Abstract: A wavelength variable interference filter includes a plurality of filter units each of which includes a pair of reflecting films facing each other and a gap changing unit changing an interval between the pair of reflecting films. The plurality of filter units are two-dimensionally disposed with respect to an arrangement surface parallel to a reflecting surface of the reflecting film, and reflecting films of other filter units disposed at locations different from those on a first virtual straight line, intersecting a predetermined direction (first direction) along the arrangement surface, are disposed so as to overlap a portion of the reflecting films on the first virtual straight line without gaps therebetween between two reflecting films adjacent with a predetermined interval therebetween along the first virtual straight line, when seen from the predetermined direction (first direction).

Abstract: A spectroscopic measurement apparatus includes a wavelength tunable interference filter that selects light of a predetermined wavelength from incident light, allows the selected light to exit, and is capable of changing the wavelength of the light that is allowed to exit, a light dividing element that divides the exiting light having exited out of the wavelength tunable interference filter into a plurality of light fluxes, and a first light receiving device and a second light receiving device that are provided in correspondence with the plurality of divided light fluxes divided by the light dividing element and have sensitivities different from each other.

Abstract: A method for manufacturing a substrate conjugate is provided including a step of joining a first substrate including a first functional device to a second substrate including a second functional device and a step of providing a protective layer on at least one of: a face of the first substrate on which the first functional device is placed; and a face of the second substrate on which the second functional device is placed.

Abstract: An optical modulator is provided which can be manufactured by means of a simple process, and a display device, and a method of manufacturing same. The optical modulator comprises a first substrate having a movable reflective film that oscillates in accordance with the application of an electrostatic force; a light-transmitting second substrate disposed so as to oppose the first substrate and formed with a transparent electrode for applying the electrostatic force, in a position corresponding to the movable reflective film; and a cavity section, demarcated by the first substrate and the second substrate, for restricting the range of oscillation of the movable reflective film. By forming a movable reflective film by a portion of the substrate and determining the range of oscillation of the movable reflective film by the interval between the substrates, an optical modulator of high durability and high precision can be obtained.

Abstract: A method of producing an electrode substrate is provided that can form at least one recess of various configurations on an electrode substrate through a simplified process and with an increased degree of precision. Also provided are an electrode substrate produced by the method, an electrostatic actuator provided with the electrode substrate, a liquid droplet ejecting head provided with the actuator and a liquid droplet ejecting apparatus provided with the head. The method comprises a first step of forming at least one recess 41 on a glass substrate 4a through a press forming process in which a pressing mold is pressed against the glass substrate, and a second step of providing an electrode 42 on a bottom surface of each recess 41. The press forming process is preferably carried out under a condition that the substrate is heated up to a temperature of 350 to 800° C. It is desirable that the glass composing the glass substrate 4a has a coefficient of thermal expansion in the range of 20×10?7 to 90×10?7° C.?1.

Abstract: A method for manufacturing a substrate conjugate is provided including a step of joining a first substrate including a first functional device to a second substrate including a second functional device and a step of providing a protective layer on at least one of a face of the first substrate on which the first functional device is placed; and a face of the second substrate on which the second functional device is placed.

Abstract: A silicon nozzle plate includes nozzles each with a first nozzle portion having a circular cross-section and a second nozzle portion having a circular cross-section wherein the circular cross-section of the first nozzle portion is smaller than the circular cross-section of the second nozzle portion. In one embodiment the nozzle plate is utilized in an inkjet head and includes a recess having a flat bottom surface that commonly communicates with a plurality of first nozzle portions and a through hole that exposes terminal portions that supply control signals to pressure generators.

Abstract: A method for manufacturing an electrostatic actuator comprises a vibrating plate, an electrode plate facing the vibrating plate, and a vibrating chamber formed between the electrode plate and the vibrating plate, wherein the vibrating plate is displaced by electrostatic force, by applying voltage between the vibrating plate and the electrode plate, the method comprises: a process for forming a pressure compensating chamber communicating with the vibrating chamber; a process for forming a displacement plate at a portion of the pressure compensating chamber, displaceable according to external atmospheric pressure, into a warped form curved so as to protrude in a direction away from the facing inner wall of the pressure compensating chamber; and a process for shutting off and sealing the pressure compensating chamber from the external atmosphere, along with the vibrating chamber.

Abstract: An optical modulator is provided which can be manufactured by means of a simple process, and a display device, and a method of manufacturing same. The optical modulator comprises a first substrate having a movable reflective film that oscillates in accordance with the application of an electrostatic force; a light-transmitting second substrate disposed so as to oppose the first substrate and formed with a transparent electrode for applying the electrostatic force, in a position corresponding to the movable reflective film; and a cavity section, demarcated by the first substrate and the second substrate, for restricting the range of oscillation of the movable reflective film. By forming a movable reflective film by a portion of the substrate and determining the range of oscillation of the movable reflective film by the interval between the substrates, an optical modulator of high durability and high precision can be obtained.

Abstract: A method for manufacturing an electrostatic actuator comprises a vibrating plate, an electrode plate facing the vibrating plate, and a vibrating chamber formed between the electrode plate and the vibrating plate, wherein the vibrating plate is displaced by electrostatic force, by applying voltage between the vibrating plate and the electrode plate, the method comprises: a process for forming a pressure compensating chamber communicating with the vibrating chamber; a process for forming a displacement plate at a portion of the pressure compensating chamber, displaceable according to external atmospheric pressure, into a warped form curved so as to protrude in a direction away from the facing inner wall of the pressure compensating chamber; and a process for shutting off and sealing the pressure compensating chamber from the external atmosphere, along with the vibrating chamber.

