Abstract: A printer includes a spectroscope that includes a wavelength-selective interference filter on which light from a measurement target is incident and a carriage moving unit that moves the spectroscope in an X direction with respect to the measurement target. The wavelength-selective interference filter includes a pair of reflecting films and an electrostatic actuator that changes a gap dimension between the pair of reflecting films. A first spectroscopic measurement process that performs spectroscopic measurement while the gap dimension between the reflecting films is decreasing and a second spectroscopic measurement process that performs spectroscopic measurement while the gap dimension is increasing are alternately performed during the movement of the spectroscope by the carriage moving unit in the X direction.

Abstract: A wavelength variable interference filter includes a fixed substrate, a movable substrate that faces the fixed substrate, a pair of reflective films, a fixed extraction electrode provided on the fixed substrate, and a movable connection electrode that is provided on the movable substrate and is in contact with the fixed extraction electrode at a connection position, in which the movable substrate includes a first groove that is provided at the connection position in a plan view in which the fixed substrate and the movable substrate are viewed from a substrate thickness direction, and a second groove that has a larger area than an area of the first groove in the plan view and is connected to the first groove.

Abstract: A spectroscopic camera is provided with a wavelength variable interference filter including a pair of reflection films and an electrostatic actuator for changing a size of a gap between the reflection films; an imaging unit including a plurality of imaging pixels; and a filter control unit for controlling the electrostatic actuator based on light-received wavelength data in which a control amount for receiving light of a target wavelength is recorded with respect to each of the imaging pixels of the imaging unit. An acquisition order of the target wavelength emitted from the wavelength variable interference filter is set for each of the imaging pixels, and the acquisition order is set in a descending order of the driving amount of a gap, and thus a value for emitting the light of the target wavelength in the set acquisition order is recorded as the light-received wavelength data.

Abstract: A variable wavelength interference filter includes a stationary substrate including a stationary reflecting film and a stationary electrode, and a movable substrate including a movable reflecting film and a movable electrode, the stationary electrode and the movable electrode are disposed outside an optical interference region where the stationary reflecting film and the movable reflecting film overlap each other in a filter plan view, an inner peripheral edge of the stationary electrode is located nearer to the optical interference region than an outer peripheral edge of the movable electrode, and an outer peripheral edge of the stationary electrode is located further from the optical interference region than an outer peripheral edge of the movable electrode.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

Abstract: An etalon includes a fixed mirror disposed on a first substrate, a movable mirror disposed on a second substrate to face the fixed mirror with a gap interposed therebetween, a first electrode disposed on the surface of the first substrate facing the second substrate, a second electrode disposed on a first surface of the second substrate facing the first substrate and separated from the first electrode, and a warp preventing film disposed on a second surface of the second substrate so as to cover at least the movable mirror in a plan view. The direction of an internal stress acting in the in-plane direction of the warp preventing film is parallel to the direction of an internal stress acting in the in-plane direction of the movable mirror and the second electrode.

Abstract: A spectroscopic measurement apparatus includes an actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, and a voltage control section including a feedback loop that controls the drive voltage depending on a detection result of the gap detector. The voltage control section includes a comparator that outputs a voltage signal at a High level VH if an absolute value of a deviation between a drive amount of the actuator and a setting value of the drive amount exceeds a predetermined threshold based on the detection result after a predetermined time elapses from the start of driving of the actuator.

Abstract: A printer includes a spectroscope that includes a wavelength-selective interference filter on which light from a measurement target is incident and a carriage moving unit that moves the spectroscope in an X direction with respect to the measurement target. The wavelength-selective interference filter includes a pair of reflecting films and an electrostatic actuator that changes a gap dimension between the pair of reflecting films. A first spectroscopic measurement process that performs spectroscopic measurement while the gap dimension between the reflecting films is decreasing and a second spectroscopic measurement process that performs spectroscopic measurement while the gap dimension is increasing are alternately performed during the movement of the spectroscope by the carriage moving unit in the X direction.

Abstract: A printing apparatus includes: a discharging unit configured to discharge liquid onto a medium: a color measuring unit configured to measure a color of the medium on which the liquid has been discharged; a carriage on which the discharging unit and the color measuring unit are mounted; and a relative transporting unit configured to transport the medium and the carriage with respect to each other. The color measuring unit includes a variable wavelength interference filter configured to change a gap between reflecting films on substrates that face each other with the gap therebetween and shock-absorbing members are provided between the carriage and the color measuring unit.

Abstract: A wavelength tunable interference filter, an optical filter device, an optical module, and an electronic apparatus include a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, and an electrostatic actuator that changes the size of the inter-reflective film gap. The movable substrate is curved in a convex shape in a direction away from the fixed substrate in an initial state. The reflective film has reflectance characteristics in which the first reflectance at a predetermined first wavelength in a measurement wavelength range is lower than the second reflectance at a second wavelength longer than the first wavelength.

