Patents by Inventor Tetsuro Obayashi

Tetsuro Obayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Molecular pump
    Patent number: 9964112
    Abstract: A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.
    Type: Grant
    Filed: August 27, 2013
    Date of Patent: May 8, 2018
    Assignee: Osaka Vacuum, Ltd.
    Inventors: Yukio Yamato, Tetsuro Obayashi
  • MOLECULAR PUMP
    Publication number: 20150184665
    Abstract: A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.
    Type: Application
    Filed: August 27, 2013
    Publication date: July 2, 2015
    Applicant: Osaka Vacuum, Ltd.
    Inventors: Yukio Yamato, Tetsuro Obayashi