Abstract: Using MEMS device design and fabrication techniques, liquid metal inductors can be formed. Because of the common fabrication techniques, liquid metal inductors can be more easily integrated with certain MEMS microswitches.

Abstract: A system for controlling fluid flow in a microfluidic circuit includes at least one microfluidic channel having a first fluid, a switch element coupled to the microfluidic channel, the switch element comprising at least one inlet, at least one outlet and a second fluid, the second fluid being immiscible with respect to the first fluid. The system also includes an actuator configured to alter the position of the second fluid, such that when in a first position, the second fluid allows the first fluid to flow from the at least one inlet to the at least one outlet, and such that when in a second position, the second fluid prevents the first fluid from flowing from the at least one inlet to the at least one outlet.

Abstract: A microfluidic valve. A microfluidic channel is formed in a substrate. A cooling element cools a substance in the channel to inhibit flow of the substance through the channel. A heating element warms the substance to overcome the effect of the cooling and enable the substance to flow through the channel. The valve may serve as a component of a microfluidic device that in turn may be part of a microfluidic system.

Abstract: In some embodiments of the present invention, the buried silicon oxide technology is employed in the fabrication of fluid channels, particularly nanochannels. For example, a fluid channel can be made in a buried silicon oxide layer by etching the buried oxide layer with a method that selectively removes silicon oxide but not silicon. Thus, one dimension of the resulting fluid channel is limited by the thickness of the buried oxide layer. It is possible to manufacture a very thin buried oxide layer with great precision, thus a nanochannel can be fabricated in a controlled manner. Moreover, in addition to buried oxide, any pairs of substances with a high etch ratio with respect to each other can be used in the same way. Further provided are the fluid channels, apparatuses, devices and systems comprising the fluid channels, and uses thereof.

Abstract: In accordance with the invention, a method for making microfluidic structures in bulk titanium is disclosed. Specific microfluidic structures include HPLC structures.

Abstract: The delivery of liquid to a device, for example, a microswitch, can be achieved without the application of external pressure to the liquid by using capillary action to cause the liquid to move as desired. In one embodiment, at least one channel having a wettable surface is created that allows liquid metal to flow into a measuring reservoir without the liquid metal being pressurized and without applying other external forces on the liquid metal to facilitate its movement. A portion of the channel between the wettable channel and the reservoir is non-wettable and this non-wettable area, while allowing the metal to flow into the reservoir, acts to prevent the liquid from back-flowing from the reservoir to the channel. In one embodiment pressurized gas can be generated and applied to the liquid in the reservoir to facilitate the movement of the liquid from the reservoir to the switch cavity.

Abstract: A switch comprises a first wafer having a thin-film structure defined thereon, a second wafer having a plurality of features defined therein, and a seal between the first wafer and the second wafer forming a two-wafer structure having a liquid metal microswitch defined therebetween.

Abstract: Advantage is taken of the fact that each switching state change (i.e., each throw) of a double throw switch requires a pair of controlled input signals to be applied to the switching element that controls that throw. By sharing input leads among several switches and by arranging the leads with respect to each switch throw element such that for any pair of leads only one switch throw element will activate, it is possible to reduce the total number of leads for the combined switch package. In one embodiment, all of the switches in a switching device are packaged as a single device.

Abstract: The invention provides a microfluidic system, including an optional separation system for separating and preparing an analyte solution, a microfluidic device downstream from the separation system for dispensing and analyte solution, comprising a substrate having a channel defining a portion of a microfluidic channel; a polymeric substrate having a channel for contacting the substrate to define the second portion of the microfluidic channel; a cooling element associated with the substrate and channel for cooling an analyte solution in the microfluidic channel; and a heating element adjacent to the microfluidic channel for heating the analyte solution, wherein the cooling element operates to maintain the channel in a closed state by cooling the analyte solution in the channel and wherein the heating element may be activated to place the channel in an open state by heating the analyte solution in the channel; and a detector for detecting the dispensed analyte solution The invention also provides a microfluidic d

