Patents by Inventor Tomoaki Sawabe

Tomoaki Sawabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240122042
    Abstract: Display devices that suppress complications due to uneven shape of a surface on which a semi-transmissive reflective layer is formed are disclosed. In one example, a display device includes first sub-pixels, second sub-pixels, and third sub-pixels. The first sub-pixel includes a first light emitting element that emits first light and third light, the second sub-pixel includes a second light emitting element that emits second light, and the third sub-pixel includes a third light emitting element that emits first light and third light. The light emitting elements respectively include a first electrode, an organic layer including a light emitting layer, a second electrode, and a semi-transmissive reflective layer, and a resonator structure is configured by the first electrode and the semi-transmissive reflective layer. The heights of the semi-transmissive reflective layers in the first light emitting element and the third light emitting element are the same.
    Type: Application
    Filed: February 10, 2022
    Publication date: April 11, 2024
    Inventors: Shoji Sudo, Tomoaki Sawabe
  • Publication number: 20230397474
    Abstract: A display apparatus includes display elements formed on a substrate and arrayed in a two-dimensional matrix, the display elements each having a light emitting unit formed by stacking a lower electrode, an organic layer, and an upper electrode, wherein the lower electrode and the organic layer are provided for each light emitting unit, the substrate includes a groove formed in a part of the substrate positioned between adjacent light emitting units, the groove having a bottom surface and both side surfaces forming a gentle inclination angle with respect to the bottom surface, and a protective film is formed in common on entire surface including an upper surface of the light emitting unit and an upper surface of the groove of the substrate.
    Type: Application
    Filed: November 18, 2021
    Publication date: December 7, 2023
    Inventors: Tomoaki Sawabe, Takashi Yamazaki, Yu Kato, Naoya Kasahara, Masaya Ogura, Masashi Uchida
  • Publication number: 20220221792
    Abstract: A pattern forming material according to an embodiment is a pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other. Each of the monomer units includes an ester structure having a first carbonyl group and at least one second carbonyl group bonded to the ester structure. A second carbonyl group farthest from a main chain of the polymer constituting the pattern forming material among second carbonyl groups is in a linear chain state.
    Type: Application
    Filed: March 29, 2022
    Publication date: July 14, 2022
    Applicant: Kioxia Corporation
    Inventors: Ryosuke YAMAMOTO, Seiji MORITA, Norikatsu SASAO, Koji ASAKAWA, Tomoaki SAWABE, Shinobu SUGIMURA
  • Patent number: 11378885
    Abstract: According to one embodiment, a pattern formation material includes a first monomer. The first monomer includes a first molecular chain, a first group, and a second group. The first molecular chain includes a first end and a second end. The first group has an ester bond to the first end. The second group has an ester bond to the second end. The first group is one of acrylic acid or methacrylic acid. The second group is one of acrylic acid or methacrylic acid. The first molecular chain includes a plurality of first elements bonded in a straight chain configuration. The first elements are one of carbon or oxygen. The number of the first elements is 6 or more. A film including the first monomer is caused to absorb a metal compound including a metallic element.
    Type: Grant
    Filed: March 13, 2018
    Date of Patent: July 5, 2022
    Assignee: Kioxia Corporation
    Inventors: Koji Asakawa, Naoko Kihara, Seekei Lee, Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura
  • Patent number: 11320736
    Abstract: A pattern forming material according to an embodiment is a pattern forming material comprising a polymer composed of a plurality of monomer units bonded to each other. Each of the monomer units includes an ester structure having a first carbonyl group and at least one second carbonyl group bonded to the ester structure. A second carbonyl group farthest from a main chain of the polymer constituting the pattern forming material among second carbonyl groups is in a linear chain state.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: May 3, 2022
    Assignee: KIOXIA CORPORATION
    Inventors: Ryosuke Yamamoto, Seiji Morita, Norikatsu Sasao, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura
  • Patent number: 11161999
    Abstract: According to one embodiment, a pattern formation method is disclosed. The method includes a preparation process, a block copolymer layer formation process, and a contact process. The preparation process includes preparing a pattern formation material including a block copolymer including a first block and a second block. The first block includes a first main chain and a plurality of first side chains. At least one of the first side chains includes a plurality of carbonyl groups. The block copolymer layer formation process includes forming a block copolymer layer on a first member. The block copolymer layer includes the pattern formation material and includes a first region and a second region. The first region includes the first block. The second region includes the second block. The contact process includes causing the block copolymer layer to contact a metal compound including a metallic element.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: November 2, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Norikatsu Sasao, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura
  • Patent number: 11024719
    Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, an oxide semiconductor channel, an insulation layer, an oxide layer, and a gate electrode. The oxide semiconductor channel includes a portion extending along a first direction and connects the first electrode to the second electrode. The insulation layer surrounds the oxide semiconductor channel. The oxide layer covers the oxide semiconductor channel and the insulation layer, and includes an oxide of a metal element. The gate electrode covers the oxide semiconductor channel, the insulation layer, and the oxide layer, and includes the metal element.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: June 1, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tomoaki Sawabe, Nobuyoshi Saito, Junji Kataoka, Tomomasa Ueda, Keiji Ikeda
