Abstract: To automate positioning operation of an X-ray tube so as to reduce the inspection time. Anatomical program selection means selects a surgery method/imaging object portion so that an imaging condition stored as an anatomical program in advance is called out and set in an X-ray generation device. Here, when an operation switch is pressed, control means moves drive means built in X-ray irradiation means parallel movement holding means and X-ray irradiation means rotation holding means so as to obtain the positional relationship between an X-ray tube and an FPD stored in correspondence with the anatomical program (such as SID and incident angle). The position of the FPD should be matched with the examinee. However, since the positional relationship between the X-ray tube and the FPD is almost constant in accordance with the surgery method/imaging object portion, it is possible to reduce the time required for positioning the X-ray tube by using this configuration.

Abstract: To automate positioning operation of an X-ray tube so as to reduce the inspection time. Anatomical program selection means selects a surgery method/imaging object portion so that an imaging condition stored as an anatomical program in advance is called out and set in an X-ray generation device. Here, when an operation switch is pressed, control means moves drive means built in X-ray irradiation means parallel movement holding means and X-ray irradiation means rotation holding means so as to obtain the positional relationship between an X-ray tube and an FPD stored in correspondence with the anatomical program (such as SID and incident angle). The position of the FPD should be matched with the examinee. However, since the positional relationship between the X-ray tube and the FPD is almost constant in accordance with the surgery method/imaging object portion, it is possible to reduce the time required for positioning the X-ray tube by using this configuration.

Abstract: An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss.

Abstract: An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss.