chamber to the atmosphere and contributes to improvement of the operating ratio of the apparatus, including: an adhesive layer 1 to be adhered to a chuck region of the reticle chuck; a support layer 2 laminated on the adhesive layer 1; and a substrate 3 having a shape capable of being carried to the reticle chuck, the support layer 2 and the substrate 3 being partially bonded together in an adhesive region 41 of a partial adhesive layer 4.

Abstract: According to one embodiment, a reticle chuck cleaner for cleaning a reticle chuck of an EUV exposure apparatus includes a substrate having a shape to be carried to the reticle chuck of the EUV exposure apparatus, and an adhesive formed on one of the main surfaces of the substrate.

Abstract: According to one embodiment, a reticle chuck cleaner for cleaning a reticle chuck of an EUV exposure apparatus includes a substrate having a shape to be carried to the reticle chuck of the EUV exposure apparatus, and an adhesive formed on one of the main surfaces of the substrate.

Abstract: There is provided a reticle chuck cleaner A for cleaning a reticle chuck of an apparatus, as a reticle chuck cleaner that allows easy cleaning of a reticle chuck in a vacuum chamber of an apparatus without exposing the chamber to the atmosphere and contributes to improvement of the operating ratio of the apparatus, including: an adhesive layer 1 to be adhered to a chuck region of the reticle chuck; a support layer 2 laminated on the adhesive layer 1; and a substrate 3 having a shape capable of being carried to the reticle chuck, the support layer 2 and the substrate 3 being partially bonded together in an adhesive region 41 of a partial adhesive layer 4.

Abstract: According to one embodiment, a reticle chuck cleaner for cleaning a reticle chuck of an EUV exposure apparatus includes a substrate having a shape to be carried to the reticle chuck of the EUV exposure apparatus, and an adhesive formed on one of the main surfaces of the substrate.

Abstract: Provided is a lithium iron thiophosphate compound represented by a general formula: Li2xFe1-xPS3 wherein x is more than 0 and less than 1. This compound provides a lithium battery having high out put as well as high energy density when used as an electrode active material.

Abstract: A lamellar sodium-cobalt-manganese oxide represented by the general formula NaxCoyMn1−yO2 (where 0.6≦x≦0.8, 0.4≦y≦0.6) is disclosed, which is obtained by the steps of: mixing a sodium salt, a cobalt salt and a manganese salt in an aqueous solution state so as to be a molar ratio of sodium, cobalt and manganese of x: y: 1−y (where 0.6≦x≦0.8, 0.4≦y≦0.6) and drying the obtained mixture, sintering the obtained dried body in an oxygen-containing gas at 700 to 900° C., and quenching the sintered body from a temperature between 700° C. and 800° C. The lamellar sodium-cobalt manganese oxide of the present invention has a uniform composition and a single crystal structure, which is useful as an electrode active material for a lithium ion secondary battery.