Patents by Inventor Thomas Petrus Hendricus Warmerdam

Thomas Petrus Hendricus Warmerdam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10133197
    Abstract: A lithographic apparatus including: a projection system with an optical axis; an enclosure with an ambient gas; and a physical component accommodated in the enclosure, wherein: the lithographic apparatus is configured to cause the physical component to undergo movement relative to the enclosure, in a predetermined direction and in a plane perpendicular to the optical axis; the lithographic apparatus is configured to let the physical component maintain a predetermined orientation with respect to the enclosure during the movement; the movement induces a flow of the ambient gas relative to the component; the physical component has a surface oriented perpendicularly to the optical axis; the component includes a flow direction system configured to direct the flow of ambient gas away from the surface.
    Type: Grant
    Filed: June 8, 2015
    Date of Patent: November 20, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Günes Nakiboglu, Frank Johannes Jacobus Van Boxtel, Thomas Petrus Hendricus Warmerdam, Jan Steven Christiaan Westerlaken, Johannes Pieter Kroes
  • Publication number: 20170160653
    Abstract: A lithographic apparatus including: a projection system with an optical axis; an enclosure with an ambient gas; and a physical component accommodated in the enclosure, wherein: the lithographic apparatus is configured to cause the physical component to undergo movement relative to the enclosure, in a predetermined direction and in a plane perpendicular to the optical axis; the lithographic apparatus is configured to let the physical component maintain a predetermined orientation with respect to the enclosure during the movement; the movement induces a flow of the ambient gas relative to the component; the physical component has a surface oriented perpendicularly to the optical axis; the component includes a flow direction system configured to direct the flow of ambient gas away from the surface.
    Type: Application
    Filed: June 8, 2015
    Publication date: June 8, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Günes NAKIBOGLU, Frank Johannes Jacobus VAN BOXTEL, Thomas Petrus Hendricus WARMERDAM, Jan Steven Christiaan WESTERLAKEN, Johannes Pieter KROES
  • Patent number: 9192271
    Abstract: The invention relates to a suction unit and relates to a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit over a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit in operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the under pressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least be reduced.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: November 24, 2015
    Assignee: KONINKLIJKE PHILIPS N.V.
    Inventors: Jeroen Dekkers, Theo Anjes Maria Ruijl, Silvester Matheus Reijnders, Jan Van Eijk, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam, Robertus Mathijs Gerardus Rijs
  • Patent number: 9188349
    Abstract: The air-conditioning system comprises a dryer (10) comprising a membrane contactor (11) provided with a first channel (11b) for air flow and a second channel (11a) for desiccant flow, which channels are separated through a membrane (11c). The air conditioning system further comprises a humidifier (20) comprising a membrane contactor. The air flow passes in operation the dryer (10) and the humidifier (30) between an inlet (121) and an outlet (122). The dryer (10) comprises a series connection of a heat exchanger (12) and the membrane contactor (11), which heat exchanger couples air flow from the inlet (121) with desiccant flow from a regenerator (40) and in which membrane contactor (11) the thus heat-exchanged air flow and the heat-exchanged desiccant flow are coupled for drying of the airflow.
    Type: Grant
    Filed: September 2, 2013
    Date of Patent: November 17, 2015
    Assignee: 2ndAir B.V.
    Inventors: Thomas Petrus Hendricus Warmerdam, Sergio Hernandez-Marin, Robertus Wilhelmus Jacobus Hollering
  • Publication number: 20150211754
    Abstract: The air-conditioning system comprises a dryer (10) comprising a membrane contactor (11) provided with a first channel (11b) for air flow and a second channel (11a) for desiccant flow, which channels are separated through a membrane (11c). The air conditioning system further comprises a humidifier (20) comprising a membrane contactor. The air flow passes in operation the dryer (10) and the humidifier (30) between an inlet (121) and an outlet (122). The dryer (10) comprises a series connection of a heat exchanger (12) and the membrane contactor (11), which heat exchanger couples air flow from the inlet (121) with desiccant flow from a regenerator (40) and in which membrane contactor (11) the thus heat-exchanged air flow and the heat-exchanged desiccant flow are coupled for drying of the airflow.