Abstract: A printing apparatus includes: a discharging unit configured to discharge liquid onto a medium: a color measuring unit configured to measure a color of the medium on which the liquid has been discharged; a carriage on which the discharging unit and the color measuring unit are mounted; and a relative transporting unit configured to transport the medium and the carriage with respect to each other. The color measuring unit includes a variable wavelength interference filter configured to change a gap between reflecting films on substrates that face each other with the gap therebetween and shock-absorbing members are provided between the carriage and the color measuring unit.

Abstract: A spectroscopic measurement device includes a variable wavelength interference filter provided with a first reflecting film, a second reflecting film, and an electrostatic actuator for changing a gap amount of a gap between the first reflecting film and the second reflecting film, a detection section adapted to detect the light intensity of the light taken out by the variable wavelength interference filter, a voltage setting section and a voltage control section for applying an analog voltage varying continuously to the electrostatic actuator, a voltage monitoring section for monitoring the voltage applied to the electrostatic actuator, a storage section for storing V-? data, and a light intensity acquisition section for obtaining the light intensity detected by the detection section at a timing at which the light transmitted through the variable wavelength interference filter has the measurement target wavelength based on the voltage monitored by the voltage monitoring section.

Abstract: A spectroscopic camera is provided with a wavelength variable interference filter including a pair of reflection films and an electrostatic actuator for changing a size of a gap between the reflection films; an imaging unit including a plurality of imaging pixels; and a filter control unit for controlling the electrostatic actuator based on light-received wavelength data in which a control amount for receiving light of a target wavelength is recorded with respect to each of the imaging pixels of the imaging unit. An acquisition order of the target wavelength emitted from the wavelength variable interference filter is set for each of the imaging pixels, and the acquisition order is set in a descending order of the driving amount of a gap, and thus a value for emitting the light of the target wavelength in the set acquisition order is recorded as the light-received wavelength data.

Abstract: A spectroscopic measurement apparatus includes an actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, and a voltage control section including a feedback loop that controls the drive voltage depending on a detection result of the gap detector. The voltage control section includes a comparator that outputs a voltage signal at a High level VH if an absolute value of a deviation between a drive amount of the actuator and a setting value of the drive amount exceeds a predetermined threshold based on the detection result after a predetermined time elapses from the start of driving of the actuator.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

Abstract: A wavelength variable interference filter includes a fixed substrate, a movable substrate that faces the fixed substrate, a pair of reflective films, a fixed extraction electrode provided on the fixed substrate, and a movable connection electrode that is provided on the movable substrate and is in contact with the fixed extraction electrode at a connection position, in which the movable substrate includes a first groove that is provided at the connection position in a plan view in which the fixed substrate and the movable substrate are viewed from a substrate thickness direction, and a second groove that has a larger area than an area of the first groove in the plan view and is connected to the first groove.

Abstract: A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

Abstract: A spectrophotometer includes a fixed substrate having a fixed reflecting film, a movable substrate having a movable reflecting film, a tunable interference filter having a static actuator changing the gap distance of an inter-reflecting film gap between the fixed reflecting film and the movable reflecting film, a detecting section detecting the light intensity of a light extracted by the tunable interference filter, a voltage setting section and a voltage controlling section that apply a continuously-varying analog voltage to the static actuator, a voltage monitoring section monitoring the voltage applied to the static actuator, and a light intensity obtaining section obtaining the light intensity detected by the detecting section when the voltage monitored by the voltage monitoring section becomes a predetermined voltage to be measured.

Abstract: An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided on a surface of the first substrate facing the second substrate, a second optical film provided on the second substrate and opposed to the first optical film via a gap, a first electrode provided on the surface of the first substrate facing the second substrate, and a second electrode provided on the second substrate and opposed to the first electrode, wherein a first charged body film with charge is formed on top of the first optical film, a second charged body film with charge is formed on top of the second optical film, and the first charged body film and the second charged body film are charged with the same polarity and opposed.

Abstract: A coloration measuring apparatus includes a wavelength variable interference filter, an imaging unit which receives light which transmits the wavelength variable interference filter, a storage unit which stores types of test paper, and reference color data obtained by associating colors showing a coloration state of the test paper, a spectrometry unit which measures a spectral spectrum of the test paper from light received by the imaging unit when the wavelength of the light which transmits the wavelength variable interference filter is sequentially switched, and a quantitative analysis unit which performs quantitative measurement of a sample based on the spectral spectrum measured by the spectrometry unit and the reference color data.