Patents by Inventor Thomas B. Richardson

Thomas B. Richardson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240110306
    Abstract: A copper electroplating solution comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electroplating solution is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxyl may comprise a reaction product between 2,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol.
    Type: Application
    Filed: December 11, 2023
    Publication date: April 4, 2024
    Inventors: Kyle M. Whitten, Stephan I. Braye, Jianwen Han, Pingping Ye, Thomas B. Richardson, Elie H. Najjar
  • Patent number: 11873568
    Abstract: A copper electroplating solution comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electroplating solution is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxyl may comprise a reaction product between 2,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol.
    Type: Grant
    Filed: June 7, 2022
    Date of Patent: January 16, 2024
    Assignee: MacDermid Enthone Inc.
    Inventors: Kyle M. Whitten, Stephan I. Braye, Jianwen Han, Pingping Ye, Thomas B. Richardson, Elie H. Najjar
  • Publication number: 20220298665
    Abstract: A copper electroplating solution comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electroplating solution is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxyl may comprise a reaction product between 2,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol.
    Type: Application
    Filed: June 7, 2022
    Publication date: September 22, 2022
    Inventors: Kyle M. Whitten, Stephan I. Braye, Jianwen Han, Pingping Ye, Thomas B. Richardson, Elie H. Najjar
  • Patent number: 11384446
    Abstract: A copper electroplating solution comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electroplating solution is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxyl may comprise a reaction product between 2,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: July 12, 2022
    Assignee: MacDermid Enthone Inc.
    Inventors: Kyle M. Whitten, Stephan I. Braye, Jianwen Han, Pingping Ye, Thomas B. Richardson, Elie H. Najjar
  • Publication number: 20220064812
    Abstract: A copper electroplating solution comprising a copper salt, a source of halide ions, and a linear or branched polyhydroxyl. The copper electroplating solution is used to deposit copper having a high density of nanotwinned columnar copper grains on a substrate. The linear or branched polyhydroxyl may comprise a reaction product between 2,3-epoxy-1-propanol and aminic alcohol or ammonium alcohol.
    Type: Application
    Filed: August 28, 2020
    Publication date: March 3, 2022
    Inventors: Kyle M. Whitten, Stephan I. Braye, Jianwen Han, Pingping Ye, Thomas B. Richardson, Elie H. Najjar
  • Patent number: 11168406
    Abstract: An aqueous electrolytic composition and a process for electrodeposition of copper on a dielectric or semiconductor base structure using the aqueous electrolytic composition. The process includes (i) contacting a metalizing substrate comprising a seminal conductive layer on the base structure with an aqueous electrolytic deposition composition; and (ii) supplying electrical current to the electrolytic deposition composition to deposit copper on the substrate.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: November 9, 2021
    Assignee: MacDermid Enthone Inc.
    Inventors: Vincent Paneccasio, Kyle Whitten, Thomas B. Richardson, Ivan Li
  • Publication number: 20210310141
    Abstract: An aqueous electrolytic composition and a process for electrodeposition of copper on a dielectric or semiconductor base structure using the aqueous electrolytic compostion. The process includes (i) contacting a metalizing substrate comprising a seminal conductive layer on the base structure with an aqueous electrolytic deposition composition; and (ii) supplying electrical current to the electrolytic deposition composition to deposit copper on the substrate.
    Type: Application
    Filed: June 15, 2021
    Publication date: October 7, 2021
    Inventors: Vincent Paneccasio, JR., Kyle Whitten, Thomas B. Richardson, Ivan Li
  • Publication number: 20200063280
    Abstract: An aqueous electrolytic composition and a process for electrodeposition of copper on a dielectric or semiconductor base structure using the aqueous electrolytic composition. The process includes (i) contacting a metalizing substrate comprising a seminal conductive layer on the base structure with an aqueous electrolytic deposition composition; and (ii) supplying electrical current to the electrolytic deposition composition to deposit copper on the substrate.
    Type: Application
    Filed: November 4, 2019
    Publication date: February 27, 2020
    Inventors: Vincent Paneccasio, Kyle Whitten, Thomas B. Richardson, Ivan Li
  • Patent number: 10541140
    Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.
    Type: Grant
    Filed: January 26, 2012
    Date of Patent: January 21, 2020
    Assignee: MACDERMID ENTHONE INC.
    Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, Jr., Cai Wang, Xuan Lin, Theodore Antonellis
  • Patent number: 10519557
    Abstract: An aqueous electrolytic composition and a process for electrodeposition of copper on a dielectric or semiconductor base structure using the aqueous electrolytic composition. The process includes (i) contacting a metalizing substrate comprising a seminal conductive layer on the base structure with an aqueous electrolytic deposition composition; and (ii) supplying electrical current to the electrolytic deposition composition to deposit copper on the substrate.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: December 31, 2019
    Assignee: MacDermid Enthone Inc.
    Inventors: Vincent Paneccasio, Jr., Kyle Whitten, Thomas B. Richardson, Ivan Li
  • Patent number: 10221496
    Abstract: A method for metallizing a through silicon via feature in a semiconductor integrated circuit device substrate. The method comprises immersing the semiconductor integrated circuit device substrate into an electrolytic copper deposition composition, wherein the through silicon via feature has an entry dimension between 1 micrometers and 100 micrometers, a depth dimension between 20 micrometers and 750 micrometers, and an aspect ratio greater than about 2:1; and supplying electrical current to the electrolytic deposition composition to deposit copper metal onto the bottom and sidewall for bottom-up filling to thereby yield a copper filled via feature.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: March 5, 2019
    Assignee: MacDermid Enthone Inc.
