Abstract: An evacuating apparatus includes a first pump section disposed on a suction opening side, a second pump section for exhausting a smaller amount of gas than the first pump section, the second pump being disposed in an exhaust opening side, a plurality of rotors accommodated in a housing, bearings for supporting rotation of the rotors, a suction opening for drawing fluid and a first exhaust opening thereof both formed on the housing, and a plurality of motors for driving the rotors. In the apparatus, the first pump section is a pump of positive displacement type formed by utilizing a volume change of a space defined by the rotors and the housing, and the second pump section is a viscous-type pump formed by utilizing a relatively moving surface formed in a small gap defined between the rotors and the housing.

Abstract: A positive displacement pump includes a plurality of rotors accommodated in a housing, each of the rotors having a non-circular sectional shape, bearings for supporting rotation of the rotors, a fluid inlet formed in the housing on its suction side and a fluid outlet formed in the housing on its discharge side, motors for independently rotating the plurality of rotors, and detecting devices for detecting a rotating angle and/or a rotation frequency of each of the rotors. While the plurality of rotors are controlled to be synchronously rotated basis on of signals from the detecting devices, a change of a volume of a space defined by the rotors and housing from the suction side to the discharge side is utilized to thereby draw in and discharge a fluid.

Abstract: An evacuating apparatus includes a first pump section disposed on a suction opening side, a second pump section for exhausting a smaller amount of gas than the first pump section, the second pump being disposed in an exhaust opening side, a plurality of rotors accommodated in a housing, bearings for supporting rotation of the rotors, a suction opening for drawing fluid and a first exhaust opening thereof both formed on the housing, and a plurality of motors for driving the rotors. In the apparatus, the first pump section is a pump of positive displacement type formed by utilizing a volume change of a space defined by the rotors and the housing, and the second pump section is a viscous-type pump formed by utilizing a relatively moving surface formed in a small gap defined between the rotors and the housing.

Abstract: A fluid feed apparatus includes a suction hole and a discharge hole for a fluid, a fluid transfer part provided between a rotor and a stationary member containing the rotor, a shaft coupled with the rotor, a rotation actuator for rendering a relative rotating motion between the shaft and the stationary member in a surface perpendicular to an axis of the shaft, a driving power supply for the rotation actuator, a rotating motion control unit for the rotation actuator, a swing actuator for rendering a relative swinging motion between the shaft and the stationary member, a driving power supply for the swing actuator, and a swinging motion control unit for the swing actuator. Synchronous control is performed by the rotating motion control unit and the swinging motion control unit so that the rotating motion and the swinging motion are synthesized to implement a revolving motion.

Abstract: A fluid rotary apparatus includes a casing, a plurality of screw rotors, and a driving device. The casing has a suction hole, a discharging hole, and an inner tapered surface. The rotors have thread grooves and are rotatably supported within the casing to be rotated synchronously in mesh with each other. An outer peripheral surface of each rotor has a flat surface approaching or sliding in contact with the inner tapered surface of the casing. The driving device rotates the rotors. Fluid is drawn through the suction hole, compressed, and discharged through the discharging hole by utilization of a change of a volume of a space defined by the plurality of screw rotors and the casing. A band-like chip seal is provided at the flat surface of each rotor. The chip seal has dynamic pressure notches at it surface to produce dynamic pressure from viscous fluid.

Abstract: A vacuum pump includes a plurality of rotors accommodated in a housing, a plurality of bearings for supporting the shafts of the rotors, respectively, a fluid-suction opening and a fluid-discharge opening formed in the housing, and a motor for driving at least one of the rotors. The pump has a first pump structure section for suction and discharge of gas, the pressure of which is in a viscous flow region, by utilizing change in volume of a space formed by the rotors and the housing. A second pump structure section is provided for transporting gas, a pressure of which is in an intermediate flow region, and gas, the pressure of which is lower than a pressure of the intermediate flow region, by utilizing movement of the space from a suction side to a discharge side of the second pump structure section.

