Abstract: Provided is a high-performance persistent current switch that is provided with a superconducting coil in which a decrease of a critical current or a critical magnetic field is suppressed. A means for solving the problem is as follows. A persistent current switch provided with a superconducting coil in a switch unit. A superconducting coil 5 includes a winding portion 53 which is formed using a superconductor thin film formed on an outer circumferential face of a base member 50. The winding portion 53 includes a first winding portion 51 and a second winding portion 52 which are formed in a double helical shape to be parallel to each other. A terminating end portion 51b of the first winding portion 51 and a starting end portion 52a of the second winding portion 52, which are adjacent to each other, are connected to each other.

Abstract: There is provided a transport apparatus including: an articulated arm including: a first arm in which a drive motor is installed; a second arm configured to be driven by the first arm; a transmission portion configured to convert a rotation of the drive motor into a rotation of the second arm via a joint; a first detector configured to detect a first sensor value corresponding to a rotation angle of an input shaft of the transmission portion; and a second detector configured to detect a second sensor value corresponding to a rotation angle of the second arm; and a controller configured to control the articulated arm, wherein the controller is further configured to control the second arm to a target rotation angle based on the first sensor value and the second sensor value.

Abstract: There is provided a substrate detection apparatus of detecting whether or not a substrate is normally supported by a support part at a predetermined position, in a transfer device including the support part configured to support a plurality of disc-like substrates in multi-stage processing at vertical intervals. The substrate detection apparatus includes: a plurality of optical sensors, each of the plurality of optical sensors including a light transmitting part configured to irradiate a light and a light receiving part configured to receive the light from the light transmitting part, wherein at least one pair of the plurality of optical sensors are disposed such that the light from the light transmitting part is sequentially blocked at each of the plurality of disc-like substrates, during the plurality of disc-like substrates is collectively transferred while being normally supported by the support part at the predetermined positions.

Abstract: Provided is a substrate conveying method including: holding a substrate by a holder; rotating the substrate while conveying the substrate; specifying a position of an edge of the substrate based on a position of the holder when the edge of the substrate crosses a facing surface of a sensor that is disposed on a conveyance trajectory of the substrate, and a position of the sensor; and removing an influence of the rotation of the substrate from the specified position of the edge of the substrate.

Abstract: A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.

Abstract: A posture holding device is for use in a transfer device which has a holding part configured to hold an object and a first link and a second link connected to the holding part. The transfer device moves the first link and the second link relative to the holding part so as to move the holding part between a transfer position and a standby position. The posture holding device holds a posture of the holding part and includes a magnetic gear rotatably connecting the first link and the second link to the holding part. The magnetic gear is disposed such that the one end of the first link connected to the holding part is rotated about a first axis and the one end of the second link connected to the holding part is rotated about the first axis or a second axis different from the first axis.

Abstract: Provided is a substrate conveying method including: holding a substrate by a holder; rotating the substrate while conveying the substrate; specifying a position of an edge of the substrate based on a position of the holder when the edge of the substrate crosses a facing surface of a sensor that is disposed on a conveyance trajectory of the substrate, and a position of the sensor; and removing an influence of the rotation of the substrate from the specified position of the edge of the substrate.

Abstract: An alignment apparatus for aligning a wafer includes a mounting unit, an imaging unit, an elevation unit, and a controlling unit. The control unit outputs a control signal for controlling the elevation unit such that a luminance variation between the outer side and the inner side of the wafer obtained by the imaging unit becomes the same as a luminance variation obtained when the imaging unit is focused, for estimating a warpage state of the wafer based on an amount of relative movement of the imaging unit and the mounting unit with respect to a relative height position of the imaging unit and the mounting unit obtained when the imaging unit is focused on a reference wafer having no warpage, and for detecting the alignment mark of the wafer by the imaging unit by rotating the mounting unit in a state where the imaging unit is focused.

Abstract: An alignment apparatus for aligning a wafer by optically detecting an alignment mark includes an imaging unit configured to image an imaging region extending across a circumferential edge of the wafer, an irradiation unit configured to irradiate light toward the imaging region, a reflection part configured to reflect toward the imaging region the light that is irradiated from the irradiation unit upwardly, and a control unit configured to detect the circumferential edge. The reflection part has a reflectance making a luminance difference between the outside of the wafer and the circumferential edge of the wafer in a luminance distribution pattern obtained by imaging the imaging region. The control unit detects the alignment mark and the circumferential edge based on the luminance distribution pattern.

Abstract: A posture holding device is for use in a transfer device which has a holding part configured to hold an object and a first link and a second link connected to the holding part. The transfer device moves the first link and the second link relative to the holding part so as to move the holding part between a transfer position and a standby position. The posture holding device holds a posture of the holding part and includes a magnetic gear rotatably connecting the first link and the second link to the holding part. The magnetic gear is disposed such that the one end of the first link connected to the holding part is rotated about a first axis and the one end of the second link connected to the holding part is rotated about the first axis or a second axis different from the first axis.