  • Patent number: 10950735
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor layer and a first layer. The semiconductor layer includes a first portion including a first element and oxygen. The first element includes at least one selected from the group consisting of In, Ga, Zn, Al, Sn, Ti, Si, Ge, Cu, As, and W. The first layer includes a second element including at least one selected from the group consisting of W, Ti, Ta, Mo, Cu, Al, Ag, Hf, Au, Pt, Pd, Ru, Y, V, Cr, Ni, Nb, In, Ga, Zn, and Sn. The first portion includes a first region and a second region. The second region is provided between the first region and the first layer. The first region includes a bond of the first element and oxygen. The second region includes a bond of the first element and a metallic element.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: March 16, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Junji Kataoka, Tomomasa Ueda, Tomoaki Sawabe, Keiji Ikeda, Nobuyoshi Saito
  • Publication number: 20210040345
    Abstract: According to one embodiment, a pattern formation method is disclosed. The method includes a preparation process, a block copolymer layer formation process, and a contact process. The preparation process includes preparing a pattern formation material including a block copolymer including a first block and a second block. The first block includes a first main chain and a plurality of first side chains. At least one of the first side chains includes a plurality of carbonyl groups. The block copolymer layer formation process includes forming a block copolymer layer on a first member. The block copolymer layer includes the pattern formation material and includes a first region and a second region. The first region includes the first block. The second region includes the second block. The contact process includes causing the block copolymer layer to contact a metal compound including a metallic element.
    Type: Application
    Filed: October 28, 2020
    Publication date: February 11, 2021
    Applicant: Toshiba Memory Corporation
    Inventors: Norikatsu SASAO, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura
  • Patent number: 10877374
    Abstract: According to one embodiment, a pattern formation method is disclosed. The method can include a film formation process, and a exposure process. The film formation process forms a pattern formation material film on a base body. The pattern formation material film includes a pattern formation material including a first portion and a second portion. The first portion includes at least one of acrylate or methacrylate. The second portion includes an alicyclic compound and a carbonyl group. The alicyclic compound has an ester bond to the at least one of the acrylate or the methacrylate. The carbonyl group is bonded to the alicyclic compound. The exposure process causes the pattern formation material film to expose to a metal compound including a metallic element.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: December 29, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Koji Asakawa, Seekei Lee, Naoko Kihara, Norikatsu Sasao, Tomoaki Sawabe, Shinobu Sugimura
  • Patent number: 10790396
    Abstract: A semiconductor device of an embodiment includes a first electrode; a second electrode; an oxide semiconductor layer provided between the first electrode and the second electrode and extending in a first direction; a gate electrode surrounding the oxide semiconductor layer; and a first gate insulating layer provided between the gate electrode and the oxide semiconductor layer, the first gate insulating layer surrounding the oxide semiconductor layer, and the first gate insulating layer having a length in the first direction shorter than a length of the oxide semiconductor layer in the first direction.
    Type: Grant
    Filed: August 14, 2018
    Date of Patent: September 29, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tomoaki Sawabe, Tomomasa Ueda, Keiji Ikeda, Tsutomu Tezuka, Nobuyoshi Saito
  • Publication number: 20200303554
    Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, an oxide semiconductor channel, an insulation layer, an oxide layer, and a gate electrode. The oxide semiconductor channel includes a portion extending along a first direction and connects the first electrode to the second electrode. The insulation layer surrounds the oxide semiconductor channel. The oxide layer covers the oxide semiconductor channel and the insulation layer, and includes an oxide of a metal element. The gate electrode covers the oxide semiconductor channel, the insulation layer, and the oxide layer, and includes the metal element.
    Type: Application
    Filed: September 6, 2019
    Publication date: September 24, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Tomoaki SAWABE, Nobuyoshi SAITO, Junji KATAOKA, Tomomasa UEDA, Keiji IKEDA
  • Patent number: 10672621
    Abstract: The pattern forming material of an embodiment is a pattern forming material containing a polymer composed of two or more kinds of monomer units, in which a first monomer unit in the monomer units is provided with an ester skeleton having a first carbonyl group and one or more second carbonyl groups which bind to the ester skeleton, among the second carbonyl groups, the second carbonyl group that is farthest from a main chain of the polymer constituting the pattern forming material is present on a linear chain, and a second monomer unit in the monomer units is provided with a crosslinkable functional group on a side chain terminal.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: June 2, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Norikatsu Sasao, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura
  • Publication number: 20200123299
    Abstract: According to one embodiment, a pattern formation material is included in a polymer layer to be provided between a block copolymer layer and a substrate. The block copolymer layer includes a block copolymer including a plurality of blocks. The pattern formation material includes a pattern formation polymer. The pattern formation polymer consists of a main chain including an acrylic backbone, and a side chain. One of the plurality of blocks include a plurality of polymer components. The plurality of polymer components are of mutually-different types. A solubility parameter of the pattern formation material is between a maximum value and a minimum value of a solubility parameter of the polymer components.
