Patents by Inventor Tomonori Awajikawa

Tomonori Awajikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure method, exposure apparatus, and method of manufacturing article
    Patent number: 10732518
    Abstract: The present invention provides an exposure method of exposing a substrate via an original held by a stage while scanning the original, comprising: performing a first step of scan-driving the stage so that a maximum acceleration becomes a first acceleration; and performing a second step of scan-driving the stage while exposing the substrate so that the maximum acceleration becomes a second acceleration after the performing the first step, wherein the first acceleration is lower than the second acceleration.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: August 4, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Tomonori Awajikawa, Hayato Hoshino, Norihiro Sakurakawa
  • EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
    Publication number: 20190384186
    Abstract: The present invention provides an exposure method of exposing a substrate via an original held by a stage while scanning the original, comprising: performing a first step of scan-driving the stage so that a maximum acceleration becomes a first acceleration; and performing a second step of scan-driving the stage while exposing the substrate so that the maximum acceleration becomes a second acceleration after the performing the first step, wherein the first acceleration is lower than the second acceleration.
    Type: Application
    Filed: May 23, 2019
    Publication date: December 19, 2019
    Inventors: Tomonori Awajikawa, Hayato Hoshino, Norihiro Sakurakawa