Abstract: A resist composition comprising a base polymer and an acid generator containing a sulfonium or iodonium salt of iodized benzamide group-containing fluorinated sulfonic acid offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.

Abstract: An onium salt consisting of an anion containing an iodized aromatic group and two sulfonate groups and a sulfonium or iodonium cation is a useful photoacid generator. A chemically amplified resist composition comprising the photoacid generator forms a pattern of rectangular profile with a good balance of sensitivity, CDU, LWR, MEF, and DOF when it is processed by photolithography using high-energy radiation.

Abstract: A negative resist composition is provided comprising a base polymer, a quencher in the form of a sulfonium salt of a weaker acid than a sulfonic acid which is fluorinated at ?- and/or ?-position of the sulfo group, the sulfonium salt having at least two polymerizable double bonds in the molecule, and an acid generator capable of generating a sulfonic acid which is fluorinated at ?- and/or ?-position of the sulfo group. The resist composition adapted for organic solvent development exhibits a high resolution and improved LWR or CDU.

Abstract: An engine is provided, which includes a combustion chamber defined by a crown surface of a piston, an inner wall surface of a cylinder in which the piston is slidably accommodated, and a pentroof-type ceiling surface formed in a cylinder head and formed with an intake port and an exhaust port. The crown surface includes an exhaust-side bottom part, an intake-side bottom part, an exhaust-side sloped surface rising toward a center part of the crown surface from the exhaust-side bottom part, an intake-side sloped surface rising toward the center part from the intake-side bottom part, and a flat surface provided continuously between upper ends of the exhaust-side and intake-side sloped surfaces, and extending perpendicularly to a cylinder axial direction in the center part of the crown surface. A surface area of the flat surface is larger than a surface area of the exhaust-side sloped surface.

Abstract: A negative resist composition is provided comprising a base polymer and an acid generator in the form of a sulfonium salt having at least two polymerizable double bonds in the molecule. The resist composition adapted for organic solvent development exhibits a high resolution and improved LWR or CDU.

Abstract: An engine system is provided, which includes an engine, a swirl control valve, and a controller. The engine includes a cylinder, a piston, and a fuel injection valve provided incliningly with respect to an axial direction of the piston and configured to directly inject fuel into the cylinder. The swirl control valve is provided inside an intake passage and generates a swirl flow inside the cylinder at least when the valve closes. When an engine load is below a given threshold, the controller controls the swirl control valve to close, and controls the fuel injection valve to inject fuel during an intake stroke. While the engine load is below the threshold, at a fixed engine speed, the controller controls to advance a fuel injection timing when the engine load is at a first load, compared with at a second load higher than the first load.

Abstract: An engine system is provided, which includes an engine, a swirl control valve, an EGR passage, an EGR gas adjusting mechanism, and a controller. The engine includes a cylinder, a piston, and a fuel injection valve. The swirl control valve is provided inside an intake passage and generates a swirl flow inside the cylinder when it closes. When an engine load is at or below a given threshold, the controller controls the swirl control valve to close. While the engine load is the threshold or below, the controller controls the EGR gas adjusting mechanism such that, at a fixed engine speed, an increase rate of an EGR gas amount with respect to an increase in the engine load is lower in a first load range than in a second load range, the first load range being on a higher load side of the second load range and including the threshold.

Abstract: An engine system is provided, which includes an engine, a swirl control valve, an EGR passage, an EGR gas adjusting mechanism, and a controller. The engine includes a cylinder, a piston, and a fuel injection valve. The swirl control valve is provided inside an intake passage and generates a swirl flow inside the cylinder when it closes. When an engine load is at or below a given threshold, the controller controls the swirl control valve to close. While the engine load is the threshold or below, the controller controls the EGR gas adjusting mechanism such that, at a fixed engine speed, an increase rate of an EGR gas amount with respect to an increase in the engine load is lower in a first load range than in a second load range, the first load range being on a higher load side of the second load range and including the threshold.

Abstract: An engine system is provided, which includes an engine, a swirl control valve, and a controller. The engine includes a cylinder, a piston, and a fuel injection valve provided incliningly with respect to an axial direction of the piston and configured to directly inject fuel into the cylinder. The swirl control valve is provided inside an intake passage and generates a swirl flow inside the cylinder at least when the valve closes. When an engine load is below a given threshold, the controller controls the swirl control valve to close, and controls the fuel injection valve to inject fuel during an intake stroke. While the engine load is below the threshold, at a fixed engine speed, the controller controls to advance a fuel injection timing when the engine load is at a first load, compared with at a second load higher than the first load.

