Patents by Inventor Theodore Antonellis
Theodore Antonellis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10541140Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.Type: GrantFiled: January 26, 2012Date of Patent: January 21, 2020Assignee: MACDERMID ENTHONE INC.Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, Jr., Cai Wang, Xuan Lin, Theodore Antonellis
-
Patent number: 10103029Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.Type: GrantFiled: May 6, 2016Date of Patent: October 16, 2018Assignee: MacDermid Enthone Inc.Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, Cai Wang, Sean Xuan Lin, Theodore Antonellis
-
Patent number: 10017863Abstract: A method and composition for enhancing corrosion resistance, wear resistance, and contact resistance of a substrate comprising a copper or copper alloy surface. The composition comprises a phosphorus oxide compound selected from the group consisting of a phosphonic acid, a phosphonate salt, a phosphonate ester, a phosphoric acid, a phosphate salt, a phosphate ester, and mixtures thereof; a nitrogen-containing organic compound selected from the group consisting of primary amine, secondary amine, tertiary amine, and aromatic heterocycle comprising nitrogen; and an alcohol.Type: GrantFiled: June 21, 2007Date of Patent: July 10, 2018Inventors: Joseph A. Abys, Shenliang Sun, Edward J. Kudrak, Katrin Zschintzsch, Theodore Antonellis
-
Publication number: 20160254156Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.Type: ApplicationFiled: May 6, 2016Publication date: September 1, 2016Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, Cai Wang, Xuan Lin, Theodore Antonellis
-
Publication number: 20160234947Abstract: Compositions and methods for enhancing adhesion between a copper conducting layer and a dielectric material during manufacture of a printed circuit board. Conditioning compositions contain a functional organic compound and preferably a transition metal ion. The functional organic compound, e.g., a purine derivative, is capable of forming a self-assembled monolayer. Adhesion promoting compositions contain an acid, preferably an inorganic acid, and an oxidant. The latter compositions may also contain a corrosion inhibitor and/or a transition metal ion selected from among Zn, Ni, Co, Cu, Ag, Au, Pd or another Pt group metal. The corrosion inhibitor may comprise a nitrogen-containing aromatic heterocyclic compound.Type: ApplicationFiled: April 21, 2016Publication date: August 11, 2016Inventors: Abayomi I. Owei, Joseph A. Abys, Theodore Antonellis, Eric Walch
-
Patent number: 9338896Abstract: Compositions and methods for enhancing adhesion between a copper conducting layer and a dielectric material during manufacture of a printed circuit board. Conditioning compositions contain a functional organic compound and preferably a transition metal ion. The functional organic compound, e.g., a purine derivative, is capable of forming a self-assembled monolayer. Adhesion promoting compositions contain an acid, preferably an inorganic acid, and an oxidant. The latter compositions may also contain a corrosion inhibitor and/or a transition metal ion selected from among Zn, Ni, Co, Cu, Ag, Au, Pd or another Pt group metal. The corrosion inhibitor may comprise a nitrogen-containing aromatic heterocyclic compound.Type: GrantFiled: July 25, 2012Date of Patent: May 10, 2016Assignee: ENTHONE, INC.Inventors: Abayomi I. Owei, Joseph A. Abys, Theodore Antonellis, Eric Walch
-
Publication number: 20140120722Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.Type: ApplicationFiled: January 26, 2012Publication date: May 1, 2014Applicant: ENTHONE INC.Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, JR., Cai Wang, Xuan Lin, Theodore Antonellis
-
Patent number: 8703243Abstract: A method is disclosed for enhancing the corrosion resistance of a surface of a copper or copper alloy substrate. The method comprises depositing a metallic surface layer comprising a precious metal on a surface of the copper or copper alloy substrate by immersion displacement plating and exposing the electronic device to an aqueous composition comprising a first organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces and a second organic molecule comprising at least one functional group that interacts with and protects copper surfaces.Type: GrantFiled: July 5, 2011Date of Patent: April 22, 2014Assignee: Enthone Inc.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20140030425Abstract: Compositions and methods for enhancing adhesion between a copper conducting layer and a dielectric material during manufacture of a printed circuit board. Conditioning compositions contain a functional organic compound and preferably a transition metal ion. The functional organic compound, e.g., a purine derivative, is capable of forming a self-assembled monolayer. Adhesion promoting compositions contain an acid, preferably an inorganic acid, and an oxidant. The latter compositions may also contain a corrosion inhibitor and/or a transition metal ion selected from among Zn, Ni, Co, Cu, Ag, Au, Pd or another Pt group metal. The corrosion inhibitor may comprise a nitrogen-containing aromatic heterocyclic compound.Type: ApplicationFiled: July 25, 2012Publication date: January 30, 2014Applicant: ENTHONE INC.Inventors: Abayomi I. OWEI, Joseph A. ABYS, Theodore ANTONELLIS, Eric WALCH
-
Patent number: 8323741Abstract: A composition for enhancing the corrosion resistance of an article comprising a silver coating deposited on a solderable copper substrate. The composition comprises: a) a multi-functional molecule comprising at least one organic functional group that interacts with and protects copper surfaces and at least one organic functional group that interacts with and protects silver surfaces; b) an alcohol; and c) a surfactant.Type: GrantFiled: July 10, 2012Date of Patent: December 4, 2012Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20120276409Abstract: A method for enhancing the corrosion resistance of an article comprising a silver coating deposited on a solderable copper substrate is provided. The method comprises exposing the copper substrate having the immersion-plated silver coating thereon to an anti-corrosion composition comprising: a) a multi-functional molecule comprising at least one organic functional group that interacts with and protects copper surfaces and at least one organic functional group that interacts with and protects silver surfaces; b) an alcohol; and c) a surfactant.Type: ApplicationFiled: July 10, 2012Publication date: November 1, 2012Applicant: ENTHONE INC.