Patents by Inventor Timothy J. Miler

Timothy J. Miler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100155600
    Abstract: An non-Faraday ion dose measurement device is positioned within a plasma process chamber and includes a sensor located above a workpiece within the chamber. The sensor is configured to detect the number of secondary electrons emitted from a surface of the workpiece exposed to a plasma implantation process. The sensor outputs a current signal proportional to the detected secondary electrons. A current circuit subtracts the detected secondary current generated from the sensor and subtracts it from a bias current supplied to the workpiece within the chamber. The difference between the currents provides a measurement of the ion dose current calculated in situ and during the implantation process.
    Type: Application
    Filed: December 23, 2008
    Publication date: June 24, 2010
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Joseph P Dzengeleski, Timothy J. Miler, Jay T. Scheuer, Christopher J. Leavitt