Abstract: A fluid rotating apparatus includes a plurality of rotors accommodated in a housing, at least one of the rotors having its outer diameter different from that of the other of the rotors. Bearings are provided for supporting rotary shafts of the plurality of rotors. A fluid suction port and a fluid discharge port are formed in the housing. A motor is provides for rotating at least one of the plurality of rotors, and a control system for synchronously controlling the plurality of rotors in a contactless manner is provided for each rotary shaft of the plurality of rotors.

Abstract: A vacuum pump includes a positive displacement vacuum pump structure section disposed on a discharge opening side; a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high vacuum; and a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high pumping speed. The construction of the kinetic vacuum pump structure section is different from that of the kinetic vacuum pump structure section so as to differ relative thereto in one of ultimate pressure, pumping speed, and pumping speed of sucked gas with respect to a molecular weight of the sucked gas.

Abstract: A fluid rotary apparatus includes rotors accommodated in a housing, driving shafts on which the rotors are mounted, upper and lower bearings for rotatably supporting upper and lower portions of each of the shafts, fluid suction and fluid-discharging openings formed in the housing, motors adapted for independently and synchronously driving each of the shafts, rotation-detecting devices for detecting the rotational angle and/or the number of rotations of each motor, contact-preventing gears for contacting each other before the rotors contact each other, and a positive displacement pump structure section sucking and discharging fluid by utilizing a closed space formed by the rotors and the housing and controlling the motors in synchronous rotation thereof in response to signals outputted from the device.

Abstract: A synchronous rotating apparatus synchronously rotates a plurality of rotary shafts independently driven by corresponding driving devices. The apparatus includes: a mechanical regulating member, arranged on the shafts, for maintaining relative rotating positions of the shafts at a predetermined angular difference; a rotation velocity and phase-detecting member, arranged on each shaft, for detecting rotation velocities of the shafts and phases within a regulated angular difference of the regulating member, and a driving control device for controlling the driving devices of the shafts so as to synchronously rotate the shafts based on a phase difference detected by the detecting member. The apparatus is applied to a fluid rotary apparatus.

Abstract: A fluid rotating apparatus includes a casing having a gas inhaling inlet and a gas discharge outlet, rotors driven in the casing by a driving mechanism and having fluid-transporting grooves which engage each other in synchronous rotation, and bearing portion for supporting the rotors. A communicating path is formed at one of the rotors and the and the casing for communicating a gas discharge-side inner space and a space defined by an inner surface of the casing and the fluid-transporting groove of an outer surface of each rotor with each other. The gas discharge-side inner space is defined by an end surface of the rotor opposite to a gas inhaling-side surface thereof, and a sealing portion which is formed between the rotor and the casing to prevent fluid from flowing into the gas discharge-side inner space.

Abstract: A first link member (7), an upper-limit link member (9a), and a lower-limit link member (9b) are rotatably and axially coupled together. When the throttle is to be opened, the throttle valve (5) is electrically controlled by the motor (4) which has been under the control of an output from the accelerator opening sensing device (3), and at the same time, the throttle valve (5) is mechanically controlled by the wire (12) through the link members (7, 9a, 9b) in response to the degree of opening of the accelerator. A high degree of throttle operation such as traction control, idling control, constant speed run, etc. can be executed normally, and when an abnormality arises, the fail-safe function is at work to close the throttle valve (5).

Abstract: A fluid rotating apparatus according to the present invention is designed to promptly achieve an extremely high degree of vacuum from atmospheric pressure by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts of the apparatus is controlled by use of a rotary position detecting sensor, to thereby avoid control through mechanical contact thereof with a gear or the like. In addition, hydrostatic bearings are employed for supporting the rotary shaft to avoid mechanical abrasion and the use of lubricant oil.

