Abstract: A heat flux sensor is provided with a main body which detects heat flux, and filling members. The main body has a first surface. The first surface has an uneven shape, with a plurality of concave portions and a plurality of convex portions. The filling members are filled in the plurality of concave portions. Surfaces of the filling members constitutes a part of an outer surface of the heat flux sensor. The degree of flatness of the outer surface is higher than the degree of flatness of the first surface of the main body.

Abstract: A state detection sensor is provided with a first sensor unit, a second sensor unit, an intermediate insulation sensor disposed between the first sensor unit and the second sensor unit. The first surface of the intermediate insulation layer is joined to the second wiring of the first sensor unit. The second surface of the intermediate insulation layer is joined to the third wiring of the second sensor unit. The first sensor unit and the second sensor unit are electrically connected in series in a state where a polarity of thermoelectrormotive force produced in the first sensor unit and a polarity of thermoelectromotive force produced in the second sensor unit are in mutually opposite polarity relationship when a heat flow passes through the first sensor unit and the second sensor unit in the same direction.

Abstract: A position detection device, for detecting a change in relative position of a detection object with respect to a reference portion, includes: a base portion immovable with respect to the reference portion; a following portion deformable or movable following relative movement of the detection object with respect to the reference portion; an expandable and contractible member; and a heat flux detection section. The expandable and contractible member is provided between the base portion and the following portion, is made of a material expandable and contractible according to deformation or movement of the following portion, and generates heat during contraction and absorbs heat during expansion. The heat flux detection section is provided to be subjected to heat of the expandable and contractible member, and is configured to detect a heat flux that is a flow of heat between an inside and an outside of the expandable and contractible member.

Abstract: A heat flow measurement apparatus is provided with a heat flux sensor and a thermocouple sheet. The heat flux sensor includes an insulation substrate, a plurality of interlayer connection members, a front surface wiring pattern, a back surface wiring pattern, a front surface protective member and a back surface protective member. The thermocouple sheet includes a thermocouple, a first insulation sheet and a second insulation sheet, and is fixed to a portion where the front surface protective member and the back surface protective member extend in a surface direction from the insulation substrate.

Abstract: A failure diagnostic apparatus for use in a ball screw conveyer includes a bearing stopper placed in contact with a bearing supporting a ball screw, a sensor unit equipped with an elastic member and a heat flux sensor, and a malfunction detector. The heat flux sensor works to produce an output as a function of deformation or displacement of the bearing stopper. The malfunction detector works to analyze the output from the heat flux sensor to detect a failure in operation of the ball screw conveyer. This enables a malfunction of the ball screw conveyer to be detected quickly and accurately.

Abstract: A strain detecting device includes a sensor portion and a covering elastic deformation member. The elastic deformation member generates heat when compressed and absorbs heat when expanded, resulting in heat flux. The sensor portion includes first and second heat flux sensors, each of which has first and second sensor surfaces formed opposite to each other. Each sensor outputs a strain-indicating signal of a polarity when the heat flux passes through the sensor, from the first sensor surface to the second sensor surface, and outputs a strain-indicating signal of an opposite polarity when the heat flux passes through the sensor in reverse, from the second sensor surface to the first sensor surface. The first sensor surfaces are opposed to each other across a heat absorbing member interposed between the sensors. The sensor portion generates signals based on the heat flux generated by deformation of the elastic deformation member.

Abstract: A support device comprises a piston rod and a fixed member arranged so that a target object is placed therebetween, and an elastic member is provided to the target object side of the fixed member. A monitoring device includes a heat flux sensor and a detection part. When the target object is supported between the piston rod and the fixed member due to force applied by the piston rod, the heat flux sensor outputs a signal corresponding to the heat flux flowing between the elastic member, which is compressed by the load applied from the piston rod, and the fixed member. Based on the signal output by the heat flux sensor, the detection part detects the support state of the target object supported by the support device, or the size of the target object.

Abstract: A position change measuring device which measures a change in position of a target object and includes a base member, a press member which is movable following a change in position of the target object, an elastic member which produces heat when contracting or absorbs heat when expanding, a heat flux sensor which outputs a signal as a function of a rate of heat flux transferred inside or outside the elastic member, and a diaphragm unit which is made of elastically deformable material. The diaphragm unit is retained by the base member in contact with the press member and works to produce force of resilience to recover the elastic member to its initial state when the elastic member contracts or expands in response to movement of the press member. This structure improves a response rate for sensing a change in position of the target object with high accuracy.

Abstract: An air cylinder includes a tubular cylinder and a piston which is moved by pressure of a fluid supplied to a chamber provided inside the cylinder. A monitoring device includes a heat flux sensor and a detection part. The heat flux sensor is provided to the cylinder and detects heat flux that flows between inside and outside of the cylinder due to compression or expansion of the fluid in the chamber caused in accordance with the movement of the piston. The detection part detects the moving state of the piston based on the output signal of the heat flux sensor.

Abstract: An operating-status diagnostic apparatus includes a sensor unit and a control unit. The sensor unit detects heat fluxes flowing outward from a component of a facility. A control unit determines whether or not an operating status of the facility indicates that the component is in a warming-up complete state where warming-up of the component is completed based on a detection result of detection by the sensor unit.

