Patents by Inventor Teppei Yamashita

Teppei Yamashita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5320218
    Abstract: A wafer storing, closed container for use in a clean room of a semiconductor manufacturing system is provided with an attached inert gas tank so as to eliminate the need to convey the container to an inert gas purge station to supplement the inert gas supply in the container due to leakage. A gas passageway is formed in a body of the container in such a manner that one end thereof is open inside the container. The other end is open outside the container. The portable inert gas tank is detachably connected to the other end of the gas passageway so as to automatically supplement the container with the inert gas.
    Type: Grant
    Filed: April 5, 1993
    Date of Patent: June 14, 1994
    Assignee: Shinko Electric Co., Ltd.
    Inventors: Teppei Yamashita, Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano, Atsushi Okuno, Masanori Tsuda, Mitsuhiro Hayashi
  • Patent number: 5303482
    Abstract: A wafer keeping apparatus includes a closed wafer keeping space, and an arrangement for circulating an inert gas through a filter and then through the wafer keeping space. In one embodiment, several wafer keeping shelves are each provided within the space, and the inert gas is supplied through a respective filter to flow across each shelf. In another embodiment, a plurality of wafer keeping spaces are each accessible through a respective door which forms an airtight seal when it is closed, and respective filters are provided on opposite sides of the space, the inert gas being supplied to the space through one filter and exiting the space through the other filter. In a further embodiment, several of the wafer keeping spaces are provided at angularly and vertically spaced locations in a rotatable stocker body provided within a casing, and several vertically spaced doors are provided on the casing to provide access to respective wafer keeping spaces in the stocker body.
    Type: Grant
    Filed: January 28, 1992
    Date of Patent: April 19, 1994
    Assignee: Shinko Electric Co., Ltd.
    Inventors: Teppei Yamashita, Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano, Atsushi Okuno, Masanori Tsuda, Mitsuhiro Hayashi, Hiromi Morita
  • Patent number: 5220263
    Abstract: A moving robot system, employing a charging control system for robots, is configured by plural moving robots, at least one charging station and a control station. Each moving robot is designed to perform an operation thereof in accordance with programs stored therein under control of the control station. When the power of a charging-type-battery equipped in each moving robot is consumed and lowered to the predetermined level, it automatically moves to its nearest charging station designated by the control station other than the charging station which is used for another moving robot. In this case, the control station controls the moving robots such that plural moving robots are not simultaneously concentrated to one charging station.
    Type: Grant
    Filed: March 26, 1991
    Date of Patent: June 15, 1993
    Assignee: Shinko Electric Co., Ltd.
    Inventors: Masanori Onishi, Hidemitsu Tabata, Teppei Yamashita, Masanao Murata
  • Patent number: 4982329
    Abstract: A self-contained unmanned vehicle (robot car) is designed to be capable of independently traveling, on the basis of previously specified geographic data, to convey parts, finished products, etc. etc. in a factory or similar, and achieves fine travel position control while simultaneously reducing the X memory capacity for the geographic data and ensures easy preparation and entry of geographic data and facilitates the comprehensibility of the contents of the geographic data.
    Type: Grant
    Filed: June 24, 1988
    Date of Patent: January 1, 1991
    Assignee: Shinko Electric Co., Ltd.
    Inventors: Hidemitsu Tabata, Teppei Yamashita, Masanori Onishi, Yuji Nishikawa