Patents by Inventor Tomohisa Kitayama

Tomohisa Kitayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11019285
    Abstract: A calibration method of an infrared camera includes setting a placing table on which a substrate is placed to different temperatures and acquiring a measurement value of radiation amount of infrared light emitted from each of multiple zones provided in a top surface of the placing table by an infrared camera at each of the temperatures; calculating, as a calibration value, a difference between a measurement value of a reference zone which is one of the zones provided with a temperature sensor and a measurement value of another one of the zones at each of the temperatures; specifying an interpolation curve indicating a variation tendency of the calibration value with respect to the measurement value of the reference zone for each of the zones; and storing parameters of the interpolation curve specified for each of the zones.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: May 25, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Tomohisa Kitayama, Takashi Kubo, Takari Yamamoto
  • Publication number: 20200411339
    Abstract: A correction data creating method is provided. In the method, a source voltage is sequentially selected among a plurality of source voltages determined in advance and the selected source voltage is supplied to a heater for heating a substrate support. At the source voltage supplied to the heater, a power supplied to the heater is adjusted such that a resistance of the heater becomes a resistance value corresponding to a predetermined first temperature based on temperature conversion data indicating a relationship between the resistance of the heater and a temperature of the heater. A temperature of the substrate support is measured at a position where the heater is disposed as a second temperature. A correction value corresponding to the difference between the predetermined first temperature and the second temperature is calculated, and correction data indicating a corresponding relationship between each of the source voltages and the correction value is created.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 31, 2020
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hiroki ENDO, Tomohisa KITAYAMA
  • Publication number: 20200177825
    Abstract: A calibration method of an infrared camera includes setting a placing table on which a substrate is placed to different temperatures and acquiring a measurement value of radiation amount of infrared light emitted from each of multiple zones provided in a top surface of the placing table by an infrared camera at each of the temperatures; calculating, as a calibration value, a difference between a measurement value of a reference zone which is one of the zones provided with a temperature sensor and a measurement value of another one of the zones at each of the temperatures; specifying an interpolation curve indicating a variation tendency of the calibration value with respect to the measurement value of the reference zone for each of the zones; and storing parameters of the interpolation curve specified for each of the zones.
    Type: Application
    Filed: November 27, 2019
    Publication date: June 4, 2020
    Inventors: Tomohisa Kitayama, Takashi Kubo, Takari Yamamoto