Abstract: Strategic placement and patterning of electrodes, vias, and metal runners can significantly reduce strain in a power semiconductor die. By modifying the path defining electrodes, vias, and metal runners, as well as patterning the material layers thereof, strain can be better managed to increase reliability of a power semiconductor die.

Abstract: Strategic placement and patterning of electrodes, vias, and metal runners can significantly reduce strain in a power semiconductor die. By modifying the path defining electrodes, vias, and metal runners, as well as patterning the material layers thereof, strain can be better managed to increase reliability of a power semiconductor die.

Abstract: A power transistor device includes a drift layer having a first conductivity type and a mesa on the drift layer. The mesa includes a channel region on the drift layer, a source layer on the channel region and a gate region in the mesa adjacent the channel region. The channel region and the source layer have the first conductivity type, and the gate region has a second conductivity type opposite the first conductivity type. The channel region includes a deep conduction region and a shallow conduction region between the deep conduction region and the gate region. The deep conduction region has a first doping concentration, and the shallow conduction region has a second doping concentration that is greater than the first doping concentration.

Abstract: A power semiconductor device comprises a semiconductor layer structure comprising a drift region that comprises a wide band-gap semiconductor material and has a first conductivity type, a first gate structure and an adjacent second gate structure in an upper portion of the semiconductor layer structure, a deep shielding region in the drift region, and a connection region protruding upwardly from the deep shielding region and separating the first gate structure and the second gate structure from each other. The deep shielding region extends from underneath the first gate structure to underneath the second gate structure, and the deep shielding region has a second conductivity type that is different from the first conductivity type.

Abstract: Power semiconductor devices include a semiconductor layer structure comprising an active area with a plurality of unit cell transistors and an inactive gate pad area, a gate resistor layer on an upper side of the semiconductor layer structure, an inner contact that is directly on the upper side of the gate resistor layer, and an outer contact that is directly on the upper side of the gate resistor layer. The outer contact encloses the inner contact within the inactive gate pad area of the semiconductor device.

Abstract: A power semiconductor device includes a semiconductor layer structure comprising a drift region of a first conductivity type, and first and second contacts on the semiconductor layer structure. The drift region comprises a wide bandgap semiconductor material, and is configured to provide unipolar conduction between the first and second contacts below a current density threshold, and bipolar conduction between the first and second contacts above the current density threshold. Related devices and fabrication methods are also discussed.

Abstract: Semiconductor devices, and more particularly semiconductor devices with improved edge termination structures are disclosed. A semiconductor device includes a drift region that forms part of an active region. An edge termination region is arranged along a perimeter of the active region and also includes a portion of the drift region. The edge termination region includes one or more sub-regions of an opposite doping type than the drift region and one or more electrodes may be capacitively coupled to the drift region by way of the one or more sub-regions. During a forward blocking mode for the semiconductor device, the one or more electrodes may provide a path that draws ions away from passivation layers that are on the edge termination region and away from the active region. In this manner, the semiconductor device may exhibit reduced leakage, particularly at higher operating voltages and higher associated operating temperatures.

Abstract: Power semiconductor devices include a semiconductor layer structure comprising an active area with a plurality of unit cell transistors and an inactive gate pad area, a gate resistor layer on an upper side of the semiconductor layer structure, an inner contact that is directly on the upper side of the gate resistor layer, and an outer contact that is directly on the upper side of the gate resistor layer. The outer contact encloses the inner contact within the inactive gate pad area of the semiconductor device.

Abstract: A power semiconductor device includes a semiconductor layer structure comprising a wide bandgap semiconductor material. The semiconductor layer structure includes a drift region of a first conductivity type, a source region of the first conductivity type, and a well contact region of a second conductivity type adjacent the source region. A first ohmic contact comprising a first conductive material is formed on the source region. A second ohmic contact comprising a second conductive material, which is different than the first conductive material, is formed on the well contact region. A gate structure is formed on the drift region and includes a gate contact comprising a third conductive material, which is different than the first and second conductive material. Related devices and fabrication methods are also discussed.

Abstract: Power semiconductor devices comprise a silicon carbide based semiconductor layer structure including an active region defined therein and a gate bond pad that is on the semiconductor layer structure and vertically overlaps the active region.