Abstract: A diagnosis apparatus diagnoses an assembly state of an assembled component having a sliding portion. The diagnosis apparatus includes a sensor unit that detects a heat flux flowing from the sliding portion toward an outside, and a control apparatus that determines whether an assembly state of the assembled component is correct or not based on a detection result detected by the sensor unit. A magnitude of a heat flux from the sliding portion is different between when the assembly state of the assembled component having the sliding portion is correct and when it is incorrect. Hence, according to the diagnosis apparatus, it is possible to diagnose whether an assembly state of the assembled component is correct or not.

Abstract: A method of manufacturing a thermoelectric converter includes filling each of a plurality of through-holes in each of a plurality of resin films with fillers containing a plurality of thermoelectric material particles. At this time, a part of the filler is extruded from each through-hole. In this state, the plurality of resin films are stacked together. A top-surface protection member having top-surface conductor patterns is stacked on one side of the plurality of resin films. A back-surface protection member having back-surface conductor patterns is stacked on the other side of the plurality of resin films. Thus, an integrated stacked body is formed. The integrated stacked body is then heated and pressurized. A plurality of thermoelectric material particles are thereby sintered to form the first and second thermoelectric members.

Abstract: An air cylinder includes a tubular cylinder and a piston which is moved by pressure of a fluid supplied to a chamber provided inside the cylinder. A monitoring device includes a heat flux sensor and a detection part. The heat flux sensor is provided to the cylinder and detects heat flux that flows between inside and outside of the cylinder due to compression or expansion of the fluid in the chamber caused in accordance with the movement of the piston. The detection part detects the moving state of the piston based on the output signal of the heat flux sensor.

Abstract: An abnormality diagnosis apparatus includes a sensor unit configured to detect a heat flux which flows from a target apparatus toward outside, and a determining unit configured to determine an abnormality of the target apparatus. The sensor unit includes a first heat flux sensor, a second heat flux sensor, and a thermal buffer which is disposed between the first heat flux sensor and the second heat flux sensor and which has predetermined heat capacity. The first heat flux sensor outputs a first sensor signal in accordance with a heat flux which passes through the first heat flux sensor from the target apparatus side toward the thermal buffer side. The second heat flux sensor outputs a second sensor signal in accordance with a heat flux which passes through the second heat flux sensor from the thermal buffer side toward a side farther from the target apparatus.

Abstract: A heater plate includes a sheet-like heating member that generates heat upon being energized, a protective film provided on the side of one major surface of the sheet-like heating member to protect the sheet-like heating member, an output circuit section provided on a surface of the protective film on the opposite side to the sheet-like heating member, and a protruding portion forming film provided between the protective film and the sheet-like heating member. The output circuit section has protruding portions formed to be capable of respectively abutting terminals of a heat flux sensor which is an inspection object. The protruding portion forming film has protrusions at positions corresponding to the protruding portions. The sheet-like heating member, the protective film, the output circuit section and the protruding portion forming film are integrally formed into one piece.

Abstract: Provided is a monitoring apparatus configured to monitor the pressure state of a fluid in a target apparatus having a chamber in which at least one of compression and expansion of the fluid is performed. The monitoring apparatus includes a heat flux sensor provided for the target apparatus and configured to measure a heat flux between inside and outside of the chamber. The monitoring apparatus includes a determining unit configured to determine the pressure state of the fluid based on a measurement result of the heat flux sensor.

Abstract: A strain detector is interposed between a base and an attachment member in a structure body having the base, the attachment member, and the stainless bolts fixed the base to the attachment member. The strain detector includes an elastic member and a heat flux sensor. The elastic member is provided to compress or extend in accordance with a deformation of the stainless bolts, and the elastic member generates heat based on the compression and absorbs heat based on the extension. The heat flux sensor is deformed in accordance with the compression or the extension of the elastic member and the heat in the elastic member is transferred to the heat flux sensor. The heat flux sensor can detect a magnitude of the heat flux Fh1 as a heat stream between the inside of the elastic member and the outside, generated by the compression or the extension of the elastic member.

Abstract: A heat flow measurement apparatus is provided with a heat flux sensor and a thermocouple sheet. The heat flux sensor includes an insulation substrate, a plurality of interlayer connection members, a front surface wiring pattern, a back surface wiring pattern, a front surface protective member and a back surface protective member. The thermocouple sheet includes a thermocouple, a first insulation sheet and a second insulation sheet, and is fixed to a portion where the front surface protective member and the back surface protective member extend in a surface direction from the insulation substrate.

Abstract: A position detection device, for detecting a change in relative position of a detection object with respect to a reference portion, includes: a base portion immovable with respect to the reference portion; a following portion deformable or movable following relative movement of the detection object with respect to the reference portion; an expandable and contractible member; and a heat flux detection section. The expandable and contractible member is provided between the base portion and the following portion, is made of a material expandable and contractible according to deformation or movement of the following portion, and generates heat during contraction and absorbs heat during expansion. The heat flux detection section is provided to be subjected to heat of the expandable and contractible member, and is configured to detect a heat flux that is a flow of heat between an inside and an outside of the expandable and contractible member.

Abstract: With a method of manufacturing a thermoelectric conversion device, first via holes of a first insulator are filled with a first conductive paste. Third via holes of a second insulator are filled with a second conductive paste. Next, parts of the first conductive paste protruding from the first via holes of the first insulator are inserted into fourth via holes of the second insulator. Parts of the second conductive paste protruding from the third via holes of the second insulator are inserted into second via holes. Next, a rear surface protection member having rear surface wiring patterns, the second insulator, the first insulator, and a front surface protection member having front surface wiring patterns are arranged in this order to form a stacked body. Next, the stacked body is heated while being pressed in the stacking direction.