Patents by Inventor Thomas KIRSCHENHEITER

Thomas KIRSCHENHEITER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230102558
    Abstract: Methods of reducing wafer bowing in 3D DRAM devices are described using a 3-color process. A plurality of film stacks are formed on a substrate surface, each of the film stacks comprises two doped SiGe layers having different dopant amounts and/or Si:Ge ratios and a doped silicon layer. 3D DRAM devices are also described.
    Type: Application
    Filed: September 28, 2021
    Publication date: March 30, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Arvind Kumar, Mahendra Pakala, Ellie Y. Yieh, John Tolle, Thomas Kirschenheiter, Anchuan Wang, Zihui Li
  • Publication number: 20230029344
    Abstract: A method and apparatus for forming a super-lattice structure on a substrate is described herein. The super-lattice structure includes a plurality of silicon-germanium layers and a plurality of silicon layers disposed in a stacked pattern. The methods described herein produce a super-lattice structure with transition width of less than about 1.4 nm between each of the silicon-germanium layers and an adjacent silicon layer. The methods described herein include flowing one or a combination of a silicon containing gas, a germanium containing gas, and a halogenated species.
    Type: Application
    Filed: July 21, 2022
    Publication date: January 26, 2023
    Inventors: John TOLLE, Thomas KIRSCHENHEITER, Joe MARGETIS, Patricia M. LIU, Zuoming ZHU, Flora Fong-Song CHANG