Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

Abstract: This high-level synthesis device, which has a processor and a memory, and generates a hardware description code that describes the configuration of an integrated circuit connected to an external memory, comprises a high-level synthesis code adjustment unit which receives a high-level synthesis code that describes a process to be executed by the integrated circuit and an external memory access variable for exchanging data with the external memory, analyzes the high-level synthesis code, and reconstructs the high-level synthesis code on the basis of the analysis result, wherein the high-level synthesis code adjustment unit includes: a burst access determination unit that analyzes the external memory access variable in the high-level synthesis code, and determines whether burst access to the external memory is possible; and a code reconstructing unit that adds a code for executing burst access to the high-level synthesis code, for the external memory access variable capable of being burst accessed.

Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

Abstract: Provided is a technique for specifying a medium more simply. A medium sensor device includes an antenna, a storage unit that stores a medium identification table in which a medium corresponding to an antenna impedance has been determined beforehand, and a medium specification unit that specifies the impedance of the antenna and specifies a medium in the vicinity of the antenna by referring to the medium identification table.

Abstract: Provided is a technique for specifying a medium more simply. A medium sensor device includes an antenna, a storage unit that stores a medium identification table in which a medium corresponding to an antenna impedance has been determined beforehand, and a medium specification unit that specifies the impedance of the antenna and specifies a medium in the vicinity of the antenna by referring to the medium identification table.