Abstract: Semiconductor devices, and more particularly semiconductor devices with improved edge termination structures are disclosed. A semiconductor device includes a drift region that forms part of an active region. An edge termination region is arranged along a perimeter of the active region and also includes a portion of the drift region. The edge termination region includes one or more sub-regions of an opposite doping type than the drift region and one or more electrodes may be capacitively coupled to the drift region by way of the one or more sub-regions. During a forward blocking mode for the semiconductor device, the one or more electrodes may provide a path that draws ions away from passivation layers that are on the edge termination region and away from the active region. In this manner, the semiconductor device may exhibit reduced leakage, particularly at higher operating voltages and higher associated operating temperatures.

Abstract: Power semiconductor devices include a semiconductor layer structure comprising an active area with a plurality of unit cell transistors and an inactive gate pad area, a gate resistor layer on an upper side of the semiconductor layer structure, an inner contact that is directly on the upper side of the gate resistor layer, and an outer contact that is directly on the upper side of the gate resistor layer. The outer contact encloses the inner contact within the inactive gate pad area of the semiconductor device.

Abstract: Strategic placement and patterning of electrodes, vias, and metal runners can significantly reduce strain in a power semiconductor die. By modifying the path defining electrodes, vias, and metal runners, as well as patterning the material layers thereof, strain can be better managed to increase reliability of a power semiconductor die.

Abstract: Semiconductor devices, and more particularly passivation structures for semiconductor devices are disclosed. A semiconductor device may include an active region, an edge termination region that is arranged along a perimeter of the active region, and a passivation structure that may form a die seal along the edge termination region. The passivation structure may include a number of passivation layers in an arrangement that improves mechanical strength and adhesion of the passivation structure along the edge termination region. An interface formed by at least one of the passivation layers may be provided with a pattern that serves to more evenly distribute forces related to thermal expansion and contraction during power cycling, thereby reducing cracking and delamination in the passivation structure. A patterned layer may be at least partially embedded in the passivation structure in an arrangement that forms the corresponding pattern in overlying portions of the passivation structure.

Abstract: A power semiconductor device comprises a semiconductor layer structure comprising a drift region that comprises a wide band-gap semiconductor material and has a first conductivity type, a first gate structure and an adjacent second gate structure in an upper portion of the semiconductor layer structure, a deep shielding region in the drift region, and a connection region protruding upwardly from the deep shielding region and separating the first gate structure and the second gate structure from each other. The deep shielding region extends from underneath the first gate structure to underneath the second gate structure, and the deep shielding region has a second conductivity type that is different from the first conductivity type.

Abstract: Semiconductor devices, and more particularly semiconductor devices with improved edge termination structures are disclosed. A semiconductor device includes a drift region that forms part of an active region. An edge termination region is arranged along a perimeter of the active region and also includes a portion of the drift region. The edge termination region includes one or more sub-regions of an opposite doping type than the drift region and one or more electrodes may be capacitively coupled to the drift region by way of the one or more sub-regions. During a forward blocking mode for the semiconductor device, the one or more electrodes may provide a path that draws ions away from passivation layers that are on the edge termination region and away from the active region. In this manner, the semiconductor device may exhibit reduced leakage, particularly at higher operating voltages and higher associated operating temperatures.

Abstract: Shielding techniques are used to provide an embedded sensor element such as a temperature sensing element on a wide bandgap power semiconductor device. A semiconductor device may include a drift layer and an embedded sensor element. The drift layer may be a wide bandgap semiconductor material. A shielding structure is provided in the drift layer below the embedded sensor element. The embedded sensor element may be provided between contacts that are in electrical contact with the shielding well. The distance between the contacts may be minimized. A noise reduction well may be provided between the contacts to further isolate the embedded sensor element from parasitic signals.

Abstract: Methods and designs are provided for a vertical power semiconductor switch having an IGBT-with-built-in-diode bottom-side structure combined with a SJMOS topside structure in such a way as to provide fast switching with low switching losses (MOSFET), low on-resistance at low currents (SJMOS), low on-resistance at high currents (IGBT), and high current-density capability (IGBT).

Abstract: Methods and designs are provided for a vertical power semiconductor switch having an IGBT-with-built-in-diode bottom-side structure combined with a SJMOS topside structure in such a way as to provide fast switching with low switching losses (MOSFET), low on-resistance at low currents (SJMOS), low on-resistance at high currents (IGBT), and high current-density capability (IGBT).

Abstract: A semiconductor device comprises a vertical power device, such as a superjunction MOSFET, an IGBT, a diode, and the like, and a surface device that comprises one or more lateral devices that are electrically active along a top surface of the semiconductor device.