Abstract: A correction data creating method is provided. In the method, a source voltage is sequentially selected among a plurality of source voltages determined in advance and the selected source voltage is supplied to a heater for heating a substrate support. At the source voltage supplied to the heater, a power supplied to the heater is adjusted such that a resistance of the heater becomes a resistance value corresponding to a predetermined first temperature based on temperature conversion data indicating a relationship between the resistance of the heater and a temperature of the heater. A temperature of the substrate support is measured at a position where the heater is disposed as a second temperature. A correction value corresponding to the difference between the predetermined first temperature and the second temperature is calculated, and correction data indicating a corresponding relationship between each of the source voltages and the correction value is created.

Abstract: A securing structure includes: an optical fiber; a support body that includes a first groove that accommodates the optical fiber; and a resin member that, inside the first groove, covers a boundary between a coating section of the optical fiber and a coating-removed section of the optical fiber, and secures the optical fiber to the support body. The resin member spreads out of the first groove partway along the first groove.

Abstract: An optical connector includes: an enclosure having a light propagation space; a glass block disposed at an end of the enclosure; an output beam fiber that: extends from an exterior of the enclosure through the light propagation space and connects to the glass block, and includes: a beam core that propagates an output laser beam; and a cladding disposed around the beam core; and an optical feedback fiber that: extends from an interior of the light propagation space to an exterior of the enclosure, and includes a feedback core to which light propagating within the light propagation space couples.

Abstract: A structure includes: an optical fiber including a large-diameter section that is larger in diameter than a remainder of the optical fiber; and a glass block joined to a first end face of the large-diameter section of the optical fiber. The large-diameter section includes a tapering section that: includes, as part of a surface thereof, a sloping surface sloping at an angle of more than 0° and less than 90° to an optical axis of the optical fiber; and is disposed in a portion other than the first end face.

Abstract: A tunable external resonator laser is mode-hop-free for broadband and has a laser chip which emits light; a lens which collimates the light emitted from the laser chip, a diffraction grating which diffracts the light collimated by the lens, a support body to which the diffraction grating is fixed, and a movable mirror which reflects the light diffracted by the diffraction grating, wherein the diffraction grating is arranged a prescribed distance apart from a Littman-type tunable external resonator laser arrangement in which the movable mirror rotates on a pivot which is the intersection point of the surface of said movable mirror and the surface of the diffraction grating.

Abstract: To provide a tunable external resonator laser with mode-hop-free for broadband. For solving the problem, in a tunable external laser comprising, the offset is given between the pivot and the diffraction grating. The tunable external resonator laser comprising, a laser chip which emits light; a lens which collimates the light emitted from said laser chip, a diffraction grating which diffracts the light collimated by said lens, a support body which said diffraction grating is fixed, and a movable mirror which reflects the light diffracted by said diffraction grating, wherein said diffraction grating is arranged apart a prescribed distance from a Littman-type tunable external resonator laser arrangement in which said movable mirror rotates on a pivot which is the intersection point of the surface of said movable mirror and the surface of the said diffraction grating.

Abstract: Disclosed is an ASE-free continuously tunable external resonator laser in which reduction in tuning range and decrease in output are suppressed. The external resonator laser comprises: a fixed support body which has a half mirror that partially reflects incident light and partially transmits incident light fixed therein; and a rotatory support body which is rotatably supported by the fixed support body by way of a shaft, and which has a laser chip that emits light, a collimator lens that collimates light emitted from the laser chip, and a diffraction grating that diffracts light emitted from the laser chip, fixed therein.

Abstract: Disclosed is an ASE-free continuously tunable external resonator laser in which reduction in tuning range and decrease in output are suppressed. The external resonator laser comprises: a fixed support body which has a half mirror that partially reflects incident light and partially transmits incident light fixed therein; and a rotatory support body which is rotatably supported by the fixed support body by way of a shaft, and which has a laser chip that emits light, a collimator lens that collimates light emitted from the laser chip, and a diffraction grating that diffracts light emitted from the laser chip, fixed therein.