Patents by Inventor Thomas R. Barnhart

Thomas R. Barnhart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing silicon wafers employing processing gas atmospheres of similar molecular weight
    Patent number: 4376796
    Abstract: At atmosphere X and an atmosphere Y, which may be an oxidizing atmosphere, are used in a process wherein silicon wafers are processed in a processing chamber, which is pressurized sequentially with a purging atmosphere, with the atmosphere X, and with the atmosphere Y displacing the atmosphere X excpet for a residual portion remaining with the atmosphere X and diminishing in concentration with time. As the atmosphere X has a molecular weight approximating the molecular weight of the atmosphere Y, stratification is minimized. If the atmosphere Y is steam, the atmosphere X may be a premixture of helium and oxyen.
    Type: Grant
    Filed: October 27, 1981
    Date of Patent: March 15, 1983
    Assignee: Thermco Products Corporation
    Inventors: Robert D. Arrasmith, Thomas R. Barnhart, Jon C. Goldman