Abstract: Embodiments of the invention provide for improved separation of switching material by creating a diversion of the activating force. In one embodiment at least one structural element is positioned in close proximity to an inlet for the actuating force to influence the actuating force to fully separate the switching material. Structural elements may include protrusions, either adjacent to the inlet or approximately across the channel from the inlet, as well as at least one additional inlet. The diversion can be created, if desired, by forces coming from opposite sides. Embodiments of the invention make use of non-wettable surfaces lining the channel in regions where switching material is to break into separate volumes, and wettable surfaces away from such regions. Embodiments of the invention provide for multi-pole, multi-throw switching.

Abstract: In accordance with the invention, a multiple throw switching device can be achieved on a single substrate by organizing a micro-fluidic switch into spokes radiating outward from the center of a wafer such that each spoke (switch throw) controls a switched output and each switch throw, in turn, is controlled by an individual stimulus.

Abstract: A system for controlling fluid flow in a microfluidic circuit located in a liquid chromatograph includes at least one microfluidic channel and a flexible membrane adjacent the at least one microfluidic channel, wherein when actuated, the flexible membrane deflects into the microfluidic channel, thus impeding fluid flow in the microfluidic channel.

Abstract: The present invention relates to an optical detection cell for micro-fluidics. The detection cell provides a first layer, a detection cell layer contacting the first layer, a third layer contacting the detection cell layer, a micro-fluidic chip having a fluidic port and a detection channel defined through the detection cell and being in fluid communication with the fluidic port of the chip, the detection channel serving as a light path for receiving light for detecting a molecule. Methods of detecting molecules and making the detection cell are also disclosed.

Abstract: The present invention relates to an optical detection cell for micro-fluidics.

Abstract: A three-stage liquid metal switch employing electrowetting on dielectric (EWOD), including a common EWOD switch 1310 having an input port 1302, a first shared-EWOD-switch output 1336, and a second shared-EWOD-switch output 1338; a first EWOD switch 1340 having a first-EWOD-switch input 1343, a first output port 1304, and a first-EWOD-switch output 1368; and a second EWOD switch 1370 having a second-EWOD-switch input 1373, a second output port 1306, and a second-EWOD-switch output 1398; wherein the first shared-EWOD-switch output 1336 is operably connected to the first-EWOD-switch input 1343, and the second shared-EWOD-switch output 1338 is operably connected to the second-EWOD-switch input 1373.

Abstract: An electronic switch comprises a substrate having a surface and an embedded electrode, a droplet of conductive liquid located over the embedded electrode, and a power source configured to create an electric circuit including the droplet of conductive liquid. The surface comprises a feature that determines a contact angle between the surface and the droplet.

Abstract: A system for controlling fluid flow in a microfluidic circuit includes at least one microfluidic channel, and a heating element adjacent the at least one microfluidic channel, wherein when activated, the heating element boils liquid in the at least one microfluidic channel.

Abstract: The delivery of liquid to a device, for example, a microswitch, can be achieved without the application of external pressure to the liquid by using capillary action to cause the liquid to move as desired. In one embodiment, at least one channel having a wettable surface is created that allows liquid metal to flow into a measuring reservoir without the liquid metal being pressurized and without applying other external forces on the liquid metal to facilitate its movement. A portion of the channel between the wettable channel and the reservoir is non-wettable and this non-wettable area, while allowing the metal to flow into the reservoir, acts to prevent the liquid from back-flowing from the reservoir to the channel. In one embodiment pressurized gas can be generated and applied to the liquid in the reservoir to facilitate the movement of the liquid from the reservoir to the switch cavity.

Abstract: Capacitive sensors using liquid metals can be fabricated using MEMS device design and fabrication techniques. Movement of the liquid metal in response to a stimulus can provide measurable changes in capacitance of the devices.

Abstract: Using MEMS device design and fabrication techniques, liquid metal inductors can be formed. Because of the common fabrication techniques, liquid metal inductors can be more easily integrated with certain MEMS microswitches.