Abstract: An engine is provided, which includes a combustion chamber defined by a crown surface of a piston, an inner wall surface of a cylinder in which the piston is slidably accommodated, and a pentroof-type ceiling surface formed in a cylinder head and formed with an intake port and an exhaust port. The crown surface includes an exhaust-side bottom part, an intake-side bottom part, an exhaust-side sloped surface rising toward a center part of the crown surface from the exhaust-side bottom part, an intake-side sloped surface rising toward the center part from the intake-side bottom part, and a flat surface provided continuously between upper ends of the exhaust-side and intake-side sloped surfaces, and extending perpendicularly to a cylinder axial direction in the center part of the crown surface. A surface area of the flat surface is larger than a surface area of the exhaust-side sloped surface.

Abstract: The present invention is a positive resist material containing: an acid generator, being a sulfonium salt having at least one fluorine atom in both an anion moiety of a sulfonate ion bonded to a polymer main chain and a cation moiety of a sulfonium ion; and a quencher, being a sulfonium salt containing an anion moiety of a carboxylate ion, a sulfonamide ion, an alkoxide ion, or a sulfonate ion having no fluorine atom at a position and a cation moiety of a sulfonium ion, the quencher having a total of two or more fluorine atoms in the anion moiety and the cation moiety. An object of the present invention is to provide: a positive resist material having sensitivity higher than that of conventional positive resist materials, and having little dimensional variation (CDU) in an exposure pattern; and a patterning process using the positive resist material.

Abstract: A resist composition is provided comprising a base polymer and a quencher comprising a cyclic ammonium salt having a fluorinated saturated hydrocarbyl group or fluorinated aryl group. The resist composition has a high sensitivity and forms a pattern with improved LWR or CDU, independent of whether it is of positive or negative tone.

Abstract: A resist composition comprising a base polymer and a quencher containing a compound having the formula (A) is provided.

Abstract: A resist composition comprising a base polymer and a quencher containing a salt compound having the formula (A) is provided.

Abstract: A resist composition comprising a quencher containing a sulfonium salt having the formula (A).

Abstract: An intake system of an engine supplies gas at least containing fresh air to each cylinder. The system includes an EGR passage that communicates with an internal space of a downstream intake passage and introduces some EGR gas into the downstream intake passage. The EGR passage includes a projected section in a substantially polygonal or cylindrical shape that is projected to the internal space of the downstream intake passage. The projected section is formed in such a shape that a projection length H1 in an outer circumferential surface on an upstream side is longer than a projection length H2 in an outer circumferential surface on a downstream side.

Abstract: An onium salt having formula (1) serving as an acid diffusion inhibitor and a chemically amplified resist composition comprising the acid diffusion inhibitor are provided. When processed by lithography, the resist composition exhibits a high sensitivity, and excellent lithography performance factors such as CDU and LWR.

Abstract: A resist composition comprising a base polymer and an acid generator containing a sulfonium or iodonium salt of iodized benzamide group-containing fluorinated sulfonic acid offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.

Abstract: An intake system of an engine supplies gas at least containing fresh air to each cylinder. The system includes an EGR passage that communicates with an internal space of a downstream intake passage and introduces some EGR gas into the downstream intake passage. The EGR passage includes a projected section in a substantially polygonal or cylindrical shape that is projected to the internal space of the downstream intake passage. The projected section is formed in such a shape that a projection length H1 in an outer circumferential surface on an upstream side is longer than a projection length H2 in an outer circumferential surface on a downstream side.

Abstract: In the present invention, a vacant block which is unwritten is identified as a temporary storage block when a writing destination block has already data written. Then, data writing step writing an incoming data to be written into the temporarily storage block, managing step including assigning a pair of the writing destination block and the temporarily storage block an index number which corresponds to the pair, and generating a management table which indicates the index number associating with a physical address indicating a physical position of the temporarily storage block in the nonvolatile memory are performed. In the data writing step, the physical address which corresponds to the index number assigned to the writing destination block is obtained from the management table. The incoming data to be written is written into the temporary storage block indicated by the physical address.