    Type: Application
    Filed: September 2, 2013
    Publication date: July 30, 2015
    Applicant: 2ndAir B.V.
    Inventors: Thomas Petrus Hendricus Warmerdam, Sergio Hernandez-Marin, Robertus Wilhelmus Jacobus Hollering
  • Publication number: 20110239397
    Abstract: The invention relates to a suction unit and a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit on a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated, which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit during operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the underpressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least reduced.
    Type: Application
    Filed: August 18, 2008
    Publication date: October 6, 2011
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Jeroen Dekkers, Theo Anjes Maria Ruijl, Silvester Matheus Reijnders, Jan Van Eijk, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam, Robertus Mathijs Gerardus Rijs
  • Publication number: 20090207239
    Abstract: An artificial eye system, comprising at least one eye unit (2,3) having an eye-ball comprising a rotating spherical shell (7,19) and drive means for rotating said spherical shell (7,19) about its center. The drive means comprise a magnetic member (11) and electrical coils (12,13,14,15). The magnetic member (11) as well as the electrical coils (12,13,14,15) are located inside the rotating spherical shell (7,19).
    Type: Application
    Filed: June 20, 2007
    Publication date: August 20, 2009
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Thomas Petrus Hendricus Warmerdam, Hubertus Cornelius Antonius Dirkx, Erik Johannes Antonius Manders
  • Patent number: 7571793
    Abstract: System for and method of active vibration isolation to isolate a payload (57) from earth movements. The system has a body (16; 51), a mass (41) supported by the body (51) by means of at least one spring (45), a further mass (39) supported by the mass (41) by means of at least one further spring (43). A sensor senses a distance between the mass (41) and the further mass (39) and generates a distance signal. A controller (49) receives the distance signal and generates a control signal based on the distance signal. An actuator (47) actuates a position of said mass (41) based on the control signal, whereas the further mass supports the payload to be isolated from earth (16).
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: August 11, 2009
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Thomas Petrus Hendricus Warmerdam, Michael Johannes Vervoordeldonk
  • Publication number: 20080237947
    Abstract: System for and method of active vibration isolation to isolate a payload (57) from earth movements. The system has a body (16; 51), a mass (41) supported by the body (51) by means of at least one spring (45), a further mass (39) supported by the mass (41) by means of at least one further spring (43). A sensor senses a distance between the mass (41) and the further mass (39) and generates a distance signal. A controller (49) receives the distance signal and generates a control signal based on the distance signal. An actuator (47) actuates a position of said mass (41) based on the control signal, whereas the further mass supports the payload to be isolated from earth (16).
    Type: Application
    Filed: January 14, 2005
    Publication date: October 2, 2008
    Applicant: KONINKLIJKE PHILIPS ELECTRONIC, N.V.
    Inventors: Thomas Petrus Hendricus Warmerdam, Michael Johannes Vervoordeldonk
  • Patent number: 7375479
    Abstract: A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) v the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value.
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: May 20, 2008
    Assignee: Koninklijke Philips Electronics, N.V.
    Inventors: Jan Van Eijk, Arjan Franklin Bakker, Dennis Erwin Bos, Johan Cornelis Compter, Angelo Cesar Peter De Klerk, Franciscus Martinus Roes, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam
  • Patent number: 6373072
    Abstract: A lithographic projection apparatus has a radiation system for supplying a projection beam of radiation, a mask table provided with a mask holder for holding a mask, a substrate table provided with a substrate holder for holding a substrate, a projection system for imaging an irradiated portion of the mask onto a target portion of the substrate, first driving means, for moving the mask table in a given reference direction substantially parallel to the plane of the table, second driving means, for moving the substrate table parallel to the reference direction so as to be synchronous with the motion of the mask table.
    Type: Grant
    Filed: June 21, 1999
    Date of Patent: April 16, 2002
    Assignee: ASM Lithography B.V.
    Inventors: Hans Butler, Thomas Petrus Hendricus Warmerdam