    Inventors: Thomas B. Richardson, Wenbo Shao, Xuan Lin, Cai Wang, Vincent Paneccasio, Jr., Joseph A. Abys, Yun Zhang, Richard Hurtubise, Chen Wang
  • Publication number: 20190003068
    Abstract: A method for metallizing a through silicon via feature in a semiconductor integrated circuit device substrate. The method comprises immersing the semiconductor integrated circuit device substrate into an electrolytic copper deposition composition, wherein the through silicon via feature has an entry dimension between 1 micrometers and 100 micrometers, a depth dimension between 20 micrometers and 750 micrometers, and an aspect ratio greater than about 2:1; and supplying electrical current to the electrolytic deposition composition to deposit copper metal onto the bottom and sidewall for bottom-up filling to thereby yield a copper filled via feature.
    Type: Application
    Filed: May 24, 2011
    Publication date: January 3, 2019
    Applicant: ENTHONE INC.
    Inventors: Thomas B. Richardson, Wenbo Shao, Xuan Lin, Cai Wang, Vincent Paneccasio, JR., Joseph A. Abys, Yun Zhang, Richard Hurtubise, Chen Wang
  • Patent number: 10103029
    Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.
    Type: Grant
    Filed: May 6, 2016
    Date of Patent: October 16, 2018
    Assignee: MacDermid Enthone Inc.
    Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, Cai Wang, Sean Xuan Lin, Theodore Antonellis
  • Publication number: 20170233883
    Abstract: An aqueous electrolytic composition and a process for electrodeposition of copper on a dielectric or semiconductor base structure using the aqueous electrolytic composition. The process includes (i) contacting a metalizing substrate comprising a seminal conductive layer on the base structure with an aqueous electrolytic deposition composition; and (ii) supplying electrical current to the electrolytic deposition composition to deposit copper on the substrate.
    Type: Application
    Filed: January 23, 2017
    Publication date: August 17, 2017
    Inventors: Vincent Paneccasio, JR., Kyle Whitten, Thomas B. Richardson, Ivan Li
  • Patent number: 9730321
    Abstract: Compositions and methods for silver plating onto metal surfaces such as PWBs in electronics manufacture to produce a silver plating which is greater than 80 atomic % silver, tarnish resistant, and has good solderability.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: August 8, 2017
    Inventors: Yung-Herng Yau, Thomas B. Richardson, Joseph A. Abys, Karl F. Wengenroth, Anthony Fiore, Chen Xu, Chonglun Fan, John Fudala
  • Patent number: 9657402
    Abstract: The invention relates to a cyanide-free electrolyte composition for depositing a silver or silver alloy layer on a substrate as well as a method for depositing silver or silver alloy layers with a cyanide-free electrolyte composition. The electrolyte composition according to the invention comprises at least one silver ion source, a sulfonic acid and/or a sulfonic acid derivative, a wetting agent and a hydantoin. The silver or silver alloy layers deposited from the inventive electrolyte composition by the method according to the invention are dull and ductile.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: May 23, 2017
    Inventors: Stefan Schäfer, Thomas B. Richardson
  • Publication number: 20160254156
    Abstract: A process for metalizing a through silicon via feature in a semiconductor integrated circuit device, the process including, during the filling cycle, reversing the polarity of circuit for an interval to generate an anodic potential at said metalizing substrate and desorb leveler from the copper surface within the via, followed by resuming copper deposition by re-establishing the surface of the copper within the via as the cathode in the circuit, thereby yielding a copper filled via feature.
    Type: Application
    Filed: May 6, 2016
    Publication date: September 1, 2016
    Inventors: Thomas B. Richardson, Joseph A. Abys, Wenbo Shao, Chen Wang, Vincent Paneccasio, Cai Wang, Xuan Lin, Theodore Antonellis
  • Publication number: 20160122890
    Abstract: The invention relates to a cyanide-free electrolyte composition for depositing a silver or silver alloy layer on a substrate as well as a method for depositing such layers with the help of said cyanide-free electrolyte composition. The electrolyte composition according to the invention comprises at least one silver ion source, a sulfonic acid and/or a sulfonic acid derivative, a wetting agent and a hydantoin. The silver or silver alloy layers deposited from such an electrolyte composition by means of the method according to the invention are dull and ductile.
    Type: Application
    Filed: December 8, 2015
    Publication date: May 5, 2016
    Applicant: ENTHONE INC.
    Inventors: Stefan Schäfer, Thomas B. Richardson
  • Patent number: 9212427
    Abstract: The invention relates to a cyanide-free electrolyte composition for depositing a silver or silver alloy layer on a substrate as well as a method for depositing such layers with the help of said cyanide-free electrolyte composition. The electrolyte composition according to the invention comprises at least one silver ion source, a sulfonic acid and/or a sulfonic acid derivative, a wetting agent and a hydantoin. The silver or silver alloy layers deposited from such an electrolyte composition by means of the method according to the invention are dull and ductile.
    Type: Grant
    Filed: October 9, 2007
    Date of Patent: December 15, 2015
    Assignee: Enthone Inc.
    Inventors: Stefan Schäfer, Thomas B. Richardson
  • Publication number: 20150257264
    Abstract: Compositions and methods for silver plating onto metal surfaces such as PWBs in electronics manufacture to produce a silver plating which is greater than 80 atomic % silver, tarnish resistant, and has good solderability.
    Type: Application
    Filed: March 24, 2015
    Publication date: September 10, 2015
    Applicant: Enthone Inc.
    Inventors: Yung-Herng Yau, Thomas B. Richardson, Joseph A. Abys, Karl F. Wengenroth, Anthony Fiore, Chen Xu, Chonglun Fan, John Fudala