Abstract: According to one embodiment, a substrate processing apparatus has a treatment tank, a holder to hold the substrate while in the treatment tank, a chemical discharge pipe below a position of the holder for supplying a chemical solution to the treatment tank, a bubble discharge pipe below the position of the holder for discharging a gas. The first bubble discharge pipe is closer along a horizontal direction to a centerline of the treatment tank than is the chemical discharge pipe. A rectifying plate is disposed below the position of the holder and extends from a position above the chemical discharge pipe to a position above the first bubble discharge pipe at an incline with respect to the first direction horizontal.

Abstract: According to one embodiment, a substrate processing apparatus includes a batch type cleaning unit, a holding unit, and a single-substrate type drying unit. The batch type cleaning unit simultaneously cleans a plurality of substrates in a batch process with a first liquid. The holding unit receives the cleaned substrates while still wet and then keeps a first surface of each of the substrates wet with the first liquid. The single-substrate type drying unit is configured to receive the substrates one by one from the holding unit and then dry off the substrates one by one.

Abstract: A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.

Abstract: A valve device includes: a valve body that forms a first flow path and a second flow path; an inner disc that includes an inner annular part disposed around an opening of the first flow path, an outer annular part disposed on an outer peripheral side of the inner annular part, and a connecting part that includes a plurality of openings that communicates with the second flow path and that connects the inner annular part and the outer annular part; a valve seat disposed on the inner annular part; and a diaphragm that, at a peripheral edge part of the diaphragm, comes into contact with the outer annular part and makes the first flow path and the second flow path continuous and discontinuous by moving between an open position of non-contact and a closed position of contact with the valve seat.

Abstract: A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

Abstract: To provide a valve device capable of easily and precisely adjusting a flow rate of a flowing fluid, and an actuator used in the valve device. The problem is solved by an actuator including pistons housed in a housing, a supply port of compressed air provided to a casing constituting the housing, and an adjustment member that is provided to a position separated from the supply port and regulates an upper limit position of possible movement of the piston that comes into contact with the adjustment member. The piston comes into contact with the adjustment member and is positioned in the upper limit position when compressed air is supplied through the supply port. The adjustment member s provided so as to allow adjustment of the upper limit position from outside the housing.

Abstract: A valve device includes: a valve body that forms a first flow path and a second flow path; an inner disc that includes an inner annular part disposed around an opening of the first flow path, an outer annular part disposed on an outer peripheral side of the inner annular part, and a connecting part that includes a plurality of openings that communicates with the second flow path and that connects the inner annular part and the outer annular part; a valve seat disposed on the inner annular part; and a diaphragm that, at a peripheral edge part of the diaphragm, comes into contact with the outer annular part and makes the first flow path and the second flow path continuous and discontinuous by moving between an open position of non-contact and a closed position of contact with the valve seat.

Abstract: A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess 23 of the valve body 2, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.

Abstract: An industrial device communication system comprising: industrial devices that function as communication masters; industrial devices that function as communication slaves that receive control data from the industrial devices that function as communication masters; communication lines that communicably connect the industrial devices to one another; one or more switches for causing a communication group including the industrial devices that function as communication masters and the industrial devices that function as communication slaves to communicate independently from one or more other communication groups; and one or more switch controllers that control the one or more switches, causing the switches to switch between a state in which an inter-group communication line present between the communication group and the one or more other communication groups is disconnected, and a state in which the disconnected inter-group communication line is connected, according to the communication group that independently co

Abstract: An information processor includes a controller that is configured to: produce, on the basis of use information of a device manufactured under a manufacturing condition based on spec information, appropriate spec information representing an appropriate spec which is appropriate to the device; and determine a manufacturing condition for the device on the basis of the appropriate spec information.

Abstract: To provide a valve device capable of easily and precisely adjusting a flow rate of a flowing fluid, and an actuator used in the valve device. The problem is solved by an actuator including pistons housed in a housing, a supply port of compressed air provided to a casing constituting the housing, and an adjustment member that is provided to a position separated from the supply port and regulates an upper limit position of possible movement of the piston that comes into contact with the adjustment member. The piston comes into contact with the adjustment member and is positioned in the upper limit position when compressed air is supplied through the supply port. The adjustment member s provided so as to allow adjustment of the upper limit position from outside the housing.

Abstract: A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

Abstract: An industrial device communication system comprising: industrial devices that function as communication masters; industrial devices that function as communication slaves that receive control data from the industrial devices that function as communication masters; communication lines that communicably connect the industrial devices to one another; one or more switches for causing a communication group including the industrial devices that function as communication masters and the industrial devices that function as communication slaves to communicate independently from one or more other communication groups; and one or more switch controllers that control the one or more switches, causing the switches to switch between a state in which an inter-group communication line present between the communication group and the one or more other communication groups is disconnected, and a state in which the disconnected inter-group communication line is connected, according to the communication group that independently co