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20120175022Abstract: A method is disclosed for enhancing the corrosion resistance of a surface of a copper or copper alloy substrate. The method comprises depositing a metallic surface layer comprising a precious metal on a surface of the copper or copper alloy substrate by immersion displacement plating and exposing the electronic device to an aqueous composition comprising a first organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces and a second organic molecule comprising at least one functional group that interacts with and protects copper surfaces.Type: ApplicationFiled: July 5, 2011Publication date: July 12, 2012Applicant: ENTHONE INC.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Patent number: 8216645Abstract: A method for enhancing the corrosion resistance of an article comprising a silver coating deposited on a solderable copper substrate is provided. The method comprises exposing the copper substrate having the immersion-plated silver coating thereon to an anti-corrosion composition comprising: a) a multi-functional molecule comprising at least one organic functional group that interacts with and protects copper surfaces and at least one organic functional group that interacts with and protects silver surfaces; b) an alcohol; and c) a surfactant.Type: GrantFiled: November 10, 2008Date of Patent: July 10, 2012Assignee: Enthone Inc.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20120168075Abstract: An adhesion promotion composition and method for enhancing adhesion between a copper conducting layer and a dielectric material during manufacture of a printed circuit board. The adhesion promotion composition comprises a multi-functional compound comprising a first functional group and a second functional group, wherein the first functional group is an aromatic heterocyclic compound comprising nitrogen and the second functional group is selected from the group consisting of vinyl ether, amide, thiamide, amine, carboxylic acid, ester, alcohol, silane, alkoxy silane, and combinations thereof.Type: ApplicationFiled: March 23, 2009Publication date: July 5, 2012Applicant: ENTHONE INC.Inventors: Joseph A. Abys, Theodore Antonellis, Shenliang Sun, Abayomi I. Owei, Eric Walch, Jean Rasmussen, Hanna Rasmussen
-
Patent number: 7972655Abstract: A method is disclosed for enhancing the corrosion resistance of a surface of a copper or copper alloy substrate. The method comprises depositing a metallic surface layer comprising a precious metal on a surface of the copper or copper alloy substrate by immersion displacement plating and exposing the electronic device to an aqueous composition comprising a first organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces and a second organic molecule comprising at least one functional group that interacts with and protects copper surfaces.Type: GrantFiled: November 21, 2007Date of Patent: July 5, 2011Assignee: Enthone Inc.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20100319572Abstract: A method and composition for enhancing corrosion resistance, wear resistance, and contact resistance of a substrate comprising a copper or copper alloy surface. The composition comprises a phosphorus oxide compound selected from the group consisting of a phosphonic acid, a phosphonate salt, a phosphonate ester, a phosphoric acid, a phosphate salt, a phosphate ester, and mixtures thereof; a nitrogen-containing organic compound selected from the group consisting of primary amine, secondary amine, tertiary amine, and aromatic heterocycle comprising nitrogen; and an alcohol.Type: ApplicationFiled: June 18, 2008Publication date: December 23, 2010Applicant: ENTHONE INC.Inventors: Joseph A. Abys, Shenliang Sun, Edward J. Kudrak, JR., Katrin Zschintzsch, Theodore Antonellis
-
Publication number: 20100291303Abstract: A method is disclosed for enhancing the corrosion resistance of a surface of a copper or copper alloy substrate. The method comprises depositing a metallic surface layer comprising a precious metal on a surface of the copper or copper alloy substrate by immersion displacement plating and exposing the electronic device to an aqueous composition comprising a first organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces and a second organic molecule comprising at least one functional group that interacts with and protects copper surfaces.Type: ApplicationFiled: November 21, 2007Publication date: November 18, 2010Applicant: Enthone Inc.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20090121192Abstract: A method for enhancing the corrosion resistance of an article comprising a silver coating deposited on a solderable copper substrate is provided. The method comprises exposing the copper substrate having the immersion-plated silver coating thereon to an anti-corrosion composition comprising: a) a multi-functional molecule comprising at least one organic functional group that interacts with and protects copper surfaces and at least one organic functional group that interacts with and protects silver surfaces; b) an alcohol; and c) a surfactant.Type: ApplicationFiled: November 10, 2008Publication date: May 14, 2009Applicant: ENTHONE INC.Inventors: Joseph A. Abys, Shenliang Sun, Theodore Antonellis
-
Publication number: 20080314283Abstract: A method and composition for enhancing corrosion resistance, wear resistance, and contact resistance of a substrate comprising a copper or copper alloy surface. The composition comprises a phosphorus oxide compound selected from the group consisting of a phosphonic acid, a phosphonate salt, a phosphonate ester, a phosphoric acid, a phosphate salt, a phosphate ester, and mixtures thereof; a nitrogen-containing organic compound selected from the group consisting of primary amine, secondary amine, tertiary amine, and aromatic heterocycle comprising nitrogen; and an alcohol.Type: ApplicationFiled: June 21, 2007Publication date: December 25, 2008Applicant: ENTHONE INC.Inventors: Joseph A. Abys, Shenliang Sun, Edward J. Kudrak, Katrin Zschintzsch, Theodore Antonellis