Abstract: A vacuum pump includes a positive displacement vacuum pump structure section disposed on a discharge opening side; a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high vacuum; and a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high pumping speed. The construction of the kinetic vacuum pump structure section is different from that of the kinetic vacuum pump structure section so as to differ relative thereto in one of ultimate pressure, pumping speed, and pumping speed of sucked gas with respect to a molecular weight of the sucked gas.

Abstract: A fluid rotating apparatus includes non-circular rotors accommodated in a housing, rotary shafts having the rotors, bearings for rotatably supporting the shafts, a fluid suction and a fluid discharge ports formed in the housing, a positive displacement pump section formed of combination of the housing and rotors, and gears connected with the shafts having backlash set smaller than backlash between the rotors.

Abstract: A multi-shaft driving apparatus includes a plurality of motors each for rotating one of a plurality of shafts to be synchronously rotated, an encoder, provided for each motor, for detecting a rotational state of the shafts, a pulse generator for generating a pulse signal for rotating the shafts, and a motor control circuit, provided for each motor, for inputting the pulse signal generated by the pulse generator for rotating the shafts and a pulse signal detected by the encoder and used as a feedback signal. The motor control circuit has a PLL control section and a rotational angle phasing section so that a rotational angle phasing control loop is generated to perform a rotational angle phasing operation by the rotational angle phasing section so to as place the shafts in position at a driving start and after performing the rotational angle phasing operation, a rising and steady control loop is generated to perform an operation from a rise state to a steady state by the PLL control section.

Abstract: A fluid-rotating apparatus comprises a positive displacement pump structure section for rotating the rotary shaft of each of a plurality of rotors synchronously. In controlling the synchronous rotation of the rotary shafts by a PLL control method, a gain-switching means device is provided to set a high gain in a PLL control circuit when the rotary shafts are accelerating or decelerating and setting a low gain therein when the rotary shafts are rotating in a steady state.

Abstract: A fluid rotating apparatus of a positive displacement type pump includes a plurality of rotors accommodated in a housing, a bearing for rotatably supporting the rotors, a suction port and a discharge port formed in the housing, a plurality of motors for individually rotating the rotors, a detector for detecting rotating angles and rotating speeds of the motors, a synchronous controller for controlling rotation of the plurality of motors by a signal from the detector, and a transporting member coaxially provided on one of the rotors and on the upstream side thereof. The transporting member includes a rotary disk rotatable together with the rotor and a fixed disk opposed to the rotary disk fixed to the housing so as to maintain a gap between the rotary disk and the fixed disk. A spiral groove is formed on one of a surface of the rotary disk and an opposing surface of the fixed surface so as to transport one of fluid and gas molecules in a radial direction of the rotor between the rotary disk and the fixed disk.

Abstract: A fluid rotating apparatus includes a casing having gas inhaling inlet and a gas discharge outlet, rotors driven in the casing by a driving mechanism and having fluid-transporting grooves which engage each other in synchronous rotation, and bearing portion for supporting the rotors. A communicating path is formed at one of the rotor and the casing for communicating a gas discharge-side inner space and a space defined by an inner surface of the casing and the fluid-transporting groove of an outer surface of each rotor with each other. The gas discharge-side inner space is defined by an end surface of the rotor opposite to a gas inhaling-side surface thereof, and a sealing portion is formed between the rotor and the casing to prevent fluid from flowing into the gas discharge-side inner space.

Abstract: A fluid rotating apparatus of a positive displacement pump includes a plurality of rotors accommodated in a housing, a bearing for rotatably supporting the rotors, a suction port and a discharge port formed in the housing, a suction chamber and a discharge chamber in the housing respectively communicating with the suction port and the discharge port, a plurality of motors for individually rotating the rotors, and a detecting device for detecting rotating angles and rotating numbers of the motors. In the apparatus, a fluid is sucked and discharged due to capacity change of a space defined by the rotors and the housing through synchronous control of the rotation of the plurality of motors by a signal from the detecting device. The housing has a communicating path with a flow control device to make an upstream side communicate with a downstream side of the apparatus when the rotational numbers of the rotors are less than a predetermined value.