Patents by Inventor Toshiaki Yoshimura

Toshiaki Yoshimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190048468
    Abstract: The present invention improves the in-plane uniformity of film formation via a plasma treatment.
    Type: Application
    Filed: March 3, 2016
    Publication date: February 14, 2019
    Inventors: Toshiaki YOSHIMURA, Hiroyuki MINOWA, Lung Kei Amos SHEK
  • Publication number: 20190019656
    Abstract: The present invention improves the in-plane uniformity of films formed via a plasma treatment.
    Type: Application
    Filed: March 3, 2016
    Publication date: January 17, 2019
    Inventors: Toshiaki YOSHIMURA, Hiroyuki MINOWA, Lung Kei Amos SHEK
  • Patent number: 8591824
    Abstract: The heat treating furnace for the gas reaction includes an outer body, an inner body, a heating mechanism, gas supplying mechanism, and a controller. Using the controller to control the amount of gas supply effectively keeps the first pressure (P1) in the gas circulation chamber outside the inner body greater than the second pressure (P2) in the reaction chamber inside the inner body all the time. In this way, the flow rate of gas inlet, reaction rate, cooling rate can be facilitated, and the uniformity of the thin film and the operational safety can be improved.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: November 26, 2013
    Assignees: Kern Energy Enterprise Co., Ltd.
    Inventors: Ying-Shih Hsiao, Toshiaki Yoshimura
  • Publication number: 20130125797
    Abstract: The vertical heat treating furnace for the gas reaction includes an outer body, an inner body, a heating mechanism, gas supplying mechanism, and a controller. Using the controller to control the amount of gas supply effectively keeps the first pressure (P1) in the gas circulation chamber outside the inner body greater than the second pressure (P2) in the reaction chamber inside the inner body all the time. In this way, the flow rate of gas inlet, reaction rate, cooling rate can be facilitated, and the uniformity of the thin film and the operational safety can be improved.
    Type: Application
    Filed: February 14, 2012
    Publication date: May 23, 2013
    Inventors: Ying-Shih HSIAO, Toshiaki Yoshimura
  • Publication number: 20130084216
    Abstract: The heat treating furnace for the gas reaction includes an outer body, an inner body, a heating mechanism, gas supplying mechanism, and a controller. Using the controller to control the amount of gas supply effectively keeps the first pressure (P1) in the gas circulation chamber outside the inner body greater than the second pressure (P2) in the reaction chamber inside the inner body all the time. In this way, the flow rate of gas inlet, reaction rate, cooling rate can be facilitated, and the uniformity of the thin film and the operational safety can be improved.
    Type: Application
    Filed: December 28, 2011
    Publication date: April 4, 2013
    Inventors: Ying-Shih HSIAO, Toshiaki YOSHIMURA
  • Publication number: 20130072000
    Abstract: This invention discloses a thin film processing equipment for depositing a film on a substrate and a process for depositing a film on a substrate using the same. The thin film processing equipment comprises a reaction chamber, a gas supplying mechanism, and a transferring mechanism. The thin film processing equipment is characterized in that a gas supplying mechanism is capable of moving up-and-down or left-and-right, and a tray is capable of moving up-and-down, thereby the distance between the gas supplying mechanism and the substrate can be adjusted.
    Type: Application
    Filed: December 22, 2011
    Publication date: March 21, 2013
    Inventors: Ying-Shih Hsiao, Toshiaki Yoshimura
  • Publication number: 20130071567
    Abstract: This invention discloses a thin film process equipment for depositing a film on a substrate and a process of forming the film using the same. The thin film process apparatus comprises a reaction chamber, a gas supplying mechanism, and a transferring mechanism. The film processing equipment is characterized in that the gas supplying mechanism is formed by a plurality of gas supplying ports in form of the concentric-circle structure for spraying down different kinds of gas, so that the mixing of different kinds of gas become uniform, thus facilitate the gas reaction and the formation of films.
    Type: Application
    Filed: December 22, 2011
    Publication date: March 21, 2013
    Inventors: Ying-Shih HSIAO, Toshiaki Yoshimura
  • Patent number: 5202543
    Abstract: A manufacturing process of an offset-type fuel delivery rail assembly for an internal combustion engine. The offset-type assembly features offset distances between an axial centerline of an elongated conduit and those of tubular sockets for receiving fuel injectors. The process comprises the steps of clamping a conduit with a chucking tool, lowering a cutting blade onto the conduit to form arcuate edges corresponding to outside curvatures of tubular sockets, attaching the tubular sockets to the arcuate edges of the conduit by spot welding, and then brazing or welding around the arcuate edges to form an integral assembly. The cutting blade is formed into a solid circular configuration having an oblique plane. The cutting blade may be provided with a pair of longitudinal slots in order to form projections for concentrating electrical current during spot welding.
    Type: Grant
    Filed: October 28, 1991
    Date of Patent: April 13, 1993
    Assignee: Usui Kokusai Sangyo Kaisha Ltd.
    Inventor: Toshiaki Yoshimura
  • Patent number: 5022372
    Abstract: A fuel delivery rail assembly is disclosed for supplying fuel to a plurality of fuel injectors in an engine. The assembly includes an elongated conduit having a rectangular or square hollow section with a fuel passage therein and a plurality of sockets for making fluid communication between the conduit and the injectors. One end portion of the conduit at the fuel inlet side thereof is transformed into a circular hollow section by shrinking work or enlargement work from said rectangular or square section. Within the inside of the circular hollow section a fuel inlet pipe is inserted directly or indirectly via a straight adaptor and is brazed together, whereby the fuel inlet pipe is connected in alignment with the conduit.
    Type: Grant
    Filed: March 15, 1989
    Date of Patent: June 11, 1991
    Assignee: Usui Kokusai Sangyo Kaisha Ltd.
    Inventors: Izumi Imura, Tatsuhiko Uesugi, Toshiaki Yoshimura