Abstract: An electrostatic ink-jet head (1) in which the present invention is applied comprises a pressure chamber (6) communicating with an ink nozzle (21), and an atmospheric pressure chamber (12) opened to the atmosphere, with a vibrating plate (5) being provided on the base plane of the pressure chamber (6). Voltage applied between the vibrating plate (5) and an electrode (43) causes the vibrating plate (5) to vibrate due to electrostatic force, thereby discharging ink droplets. A vibrating chamber (41) communicates with a pressure compensating chamber (49), and a displacement plate (16) capable of being displaced in the direction outward from the plane according to fluctuations in the external, atmospheric pressure is formed at the base plane of the pressure compensating chamber (49).

Abstract: When a nozzle 21 with a stepwise cross-section, which is provided with a small cross-sectional nozzle portion 21a formed on the front side thereof and with a large cross-sectional nozzle portion 21b formed on the rear side thereof in a discharge direction, respectively, is formed by applying etching to a silicon wafer 200 for forming a nozzle plate 2, a resist film 210 is formed on a surface 200a of the silicon wafer 200, and patterning by half-etching and patterning by full-etching is applied to the resist film 210. Next, anisotropic-dry-etching is applied to the silicon wafer 200 by ICP discharge, thereby forming grooves at the full-etched portions. Next, the resist film at the half-etched portions is removed and anisotropic-dry-etching is applied to the portions from which the resist film is removed by ICP discharge.

Abstract: When a nozzle 21 with a stepwise cross-section, which is provided with a small cross-sectional nozzle portion 21a formed on the front side thereof and with a large cross-sectional nozzle portion 21b formed on the rear side thereof in a discharge direction, respectively, is formed by applying etching to a silicon wafer 200 for forming a nozzle plate 2, a resist film 210 is formed on a surface 200a of the silicon wafer 200, and patterning by half-etching and patterning by full-etching is applied to the resist film 210. Next, anisotropic-dry-etching is applied to the silicon wafer 200 by ICP discharge, thereby forming grooves at the full-etched portions. Next, the resist film at the half-etched portions is removed and anisotropic-dry-etching is applied to the portions from which the resist film is removed by ICP discharge.

Abstract: The present invention is applied to a device for radiating a light spot onto a predetermined location of a recording medium in order to optically record and/or reproduce information. The drive device may include a mobile body having a light-emitting element, an objective lens, a light-receiving element, and a holder for retaining the light-emitting element, the objective lens, and the light-receiving element. The drive device may also include a connecting device for electrically connecting the light-emitting element and the light-receiving element to an external electrical circuit.

Abstract: An optical pickup includes a movable unit supported in such a manner that the movable unit can move in tracking directions as well as in focusing directions. The movable unit has a laser unit including an objective lens, a reflecting mechanism, a light source, and a light detecting mechanism all constructed in an integral fashion. An axis of rotation of the movable unit intersects an optical axis of a light beam emitted by the laser unit. Also provided are two rotating mechanisms (for example, pivot pins or hinges) separately disposed in a direction along the axis of rotation, both rotating mechanisms having a common axis of rotation. Such an arrangement makes it possible to realize a small-sized, optical pickup having a driving mechanism suitable for high speed seeking. Such an optical pickup makes it possible to realize an optical recording/reproducing apparatus that can transfer data at a high rate of speed over a short access time.

Abstract: The present invention is applied to a device for driving optical component parts, such as an objective lens, in accordance with displacement of a disk. A mobile body, on which the optical component parts are mounted, is supported by at least two plate springs that are not parallel with the disk, in such a manner that the mobile body can be driven in a focusing direction and a tracking direction. The plate springs can have an electric wiring function so that no wires extend from the mobile body.

Abstract: An optical pickup includes a movable unit supported in such a manner that the movable unit can move in tracking directions as well as in focusing directions. The movable unit has a laser unit including an objective lens, a reflecting mechanism, a light source, and a light detecting mechanism all constructed in an integral fashion. An axis of rotation of the movable unit intersects an optical axis of a light beam emitted by the laser unit. Also provided are two rotating mechanisms (for example, pivot pins or hinges) separately disposed in a direction along the axis of rotation, both rotating mechanisms having a common axis of rotation. Such an arrangement makes it possible to realize a small-sized, optical pickup having a driving mechanism suitable for high speed seeking. Such an optical pickup makes it possible to realize an optical recording/reproducing apparatus that can transfer data at a high rate of speed over a short access time.

Abstract: An integrally-driven type optical head (1) in which a laser optical system (20) provided with a semiconductor laser (22) and a light receiving device is mounted in a moving part of an actuator (50). In this optical head, the moving part (5) is constituted by uniting a heat radiator (10) made of a metal or the like with a heat insulator (9) made of a plastic or the like. The heat conduction bonding of the heat radiator to the semiconductor laser is performed. A coil of the actuator is securely fixed to this heat radiator through the heat insulator. Thereby, heat generated from the semiconductor laser is transferred to the heat radiator and is then radiated from the surface of the heat radiator to the external space of the optical head. Further, in case where heat is generated by the coil when the actuator operates, the laser optical system can be prevented from being heated, because of the fact that the heat conductivity between the coil and the laser optical system is low.