Patents by Inventor Tomoyasu Nagayumi

Tomoyasu Nagayumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conducting belt for use with anode holder and anode holder
    Patent number: 7897024
    Abstract: A conducting belt is used with an anode holder for supplying an electric current to an anode for plating a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating apparatus. The conducting belt includes a belt capable of contacting an outer circumferential edge of the anode and holding the anode.
    Type: Grant
    Filed: March 4, 2008
    Date of Patent: March 1, 2011
    Assignee: Ebara Corporation
    Inventors: Mitsutoshi Yahagi, Kenichi Abe, Yuji Araki, Yoshio Minami, Tomoyasu Nagayumi
  • Conducting belt for use with anode holder and anode holder
    Publication number: 20090050473
    Abstract: A conducting belt is used with an anode holder for supplying an electric current to an anode for plating a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating apparatus. The conducting belt includes a belt capable of contacting an outer circumferential edge of the anode and holding the anode.
    Type: Application
    Filed: March 4, 2008
    Publication date: February 26, 2009
    Inventors: Mitsutoshi Yahagi, Kenichi Abe, Yuji Araki, Yoshio Minami, Tomoyasu Nagayumi