Abstract: There is provided a substrate detection apparatus of detecting whether or not a substrate is normally supported by a support part at a predetermined position, in a transfer device including the support part configured to support a plurality of disc-like substrates in multi-stage processing at vertical intervals. The substrate detection apparatus includes: a plurality of optical sensors, each of the plurality of optical sensors including a light transmitting part configured to irradiate a light and a light receiving part configured to receive the light from the light transmitting part, wherein at least one pair of the plurality of optical sensors are disposed such that the light from the light transmitting part is sequentially blocked at each of the plurality of disc-like substrates, during the plurality of disc-like substrates is collectively transferred while being normally supported by the support part at the predetermined positions.

Abstract: An alignment apparatus for aligning a wafer includes a mounting unit, an imaging unit, an elevation unit, and a controlling unit. The control unit outputs a control signal for controlling the elevation unit such that a luminance variation between the outer side and the inner side of the wafer obtained by the imaging unit becomes the same as a luminance variation obtained when the imaging unit is focused, for estimating a warpage state of the wafer based on an amount of relative movement of the imaging unit and the mounting unit with respect to a relative height position of the imaging unit and the mounting unit obtained when the imaging unit is focused on a reference wafer having no warpage, and for detecting the alignment mark of the wafer by the imaging unit by rotating the mounting unit in a state where the imaging unit is focused.

Abstract: An alignment apparatus for aligning a wafer by optically detecting an alignment mark includes an imaging unit configured to image an imaging region extending across a circumferential edge of the wafer, an irradiation unit configured to irradiate light toward the imaging region, a reflection part configured to reflect toward the imaging region the light that is irradiated from the irradiation unit upwardly, and a control unit configured to detect the circumferential edge. The reflection part has a reflectance making a luminance difference between the outside of the wafer and the circumferential edge of the wafer in a luminance distribution pattern obtained by imaging the imaging region. The control unit detects the alignment mark and the circumferential edge based on the luminance distribution pattern.

Abstract: A substrate transportation path is determined by first determining a trajectory of a first straight line passing through a start point, calculating a trajectory of a circular arc in contact with the first straight line, calculating a trajectory of a second straight line in contact with the circular arc and passing through the end point, then, if the position of the end point is changed, re-calculating the second straight line as a straight line passing through the changed end point and in contact with the circular arc, and allowing the center of the substrate holding unit to move on the first straight line, and then, move on the circular arc from a first contact point, followed by moving on the second straight line from a second contact point so as to reach the end point.

Abstract: A substrate transportation path is determined by first determining a trajectory of a first straight line passing through a start point, calculating a trajectory of a circular arc in contact with the first straight line, calculating a trajectory of a second straight line in contact with the circular arc and passing through the end point, then, if the position of the end point is changed, re-calculating the second straight line as a straight line passing through the changed end point and in contact with the circular arc, and allowing the center of the substrate holding unit to move on the first straight line, and then, move on the circular arc from a first contact point, followed by moving on the second straight line from a second contact point so as to reach the end point.

Abstract: A support information display method is provided with an acquiring process for acquiring a first image by photographing, via a camera provided in a head mount display, a predetermined part of a substrate processing apparatus as a maintenance object, an estimating process for estimating the support information related to the predetermined part in the first image from information stored in a database, an image creating process for creating a second image by converting the support information estimated in the estimating process into an image, and a displaying process for displaying the second image on the head mount display in order for the operator to visually recognize the support information.

Abstract: Drug candidates for inhibition of HIV-1 replication can target Src family kinases (SFK), such as Hck, that interact with Nef protein of the virus. Compounds characterized by such inhibitory activity were identified via an assay for kinase activity of an SFK in a Nef:SFK complex. Illustrative of inhibitors identified using the kinase assay are various 2,3-diaminoquinaxolines and furo[2,3-d]pyrimidines. The inventive inhibitors were found to arrest HIV-1 viral replication in vitro.

Abstract: Drug candidates for inhibition of HIV-I replication can target Src family kinases (SFK), such as Hck, that interact with Nef protein of the virus. Compounds characterized by such inhibitory activity were identified via an assay for kinase activity of an SFK in a Nef:SFK complex. Illustrative of inhibitors identified using the kinase assay are various 2,3-diaminoquinaxolines and furo[2,3-d]pyrimidines. The inventive inhibitors were found to arrest HIV-I viral replication in vitro.

Abstract: Drug candidates for inhibition of HIV-I replication can target Src family kinases (SFK), such as Hck, that interact with Nef protein of the virus. Compounds characterized by such inhibitory activity were identified via an assay for kinase activity of an SFK in a Nef:SFK complex. Illustrative of inhibitors identified using the kinase assay are various 2,3-diaminoquinaxolines and furo[2,3-d]pyrimidines. The inventive inhibitors were found to arrest HIV-I viral replication in vitro.

Abstract: A lipolytic enzyme inhibitor is disclosed which comprises as an active ingredient at least one of a basic protein, a basic polypeptide and salt thereof. The inhibitor is useful as a dieting agent for the prevention of obesity and lipemia and as an additive for food and feed.