Abstract: A sputtering apparatus includes a first target holder configured to hold a first target such that a first surface of the first target faces the processing space, and a second target holder configured to hold a second target such that a second surface of the second target faces the processing space, wherein the first target holder holds the first target such that an orthogonal projection vector of a first normal vector, which is a normal vector of the first surface, with respect to a virtual plane including the substrate holding surface is directed to a direction away from the substrate, and the second target holder holds the second target such that an orthogonal projection vector of a second normal vector, which is a normal vector of the second surface, with respect to the virtual plane is directed to a direction away from the substrate.

Abstract: A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.

Abstract: The present invention relates to carbon nanotubes that are excellent in dispersibility and a process for producing the carbon nanotubes. The carbon nanotubes according to the present invention each comprise a wall that comprises a parallel portion and a narrowed portion having a tube outer diameter that is not more than 90% of a tube outer diameter of the parallel portion. Thus, the carbon nanotubes are readily dispersible owing to a high abundance ratio of easily-breaking portions.

Abstract: The present invention relates to carbon nanotubes that are excellent in dispersibility and a process for producing the carbon nanotubes. The carbon nanotubes according to the present invention each comprise a wall that comprises a parallel portion and a narrowed portion having a tube outer diameter that is not more than 90% of a tube outer diameter of the parallel portion. Thus, the carbon nanotubes are readily dispersible owing to a high abundance ratio of easily-breaking portions.

Abstract: The invention relates to a method for removing ammoniacal components of a flue gas that has been treated according to the SNCR method, wherein the method is characterized in that the flue gas is contacted at a temperature, that is at least 150° C. below that at which the SNCR method is carried out, with a ferro-oxidic catalyst having a specific surface area of at least 0.2 m2/g, measured according to the BET method. Preferably, the catalyst is added to the flue gas at a temperature of 700-400° C. of the gas in the flue channel.

Abstract: The disclosure described a material having a damping property, comprising 100 parts by weight of a binder resin composed of 85 to 99% by weight of at least one base resin selected from the group consisting of polypropylenes, polystyrenes, acrylonitrile-butadiene-styrene copolymers, polycarbonates, polyphenylene ethers and modified polyphenylene ethers and 1 to 15% by weight of styrene-isoprene-styrene block copolymer, and 1 to 20 parts by weight of iron compound particles.

Abstract: The disclosure described a material having a damping property, comprising 100 parts by weight of a binder resin composed of 85 to 99% by weight of at least one base resin selected from the group consisting of polypropylenes, polystyrenes, acrylonitrile-butadiene-styrene copolymers, polycarbonates, polyphenylene ethers and modified polyphenylene ethers and 1 to 15% by weight of styrene-isoprene-styrene block copolymer, and 1 to 20 parts by weight of iron compound particles.

Abstract: The present invention is a self-fusion type damping material formed from hard ferrite powder as a filler with a binder, in which the binder comprises an ethylene-vinyl acetate copolymer and a petroleum resin and 100 parts by weight of the combined binder and 150 to 600 parts by weight of the filler are mixed, or a self-fusion type damping material formed from hard ferrite powder and an auxiliary filler as a filler, if necessary, with a binder, in which the binder comprises an ethylene-vinyl acetate copolymer and a petroleum resin and 100 parts by weight of the combined binder and 100 to 600 parts by weight of said combined filler, in which the amount of said hard ferrite powder is in the range of 50 to 400 parts by weight and that of said auxiliary filler is in the range of 1 to 200 parts by weight, are mixed.

Abstract: Disclosed herein is a damping material comprising:(a) a binder composed of 100 parts by weight of an ethylene-vinyl acetate copolymer containing 30 to 65 wt % of vinyl acetate, and 160 to 330 parts by weight of a petroleum resin containing an aromatic petroleum resin as the main ingredient; and(b) 30 to 180 parts by weight of a filler composed of a scaly powder.

Abstract: Disclosed herein is a vehicle damping sheet comprising a blend-mixture comprising a filler composed of mica, iron oxide particles and a auxiliary filler, and a binder,each of the amounts of the mica, the iron oxide particles and the auxiliary filler being not less than 5 parts by weight based on 100 parts by weight of the binder, the total amount of the mica, the iron oxide particles and the auxiliary filler being not less than 30 parts by weight based on 100 parts by weight of the binder, and the content of the iron oxide particles in the blend-mixture being from 2 to 40% by weight.

Abstract: Disclosed herein is a method for bonding a resin part, which comprises disposing a magnetic complex composed of a resin and magnetic particles as a heating-medium at the resin parts to be bonded, and applying an alternating magnetic field to the heating-medium by using a magnetic field generating means composed of an electromagnetic core and an exciting coil, thereby making said heating-medium generate heat for fuse-bonding said resins.

Abstract: Disclosed herein are magnetic particles used for an electrostatic latent image developer comprising composite particles containing from more than 80% by weight to not more than 99% by weight of fine ferromagnetic particles and a cured phenol resin, and having a number-average particle diameter of from not less than 1 .mu.m to less than 10 .mu.m and an apparent density of not greater than 1.5 g/cm.sup.3.

Abstract: Disclosed herein are composite carrier particles for electrophotography comprising 80 to 99% by weight of ferromagnetic fine particles and a phenol resin, and having a number-average particle diameter of 10 to 1,000 .mu.m, a bulk density of not more than 2.0 g /cm.sup.3, and a curved surface configuration, and a process for producing the same.