    Type: Application
    Filed: December 18, 2019
    Publication date: April 23, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventors: Koji ASAKAWA, Norikatsu SASAO, Tomoaki SAWABE, Naoko KIHARA, Shinobu SUGIMURA
  • Patent number: 10553443
    Abstract: According to one embodiment, a pattern formation method includes forming a structure body on a first surface of a patterning member, the structure body having protrusions and a recess. The protrusions are arranged at a first pitch along a first direction. The first direction is aligned with the first surface. The recess is between the protrusions. The method further includes forming a resin film of a block copolymer on the structure body. The block copolymer includes first portions and second portions. The first and second portions are arranged alternately at a second pitch along the first direction. The structure body includes first and second regions. The first portions are on the first regions. The second portions on the second regions. The method further includes removing the second portions and the second regions, introducing a metal to the first regions, and etching the patterning member using the first regions.
    Type: Grant
    Filed: September 13, 2017
    Date of Patent: February 4, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Tomoaki Sawabe, Shinobu Sugimura, Koji Asakawa
  • Patent number: 10553601
    Abstract: According to one embodiment, a memory includes: a member extending in a first direction and including an oxide semiconductor layer including first to third portions arranged in order from the bit line to the source line; first, second and third conductive layers arranged along the first direction and facing the first to third portions, respectively, the first conductive layer including first material, and each of the second and third conductive layer including a second material different from the first material; a memory cell in a first position corresponding to the first portion, the memory cell including a charge storage layer in the oxide semiconductor layer; a first transistor in a second position corresponding to the second portion; and a second transistor in a third position corresponding to the third portion.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: February 4, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Tsutomu Tezuka, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura, Tomoaki Sawabe
  • Patent number: 10534260
    Abstract: According to one embodiment, a pattern formation method can include performing a first processing of causing a surface of a first member of a processing body to be hydrophobic. The processing body includes the first member and a second member. The second member is provided at a portion of the first member. The method can include performing a second processing of causing the processing body to contact an atmosphere including a metal compound. The second processing is after the first processing. The method can include performing a third processing of processing the processing body in an atmosphere including at least one selected from the group consisting of water, oxygen, and ozone. The third processing is after the second processing. In addition, the method can include removing, after the third processing, at least a portion of another portion of the first member by using the second member as a mask.
    Type: Grant
    Filed: August 13, 2018
    Date of Patent: January 14, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Tomoaki Sawabe, Shinobu Sugimura, Koji Asakawa
  • Publication number: 20200013892
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor layer and a first layer. The semiconductor layer includes a first portion including a first element and oxygen. The first element includes at least one selected from the group consisting of In, Ga, Zn, Al, Sn, Ti, Si, Ge, Cu, As, and W. The first layer includes a second element including at least one selected from the group consisting of W, Ti, Ta, Mo, Cu, Al, Ag, Hf, Au, Pt, Pd, Ru, Y, V, Cr, Ni, Nb, In, Ga, Zn, and Sn. The first portion includes a first region and a second region. The second region is provided between the first region and the first layer. The first region includes a bond of the first element and oxygen. The second region includes a bond of the first element and a metallic element.
    Type: Application
    Filed: March 12, 2019
    Publication date: January 9, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Junji KATAOKA, Tomomasa UEDA, Tomoaki SAWABE, Keiji IKEDA, Nobuyoshi SAITO
  • Publication number: 20200006076
    Abstract: The pattern forming material of an embodiment is a pattern forming material containing a polymer composed of two or more kinds of monomer units, in which a first monomer unit in the monomer units is provided with an ester skeleton having a first carbonyl group and one or more second carbonyl groups which bind to the ester skeleton, among the second carbonyl groups, the second carbonyl group that is farthest from a main chain of the polymer constituting the pattern forming material is present on a linear chain, and a second monomer unit in the monomer units is provided with a crosslinkable functional group on a side chain terminal.
    Type: Application
    Filed: March 12, 2019
    Publication date: January 2, 2020
    Applicant: Toshiba Memory Corporation
    Inventors: Norikatsu Sasao, Koji Asakawa, Tomoaki Sawabe, Shinobu Sugimura
  • Patent number: 10497712
    Abstract: According to one embodiment, a memory includes: a first gate of a first transistor and a second gate electrode of the second transistor facing the a semiconductor layer; an oxide semiconductor layer between the first and second transistors and including first to fifth portions in order; a third gate of a first cell facing the first portion; a fourth gate of a third transistor facing the second portion; a fifth gate of a second cell facing the third portion; a sixth gate of a fourth transistor facing the fourth portion; an interconnect connected to the fifth portion; a source line connected to the first transistor; and a bit line connected to the second transistor. A material of the third gate is different from a material of the fourth gate.
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: December 3, 2019
    Assignee: Toshiba Memory Corporation
    Inventors: Tsutomu Tezuka, Fumitaka Arai, Keiji Ikeda, Tomomasa Ueda, Nobuyoshi Saito, Chika Tanaka, Kentaro Miura, Tomoaki Sawabe