Abstract: In a method for fabricating an electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to the displacement of the movable electrode, the method includes: a step of forming a groove on at least one of the surface of an insulative substrate and the surface of a semiconductor substrate; a step of forming a hole in the semiconductor substrate so as to penetrate the semiconductor substrate at a position communicating with a passage formed by the groove; and a step of forming an electrode extraction hole in the insulative substrate so as to penetrate the insulative substrate, at a position communicating with the passage formed by the groove.

Abstract: An acceleration sensor circuit 1 of the invention includes an acceleration sensor 11 having a first capacitor C1 whose capacitance changes according to a position of a first movable electrode and a second capacitor C2 whose capacitance changes as opposed to the first capacitor according to a position of a second movable electrode moved together with the first movable electrode, a first circuit 15A for generating a sinusoidal AC signal of a predetermined frequency, a second circuit 12 for generating a signal according to the positions of the movable electrodes, and an arithmetic circuit 14 for analyzing data in which a signal generated by the second circuit 12 is encoded and outputting data of acceleration.

Abstract: In a method for fabricating an electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to the displacement of the movable electrode, the method includes: a step of forming a groove on at least one of the surface of an insulative substrate and the surface of a semiconductor substrate; a step of forming a hole in the semiconductor substrate so as to penetrate the semiconductor substrate at a position communicating with a passage formed by the groove; and a step of forming an electrode extraction hole in the insulative substrate so as to penetrate the insulative substrate, at a position communicating with the passage formed by the groove.

Abstract: An acceleration sensor circuit 1 of the invention includes an acceleration sensor 11 having a first capacitor C1 whose capacitance changes according to a position of a first movable electrode and a second capacitor C2 whose capacitance changes as opposed to the first capacitor according to a position of a second movable electrode moved together with the first movable electrode, a first circuit 15A for generating a sinusoidal AC signal of a predetermined frequency, a second circuit 12 for generating a signal according to the positions of the movable electrodes, and an arithmetic circuit 14 for analyzing data in which a signal generated by the second circuit 12 is encoded and outputting data of acceleration.